公开(公告)号：US06660606B2

公开(公告)日：2003-12-09

申请号：US09963449

申请日：2001-09-27

申请人： Hiroshi Miyabayashi ,  Nobuhiko Sato ,  Masataka Ito

发明人： Hiroshi Miyabayashi ,  Nobuhiko Sato ,  Masataka Ito

IPC分类号： H01L21336

CPC分类号： H01L21/76259

摘要： The number of defects (HF defects) in the SOI layer of an SOI substrate is reduced. In an annealing method of annealing an SOI substrate in a reducing atmosphere at a temperature equal to or less than the melting point of a semiconductor, annealing is executed in a state wherein a flow of a reducing atmospheric gas parallel to the surface of the SOI substrate is generated near this surface.

摘要翻译： SOI衬底的SOI层中的缺陷数（HF缺陷）减少。 在还原性气氛中，在半导体的熔点以下的温度退火SOI衬底的退火方法中，在与SOI衬底的表面平行的还原气氛气体的流动的状态下进行退火 在该表面附近产生。

公开(公告)号：US07945873B2

公开(公告)日：2011-05-17

申请号：US12048691

申请日：2008-03-14

申请人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

发明人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

IPC分类号： G06F17/50

CPC分类号： G03F1/68 ,  G03F1/50 ,  G03F7/0005 ,  Y10T29/49

摘要： A method of generating mask pattern data of a photomask used to form microlenses divides a pattern formation surface of a mask pattern to be used for the photomask into a plurality of grid cells, acquires data that represent a transmitted light distribution of the mask pattern to be used for the photomask, determines whether to place a shield on each of the plurality of grid cells by binarizing the plurality of grid cells in order of increasing or decreasing distance from a center of the pattern formation surface using an error diffusion method, to acquire the transmitted light distribution, and generates mask pattern data that represent an arrangement of the shields, based on the determination.

摘要翻译： 产生用于形成微透镜的光掩模的掩模图案数据的方法将用于光掩模的掩模图案的图案形成表面划分成多个网格单元，获取表示掩模图案的透射光分布的数据为 用于光掩模的方法，通过使用误差扩散法从图案形成面的中心的距离增加或减小的次数二次化多个网格单元，确定是否对多个网格单元中的每一个放置屏蔽，以获取 透射光分布，并且基于该确定生成表示屏蔽的布置的掩模图案数据。

公开(公告)号：US06639327B2

公开(公告)日：2003-10-28

申请号：US09899257

申请日：2001-07-06

申请人： Kazutaka Momoi ,  Takao Yonehara ,  Nobuhiko Sato ,  Masataka Ito ,  Noriaki Honma

发明人： Kazutaka Momoi ,  Takao Yonehara ,  Nobuhiko Sato ,  Masataka Ito ,  Noriaki Honma

IPC分类号： H01L2358

CPC分类号： H01L21/76251 ,  H01L21/3226 ,  H01L21/764

摘要： In a bonded semiconductor member, microgaps are formed on a substrate side of a bonding interface to thereby constitute a gettering site, and heavy metal elements contaminated in the substrate are captured by the microgaps. The bonded semiconductor member is manufactured by interposing the microgaps between two substrates.

公开(公告)号：US20110170197A1

公开(公告)日：2011-07-14

申请号：US13076511

申请日：2011-03-31

申请人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

发明人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

IPC分类号： G02B27/12 ,  G02B3/00 ,  G03F1/00 ,  B23P17/04

CPC分类号： G03F1/68 ,  G03F1/50 ,  G03F7/0005 ,  Y10T29/49

摘要： A method of fabricating a photomask used to form a lens. The method includes the steps of generating mask pattern data for each of a plurality of grid cells constituting a mask pattern for the lens, and fabricating the photomask based on the mask pattern data. The step of generating the mask pattern data includes acquiring data which represents a transmitted light distribution required for the photomask to fabricate the lens, in which the transmitted light distribution includes a quantity of transmitted light in each of the plurality of grid cells, and determining whether to place a shield on each of the plurality of grid cells by binarizing the quantity of transmitted light in each of the plurality of grid cells in order of increasing or decreasing distance from a center of the mask pattern using an error diffusion method.

摘要翻译： 一种制造用于形成透镜的光掩模的方法。 该方法包括以下步骤：为构成透镜的掩模图案的多个网格单元中的每一个生成掩模图案数据，以及基于掩模图案数据来制造光掩模。 生成掩模图案数据的步骤包括获取表示光掩模所需的透射光分布以制造透镜的数据，其中透射光分布包括多个格栅单元中的每一个中的透射光量，以及确定是否 通过使用误差扩散法从掩模图案的中心的距离的增加或减小的顺序二值化多个网格单元中的每一个网格单元中的透射光的量来将屏蔽放置在多个网格单元中的每一个上。

公开(公告)号：US08209641B2

公开(公告)日：2012-06-26

申请号：US13076511

申请日：2011-03-31

申请人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

发明人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

IPC分类号： G06F17/50

CPC分类号： G03F1/68 ,  G03F1/50 ,  G03F7/0005 ,  Y10T29/49

摘要： A method of fabricating a photomask used to form a lens. The method includes the steps of generating mask pattern data for each of a plurality of grid cells constituting a mask pattern for the lens, and fabricating the photomask based on the mask pattern data. The step of generating the mask pattern data includes acquiring data which represents a transmitted light distribution required for the photomask to fabricate the lens, in which the transmitted light distribution includes a quantity of transmitted light in each of the plurality of grid cells, and determining whether to place a shield on each of the plurality of grid cells by binarizing the quantity of transmitted light in each of the plurality of grid cells in order of increasing or decreasing distance from a center of the mask pattern using an error diffusion method.

摘要翻译： 一种制造用于形成透镜的光掩模的方法。 该方法包括以下步骤：为构成透镜的掩模图案的多个网格单元中的每一个生成掩模图案数据，以及基于掩模图案数据来制造光掩模。 生成掩模图案数据的步骤包括获取表示光掩模所需的透射光分布以制造透镜的数据，其中透射光分布包括多个格栅单元中的每一个中的透射光量，以及确定是否 通过使用误差扩散法从掩模图案的中心的距离的增加或减小的顺序二值化多个网格单元中的每一个网格单元中的透射光的量来将屏蔽放置在多个网格单元中的每一个上。

公开(公告)号：US20080263502A1

公开(公告)日：2008-10-23

申请号：US12048691

申请日：2008-03-14

申请人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

发明人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

IPC分类号： G06F17/50

CPC分类号： G03F1/68 ,  G03F1/50 ,  G03F7/0005 ,  Y10T29/49

摘要： A method for generating mask pattern data of a photomask used to form microlenses divides a pattern formation surface of a mask pattern to be used for the photomask into a plurality of grid cells, acquires data which represents transmitted light distribution of the mask pattern to be used for the photomask, determines whether to place a shield on each of the plurality of grid cells by binarizing the plurality of grid cells in order of increasing or decreasing distance from a center of the pattern formation surface using an error diffusion method to acquire the transmitted light distribution, and generates mask pattern data which represents an arrangement of the shields based on results from the determining step.

摘要翻译： 用于生成用于形成微透镜的光掩模的掩模图案数据的方法将用于光掩模的掩模图案的图案形成表面划分成多个网格单元，获取表示要使用的掩模图案的透射光分布的数据 对于光掩模，通过使用误差扩散方法使用误差扩散方法来依次增加或减小距离图案形成表面的中心的距离来二进制化多个网格单元，来确定是否将多个网格单元中的每一个放置屏蔽，以获取透射光 分配，并且基于来自确定步骤的结果生成表示屏蔽的布置的掩模图案数据。

公开(公告)号：US06407367B1

公开(公告)日：2002-06-18

申请号：US09217136

申请日：1998-12-21

申请人： Masataka Ito ,  Nobuhiko Sato

发明人： Masataka Ito ,  Nobuhiko Sato

IPC分类号： F27B514

CPC分类号： H01L21/67109 ,  C30B31/10 ,  C30B33/005 ,  H01L21/2007 ,  H01L21/76251

摘要： A novel heat treatment apparatus is provided which comprises a first tube, a second tube placed therein, and a heater. A semiconductor article is heat treated in the second tube in an atmospheric gas. At least an internal face of the second tube is constructed from non-silicon oxide, and the first tube is constructed from vitreous silica. In this way, hydrogen gas is fed to a wafer without passing over a face comprised of silicon oxide heated to a high temperature. This apparatus prevents metal contamination of the wafer by fused quartz tube as the contamination source and also prevents etching of silicon by reaction of silicon oxide and silicon.

摘要翻译： 提供了一种新颖的热处理装置，其包括第一管，放置在其中的第二管和加热器。 半导体制品在第二管中以大气气体进行热处理。 至少第二管的内表面由非氧化硅构成，第一管由玻璃状二氧化硅构成。 以这种方式，氢气被供给到晶片，而不会通过加热到高温的氧化硅的表面。 该装置防止熔融石英管作为污染源对晶片的金属污染，并且还防止硅氧化物和硅的反应来蚀刻硅。

公开(公告)号：US08871537B2

公开(公告)日：2014-10-28

申请号：US13613812

申请日：2012-09-13

申请人： Daisuke Yoshitoku ,  Nobuhiko Sato

发明人： Daisuke Yoshitoku ,  Nobuhiko Sato

IPC分类号： H01L21/00 ,  H01L31/036 ,  H01L29/04 ,  H01L27/32 ,  H01L51/00

CPC分类号： H01L27/3211 ,  H01L51/0018

摘要： Provided is a method of manufacturing an organic electroluminescence display device which enables production of a high-resolution organic electroluminescence display device in which display failure is suppressed. The method of manufacturing an organic electroluminescence display device includes multiple organic electroluminescence elements each including an organic compound layer that includes at least an emission layer, the method including: forming the organic compound layer on a substrate; sequentially forming an intermediate layer and a resist layer on the organic compound layer; removing a part of the resist layer by a photolithography method; and selectively removing, by dry etching, the intermediate layer and the organic compound layer in a region in which the part of the resist layer is removed, the light shielding layer having a function of blocking light having a wavelength of 190 nm or more and 360 nm or less.

摘要翻译： 提供一种制造有机电致发光显示装置的方法，其能够制造抑制显示不良的高分辨率有机电致发光显示装置。 制造有机电致发光显示装置的方法包括多个有机电致发光元件，每个有机电致发光元件包括至少包含发射层的有机化合物层，该方法包括：在基板上形成有机化合物层; 在有机化合物层上依次形成中间层和抗蚀剂层; 通过光刻法去除一部分抗蚀剂层; 并且通过干蚀刻在去除抗蚀剂层的一部分的区域中通过干蚀刻选择性地除去具有阻挡波长为190nm以上的光的功能的遮光层和360nm nm以下。

公开(公告)号：US20130323712A1

公开(公告)日：2013-12-05

申请号：US13989523

申请日：2010-11-25

申请人： Nobuhiko Sato ,  Ayako Tsukamoto

发明人： Nobuhiko Sato ,  Ayako Tsukamoto

IPC分类号： C12N5/078

CPC分类号： C12N5/0634 ,  A61K35/14 ,  C12M47/04 ,  C12N1/04

摘要： An object of the present invention is to provide a separation system and a separation material for efficiently separating white blood cells or mononuclear cells from a biological fluid containing blood cell components. White blood cells or mononuclear cells can be efficiently separated by contacting a biological fluid containing blood cell components with a separation material having an average fiber diameter of at least 2.0 μm but not more than 6.0 μm and an air permeability coefficient M of at least 6.2 but not more than 35 to capture white blood cells on the separation material, and recovering the captured white blood cells or mononuclear cells using a detachment solution.

摘要翻译： 本发明的目的是提供一种用于从含有血细胞成分的生物流体中有效分离白细胞或单核细胞的分离系统和分离材料。 通过使含有血液细胞成分的生物液体与平均纤维直径为至少2.0μm，但不超过6.0μm，透气系数M为6.2以上的分离材料接触，能够有效地分离白细胞或单核细胞 不超过35个以捕获分离材料上的白细胞，并使用分离溶液回收捕获的白细胞或单核细胞。

公开(公告)号：US08519383B2

公开(公告)日：2013-08-27

申请号：US12993302

申请日：2009-07-10

申请人： Nobutaka Mizuno ,  Nobuhiko Sato ,  Kohei Nagayama

发明人： Nobutaka Mizuno ,  Nobuhiko Sato ,  Kohei Nagayama

IPC分类号： H01L51/52

CPC分类号： H01L27/3209 ,  H01L27/3206 ,  H01L27/3244 ,  H01L51/5265 ,  H01L2251/5315 ,  H05B33/14 ,  H05B33/22 ,  H05B33/26

摘要： Provided is an organic electroluminescence display apparatus capable of reducing a chromaticity difference caused by light emission from an organic layer including an emission layer having the same color, which is continuously formed over two sub-pixels included in a pixel. The organic electroluminescence display apparatus includes: a substrate; and multiple organic electroluminescence devices which are stacked on the substrate, each of which includes electrodes and an organic layer sandwiched by the electrodes in which first organic layer and a second organic layer are arranged side by side in an emission region corresponding to a pixel formed on the substrate and a third organic layer is stacked over the first organic layer and the second organic layer through an intermediate electrode. The third organic layer has an emission spectrum peak wavelength which is longer than an emission spectrum peak wavelength of at least one of the first organic layer and the second organic layer.

摘要翻译： 提供一种有机电致发光显示装置，其能够降低由包括在像素中的两个子像素上连续形成的具有相同颜色的发射层的有机层的发光引起的色度差。 有机电致发光显示装置包括：基板; 以及堆叠在基板上的多个有机电致发光器件，每个有机电致发光器件包括电极和夹在电极之间的有机层，其中第一有机层和第二有机层在对应于形成在像素上的像素的发射区域中并排布置 基板和第三有机层通过中间电极堆叠在第一有机层和第二有机层上。 第三有机层具有比第一有机层和第二有机层中的至少一个的发光光谱峰值波长长的发光光谱峰值波长。