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公开(公告)号：US5961218A
公开(公告)日：1999-10-05
申请号：US802262
申请日：1997-02-19
CPC分类号： F16C32/0662 , F16C17/03 , F16C17/06 , F16C17/14 , F16C33/043 , Y10S384/912
摘要： A water lubricated bearing or water lubricated seal using water as a lubricant. The bearing or seal has: a rotary member secured directly or indirectly to a rotary side, and a stationary member secured directly or indirectly to a stationary side and facing the rotary member for making sliding contact therewith. A substrate of either one of the rotary member and the stationary member is a metallic material and a thin titanium nitride film is formed on the sliding surface thereof. The other member is made of a non-brittle material or a film of hard material is formed on the sliding surface thereof. Thereby, a coefficient of friction of the bearing or seal is reduced and a wear resistance of the same is improved.
摘要翻译： 水润滑轴承或水润滑密封，使用水作为润滑剂。 所述轴承或密封件具有：直接或间接固定在旋转侧的旋转部件，以及直接或间接固定在固定侧并面向旋转部件以与其滑动接触的固定部件。 旋转构件和固定构件中的任一个的基板是金属材料，并且在其滑动表面上形成薄的氮化钛膜。 另一个构件由非脆性材料制成，或者在其滑动表面上形成硬质材料膜。 因此，减小了轴承或密封件的摩擦系数，并提高了其耐磨性。
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公开(公告)号：US06176619B1
公开(公告)日：2001-01-23
申请号：US09339189
申请日：1999-06-24
IPC分类号： F16C3206
CPC分类号： F16C32/0662 , F16C17/03 , F16C17/06 , F16C17/14 , F16C33/043 , Y10S384/912
摘要： A water lubricated bearing or water lubricated seal using water as a lubricant. The bearing or seal has: a rotary member secured directly or indirectly to a rotary side, and a stationary member secured directly or indirectly to a stationary side and facing the rotary member for making sliding contact therewith. A substrate of either one of the rotary member and the stationary member is a metallic material and a thin titanium nitride film is formed on the sliding surface thereof. The other member is made of a non-brittle material or a film of hard material is formed on the sliding surface thereof. Thereby, a coefficient of friction of the bearing or seal is reduced and a wear resistance of the same is improved.
摘要翻译： 水润滑轴承或水润滑密封，使用水作为润滑剂。 所述轴承或密封件具有：直接或间接固定在旋转侧的旋转部件，以及直接或间接固定在固定侧并面向旋转部件以与其滑动接触的固定部件。 旋转构件和静止构件中的任一个的基板是金属材料，并且在其滑动表面上形成薄的氮化钛膜。 另一个构件由非脆性材料制成，或者在其滑动表面上形成硬质材料膜。 因此，减小了轴承或密封件的摩擦系数，并提高了其耐磨性。
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公开(公告)号：US06558822B2
公开(公告)日：2003-05-06
申请号：US09863869
申请日：2001-05-24
IPC分类号： B32B900
CPC分类号： C23C30/00 , C23C14/0031 , C23C14/0641 , Y10T428/12 , Y10T428/12493
摘要： The invention aims to provide a hard film which is improved in high-temperature corrosion resistance without impairing high sliding characteristics (wear resistance, low frictional coefficient) inherent in a titanium nitride thin film and which is suitable for a slide member such as a bearing or a seal used in rotary machines operated at a high temperature, such as a steam turbine and a gas turbine. For attaining this aim, the invention provides a Cr-containing titanium nitride film which is composed of a nitride containing Ti and Cr as main components, the crystal particles thereof having a face-centered cubic crystal structure, and the crystal thereof being highly oriented toward (200) face.
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4.发明授权Coating, modification and etching of substrate surface with particle beam irradiation of the same 失效用其粒子束照射进行涂层，改性和蚀刻基材表面公开(公告)号：US06921722B2
公开(公告)日：2005-07-26
申请号：US09866843
申请日：2001-05-30
申请人： Naoaki Ogure , Kuniaki Horie , Yuji Araki , Hiroshi Nagasaka , Momoko Kakutani , Tohru Satake
发明人： Naoaki Ogure , Kuniaki Horie , Yuji Araki , Hiroshi Nagasaka , Momoko Kakutani , Tohru Satake
IPC分类号： C23C16/18 , C23C16/452 , C23C16/48 , H01J37/32 , H01L21/285 , H01L21/3213 , H01L21/302
CPC分类号： H01J37/32422 , C23C16/18 , C23C16/452 , C23C16/486 , C23C16/487 , H01J37/3233 , H01L21/28556 , H01L21/32136
摘要： There is provided a method of performing a surface treatment, such as coating, denaturation, modification and etching, on a surface of a substrate. The method comprises the steps of bringing a surface treatment gas into contact with a surface of a substrate, and irradiating the surface of the substrate with a fast particle beam to enhance an activity of the surface and/or the surface treatment gas, thereby facilitating a reaction between the surface and the gas. The fast particle beam may be selected from a group consisting of an electron beam, a charged particle beam, an atomic beam and molecular beam. For example, during a coating operation, chemical deposition of predetermined component elements of the gas onto the surface is effected and a predetermined portion of the surface of the substrate is irradiated with a particle beam to form a coating layer on the predetermined portion.
摘要翻译： 提供了在基板的表面上进行表面处理如涂层，变性，改性和蚀刻的方法。 该方法包括以下步骤：使表面处理气体与基板的表面接触，并用快速粒子束照射基板的表面，以增强表面和/或表面处理气体的活性，由此有助于 表面和气体之间的反应。 快速粒子束可以选自电子束，带电粒子束，原子束和分子束。 例如，在涂布操作期间，将气体的预定组分元素化学沉积到表面上，并且用颗粒束照射基板的表面的预定部分，以在预定部分上形成涂层。
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公开(公告)号：US06767657B1
公开(公告)日：2004-07-27
申请号：US09807436
申请日：2001-06-26
IPC分类号： C23C1406
CPC分类号： C23C14/0036 , C23C14/0641 , C23C14/22 , C23C30/00 , Y10T428/252
摘要： This invention relates to a hard coating developed for applications involving high-temperature corrosion by improving the performance of TiN coatings while retaining the superior wear resistance and low friction coeffident of TiN itself. The nitride-based sliding material has a face-centered cubic crystalline structure with lattice constant of between 0.414 and 0.423 nm, and is made of mostly TiN but contains at least one element selected from the group containing Al, Cr, Zr and Hf; or comprises a nitride-based material containing substantially titanium nitride and at least one element selected from a group consisting of B and Si, and having a face-centered cubic crystalline structure comprising crystallites of an average size of not more than 9 nm.
摘要翻译： 本发明涉及通过改善TiN涂层的性能同时保持TiN本身的优异的耐磨性和低摩擦系数而开发用于涉及高温腐蚀的应用的硬涂层。 氮化物基滑动材料具有晶格常数在0.414和0.423nm之间的面心立方晶体结构，并且主要由TiN制成，但含有选自Al，Cr，Zr和Hf中的至少一种元素; 或包含基本上为氮化钛的氮化物基材料和选自B和Si的至少一种元素，并且具有包含平均尺寸不大于9nm的微晶的面心立方晶体结构。
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6.发明授权公开(公告)号：US06432257B1
公开(公告)日：2002-08-13
申请号：US09018909
申请日：1998-02-05
IPC分类号： B24B500
CPC分类号： B24B53/017 , B24B37/04 , B24B53/12 , B24D18/00
摘要： A improved dresser for dressing a polishing surface, easily be manufactured such that an object to be polished is not scratched when the object is polished. The dresser can dress the polishing surface of a polishing apparatus to effect surface correction and to correct a time-lapse change due to a polishing operation, a number of spired projections are formed on a surface of a metallic substrate and a wear-resistant hard film is formed on at least a portion of the surface of the metallic substrate on which the projections are formed.
摘要翻译： 可以容易地制造用于修整抛光表面的改进的修整器，使得抛光对象在被抛光时不被划伤。 梳妆台可以打磨抛光装置的抛光表面以进行表面校正并且校正由于抛光操作引起的延时变化，在金属基底和耐磨硬膜的表面上形成多个喷射突起 形成在其上形成有突起的金属基板的表面的至少一部分上。
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