摘要:
The present invention provides a defect inspection apparatus comprising an inspection section which inspects a front surface and a rear surface of a sample, a control section which processes image data on the front surface and rear surface of the sample obtained by the inspection section, moving section provided in the inspection section and capable of reciprocating the sample, illumination section which illuminates the front surface and rear surface of the sample moved by the moving section, and image pickup section which picks up images of the front surface and rear surface of the sample illuminated by the illumination section, wherein at least one of an incidence angle of the illumination section on the sample and an image pickup angle of the image pickup section to the sample is changeable.
摘要:
A reverse pattern is formed once by combining a negative exposure mask having a wiring pattern with a positive resist, and then a positive wiring pattern is formed by use of the reverse pattern. That is, a positive resist applied on a semiconductor substrate is exposed by use of the exposure mask having an opening part in a region corresponding to the wiring pattern, and then the exposed part is removed by development to form a resist pattern, thereby forming the wiring pattern in the region corresponding to the opening part of the resist pattern. Consequently, it is hardly affected by flare during EUV exposure, thereby fabricating a fine wiring pattern with higher exposure latitude.
摘要:
When a wastegate valve, which opens and closes an exhaust bypass passage bypassing an exhaust turbine, is open, exhaust gases of respective cylinders bypass the exhaust turbine and pass a sensing point of an air-fuel ratio sensor downstream of the exhaust turbine. Accordingly, the exhaust gases of the respective cylinders can be avoided from being mixed by the exhaust turbine, so an influence of an inter-cylinder variation in an air-fuel ratio due to an inter-cylinder imbalance abnormality becomes apt to appear in an output waveform of the air-fuel ratio sensor. Therefore, existence or nonexistence of the inter-cylinder imbalance abnormality is determined based on the output of the air-fuel ratio sensor when the wastegate valve is open. Eventually, the existence or nonexistence of the inter-cylinder imbalance abnormality can be determined accurately, thereby improving detection accuracy of the inter-cylinder imbalance abnormality.
摘要:
The mask blank inspection apparatus is constituted of a stage for mounting a reflective mask blank thereon, a light source for generating inspection light, a mirror serving as an illuminating optics, an imaging optical system, a beam splitter, two two-dimensional array sensors, signal storage units, an image processing unit, a main control unit for controlling operation of the whole apparatus, the first sensor being located at a position which is displaced by a predetermined distance from the focal plane of a first light beam, the second sensor being located at a position which is displaced by a predetermined distance from the focal plane of a second light beam along a opposite direction, whereby accurately and conveniently inspecting presence/absence and types of defects in reflective mask blank.
摘要:
The present invention provides a polymeric adsorption film comprising a polymer containing two or more charge-transport blocks and a substrate, wherein any of the charge-transport blocks is preferentially adhered to a surface of the substrate; a polymeric adsorption film comprising a polymer containing two or more charge-transport blocks and a substrate, wherein any of the charge-transport blocks different from the charge-transport block preferentially adhered to a surface of the substrate is preferentially exposed; or a polymeric adsorption film comprising a polymer and a substrate, wherein the polymer contains two or more charge-transport blocks and any charge-transport block selected from the charge-transport blocks is adhered to a surface of the substrate more preferentially than the other charge-transport blocks.
摘要:
Provided is a metal phosphate showing high proton conductivity, which is useful for a fuel cell having higher output and produced at lower cost. The proton-conductive metal phosphate is a compound containing M, P and O, wherein M represents at least one selected from the group consisting of group 4A and group 4B elements in the long form of the periodic table, a part of M is substituted with a dopant element J J represents at least one selected from the group consisting of group 3A, group 3B, group 5A and group 5B elements in the long form of the periodic table and at least contains an element selected from B, Al, Ga, Sc, Yb, Y, La, Ce, Sb, Bi, V, Ta and Nb.
摘要:
A control apparatus of an internal combustion engine performs control to warm up a catalyst. More specifically, the control apparatus keeps a wastegate valve open when the temperature of the catalyst is less than a predetermined temperature and closes the wastegate valve when the temperature of the catalyst becomes equal to or greater than the predetermined temperature. The control apparatus executes control to increase and decrease the fuel injection quantity such that the internal combustion engine alternately switches between lean burn and rich burn when the wastegate valve is closed. Accordingly, rich gas and lean gas can be reliably mixed in the catalyst, and CO can be reliably combusted in the catalyst. Therefore, the catalyst can be promptly warmed up while CO, HC, and the like can be appropriately suppressed from flowing through the catalyst.
摘要:
If improper fuel (light oil or kerosene) is mixed into fuel (gasoline) supplied to the engine, a knock limit of an ignition timing is retarded. Based on such a characteristic, every when knocking is detected based on a detection signal from a knock sensor, the ignition timing is stored as the knock occurring ignition timing and the ignition timing is retarded by a predetermined amount. After repeating the above processes, it is determined whether the knock occurring ignition timing is retarded more than a determination value (for example, a retarded limit value of the knock occurring ignition timing in a case that proper gasoline is served). When the knock occurring ignition timing is retarded more than the determination value, it is determined that the improper fuel is mixed in the fuel.
摘要:
Provided are a sintered metal material improved in sliding property and wear resistance with respect to an associated sliding member to be supported, and a sintered oil-impregnated bearing formed of this metal material. A bearing sleeve is formed by compacting a mixed metal powder composed of not less than 5 wt % and not more than 94.3 wt % of Cu powder, not less than 5 wt % and not more than 94.3 wt % of SUS powder, not less than 0.2 wt % and not more than 10 wt % of Sn powder, and not less than 0.5 wt % and not more than wt % of graphite, and then performing sintering on a compact of the mixed metal powder.
摘要:
An HTTP server including a communication section which communicates with a client, and a control section which, as a response to an HTTP request for requesting a report pertaining to a monitoring object received from the client via the communication section, transmits the report via the communication section to the client by making the report with chunked data in chunked transfer coding, upon a change of the monitoring object occurs.