Defect inspection apparatus
    1.
    发明授权
    Defect inspection apparatus 失效
    缺陷检查装置

    公开(公告)号:US06954268B2

    公开(公告)日:2005-10-11

    申请号:US10801402

    申请日:2004-03-15

    IPC分类号: G01N21/88 G01N21/95

    摘要: The present invention provides a defect inspection apparatus comprising an inspection section which inspects a front surface and a rear surface of a sample, a control section which processes image data on the front surface and rear surface of the sample obtained by the inspection section, moving section provided in the inspection section and capable of reciprocating the sample, illumination section which illuminates the front surface and rear surface of the sample moved by the moving section, and image pickup section which picks up images of the front surface and rear surface of the sample illuminated by the illumination section, wherein at least one of an incidence angle of the illumination section on the sample and an image pickup angle of the image pickup section to the sample is changeable.

    摘要翻译: 本发明提供了一种缺陷检查装置,包括检查样品的前表面和后表面的检查部分,处理由检查部分获得的样品的正面和背面的图像数据的控制部分,移动部分 设置在检查部中并且能够使照射由移动部移动的样本的前表面和后表面照明的样品照明部,以及拍摄被照射的样品的正面和背面的图像的图像拾取部 通过所述照明部分,其中所述样品上的照射部分的入射角和所述图像拾取部分对所述样品的图像拾取角度中的至少一个是可变的。

    Method for manufacturing semiconductor device
    2.
    发明授权
    Method for manufacturing semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08673543B2

    公开(公告)日:2014-03-18

    申请号:US12812435

    申请日:2008-12-09

    申请人: Toshihiko Tanaka

    发明人: Toshihiko Tanaka

    IPC分类号: G03F7/20

    摘要: A reverse pattern is formed once by combining a negative exposure mask having a wiring pattern with a positive resist, and then a positive wiring pattern is formed by use of the reverse pattern. That is, a positive resist applied on a semiconductor substrate is exposed by use of the exposure mask having an opening part in a region corresponding to the wiring pattern, and then the exposed part is removed by development to form a resist pattern, thereby forming the wiring pattern in the region corresponding to the opening part of the resist pattern. Consequently, it is hardly affected by flare during EUV exposure, thereby fabricating a fine wiring pattern with higher exposure latitude.

    摘要翻译: 通过将具有布线图案的负曝光掩模与正光刻胶组合一次形成反向图案,然后通过使用反向图案形成正布线图案。 也就是说,通过使用在与布线图案相对应的区域中具有开口部分的曝光掩模来曝光施加在半导体基板上的正光刻胶,然后通过显影除去曝光部分以形成抗蚀剂图案,从而形成 在与抗蚀剂图案的开口部对应的区域中的布线图案。 因此,在EUV曝光期间几乎不受光斑的影响,从而制造出具有较高曝光宽容度的精细布线图案。

    Abnormality diagnostic device of internal combustion engine with turbocharger
    3.
    发明授权
    Abnormality diagnostic device of internal combustion engine with turbocharger 失效
    具有涡轮增压器的内燃机异常诊断装置

    公开(公告)号:US08413497B2

    公开(公告)日:2013-04-09

    申请号:US13044021

    申请日:2011-03-09

    IPC分类号: G01M15/10

    摘要: When a wastegate valve, which opens and closes an exhaust bypass passage bypassing an exhaust turbine, is open, exhaust gases of respective cylinders bypass the exhaust turbine and pass a sensing point of an air-fuel ratio sensor downstream of the exhaust turbine. Accordingly, the exhaust gases of the respective cylinders can be avoided from being mixed by the exhaust turbine, so an influence of an inter-cylinder variation in an air-fuel ratio due to an inter-cylinder imbalance abnormality becomes apt to appear in an output waveform of the air-fuel ratio sensor. Therefore, existence or nonexistence of the inter-cylinder imbalance abnormality is determined based on the output of the air-fuel ratio sensor when the wastegate valve is open. Eventually, the existence or nonexistence of the inter-cylinder imbalance abnormality can be determined accurately, thereby improving detection accuracy of the inter-cylinder imbalance abnormality.

    摘要翻译: 当打开和关闭旁路排气涡轮机的排气旁通通道的废气门打开时,各个气缸的废气旁路排气涡轮并将排气涡轮下游的空燃比传感器的感测点通过。 因此,可以避免各气缸的排气被排气涡轮混合,因此,由于气缸内不平衡异常引起的气缸内的变化对空燃比的影响容易出现在输出 空燃比传感器的波形。 因此,当排气门阀打开时,基于空燃比传感器的输出来确定气缸间不平衡异常的存在或不存在。 最终,可以精确地确定气缸内不平衡异常的存在或不存在,从而提高气缸间不平衡异常的检测精度。

    Apparatus and a method for inspection of a mask blank, a method for manufacturing a reflective exposure mask, a method for reflective exposure, and a method for manufacturing semiconductor integrated circuits
    4.
    发明授权
    Apparatus and a method for inspection of a mask blank, a method for manufacturing a reflective exposure mask, a method for reflective exposure, and a method for manufacturing semiconductor integrated circuits 有权
    用于检查掩模板的装置和方法,反射式曝光掩模的制造方法,反射曝光方法以及半导体集成电路的制造方法

    公开(公告)号:US07911600B2

    公开(公告)日:2011-03-22

    申请号:US12241614

    申请日:2008-09-30

    IPC分类号: G01N21/00

    摘要: The mask blank inspection apparatus is constituted of a stage for mounting a reflective mask blank thereon, a light source for generating inspection light, a mirror serving as an illuminating optics, an imaging optical system, a beam splitter, two two-dimensional array sensors, signal storage units, an image processing unit, a main control unit for controlling operation of the whole apparatus, the first sensor being located at a position which is displaced by a predetermined distance from the focal plane of a first light beam, the second sensor being located at a position which is displaced by a predetermined distance from the focal plane of a second light beam along a opposite direction, whereby accurately and conveniently inspecting presence/absence and types of defects in reflective mask blank.

    摘要翻译: 掩模毛坯检查装置由用于安装反射掩模坯料的台架,用于产生检查灯的光源,用作照明光学器件的镜子,成像光学系统,分束器,两个二维阵列传感器, 信号存储单元,图像处理单元,用于控制整个设备的操作的主控制单元,第一传感器位于从第一光束的焦平面偏移预定距离的位置,第二传感器是 位于沿相反方向从第二光束的焦平面偏移了预定距离的位置,由此准确地和方便地检查反射掩模板中的存在/不存在和类型的缺陷。

    POLYMERIC ADSORPTION FILMS AND PROCESSES FOR PRODUCING THESE
    5.
    发明申请
    POLYMERIC ADSORPTION FILMS AND PROCESSES FOR PRODUCING THESE 审中-公开
    聚合吸附膜及其生产工艺

    公开(公告)号:US20100133476A1

    公开(公告)日:2010-06-03

    申请号:US12411599

    申请日:2009-03-26

    IPC分类号: H01B1/12

    摘要: The present invention provides a polymeric adsorption film comprising a polymer containing two or more charge-transport blocks and a substrate, wherein any of the charge-transport blocks is preferentially adhered to a surface of the substrate; a polymeric adsorption film comprising a polymer containing two or more charge-transport blocks and a substrate, wherein any of the charge-transport blocks different from the charge-transport block preferentially adhered to a surface of the substrate is preferentially exposed; or a polymeric adsorption film comprising a polymer and a substrate, wherein the polymer contains two or more charge-transport blocks and any charge-transport block selected from the charge-transport blocks is adhered to a surface of the substrate more preferentially than the other charge-transport blocks.

    摘要翻译: 本发明提供一种聚合物吸附膜,其包含含有两个或更多个电荷输送嵌段和基材的聚合物,其中任何电荷传输嵌段优先粘附于基材的表面; 包含含有两个或更多个电荷输送嵌段的聚合物和基材的聚合物吸附膜,其中与电荷传输嵌段不同的电荷传输嵌段优先粘附到基材表面的任何电荷传输嵌段优先暴露; 或包含聚合物和基底的聚合物吸附膜,其中所述聚合物含有两个或更多个电荷输送嵌段,并且从所述电荷传输嵌段中选择的任何电荷传输嵌段比其它电荷更优先地粘附到所述衬底的表面 运输块。

    METAL PHOSPHATE
    6.
    发明申请
    METAL PHOSPHATE 审中-公开
    金属磷酸盐

    公开(公告)号:US20090297912A1

    公开(公告)日:2009-12-03

    申请号:US12373376

    申请日:2007-07-26

    IPC分类号: H01M8/10 H01B1/00

    摘要: Provided is a metal phosphate showing high proton conductivity, which is useful for a fuel cell having higher output and produced at lower cost. The proton-conductive metal phosphate is a compound containing M, P and O, wherein M represents at least one selected from the group consisting of group 4A and group 4B elements in the long form of the periodic table, a part of M is substituted with a dopant element J J represents at least one selected from the group consisting of group 3A, group 3B, group 5A and group 5B elements in the long form of the periodic table and at least contains an element selected from B, Al, Ga, Sc, Yb, Y, La, Ce, Sb, Bi, V, Ta and Nb.

    摘要翻译: 提供了高质子传导性的金属磷酸盐,其对于具有较高产量且以较低成本生产的燃料电池是有用的。 质子传导性金属磷酸盐是含有M,P和O的化合物,其中M表示选自长周期表中的4A族和4B族元素中的至少一种,M的一部分被 掺杂剂元素JJ表示选自周期表的长形式的3A族,3B族,5A族和5B族元素中的至少一种,并且至少含有选自B,Al,Ga,Sc, Yb,Y,La,Ce,Sb,Bi,V,Ta和Nb。

    CONTROL APPARATUS AND CONTROL METHOD OF INTERNAL COMBUSTION ENGINE
    7.
    发明申请
    CONTROL APPARATUS AND CONTROL METHOD OF INTERNAL COMBUSTION ENGINE 审中-公开
    内燃机控制装置及控制方法

    公开(公告)号:US20090292446A1

    公开(公告)日:2009-11-26

    申请号:US12302178

    申请日:2007-10-04

    申请人: Toshihiko Tanaka

    发明人: Toshihiko Tanaka

    IPC分类号: F02D43/00 F02D23/00

    摘要: A control apparatus of an internal combustion engine performs control to warm up a catalyst. More specifically, the control apparatus keeps a wastegate valve open when the temperature of the catalyst is less than a predetermined temperature and closes the wastegate valve when the temperature of the catalyst becomes equal to or greater than the predetermined temperature. The control apparatus executes control to increase and decrease the fuel injection quantity such that the internal combustion engine alternately switches between lean burn and rich burn when the wastegate valve is closed. Accordingly, rich gas and lean gas can be reliably mixed in the catalyst, and CO can be reliably combusted in the catalyst. Therefore, the catalyst can be promptly warmed up while CO, HC, and the like can be appropriately suppressed from flowing through the catalyst.

    摘要翻译: 内燃机的控制装置进行控制以预热催化剂。 更具体地,当催化剂的温度小于预定温度时,控制装置保持废气门阀打开,并且当催化剂的温度等于或大于预定温度时,关闭废气门阀。 控制装置执行控制以增加和减少燃料喷射量,使得内燃机在废气门关闭时在稀燃和富燃之间交替切换。 因此,在催化剂中可以可靠地混合富气和贫气,并且可以在催化剂中可靠地燃烧CO。 因此,可以适当地抑制CO,HC等流过催化剂而迅速升温催化剂。

    Improper fuel mixing determining apparatus for internal combustion engine
    8.
    发明授权
    Improper fuel mixing determining apparatus for internal combustion engine 失效
    用于内燃机的不正确的燃料混合确定装置

    公开(公告)号:US07603981B2

    公开(公告)日:2009-10-20

    申请号:US12166843

    申请日:2008-07-02

    申请人: Toshihiko Tanaka

    发明人: Toshihiko Tanaka

    IPC分类号: F02D41/22

    摘要: If improper fuel (light oil or kerosene) is mixed into fuel (gasoline) supplied to the engine, a knock limit of an ignition timing is retarded. Based on such a characteristic, every when knocking is detected based on a detection signal from a knock sensor, the ignition timing is stored as the knock occurring ignition timing and the ignition timing is retarded by a predetermined amount. After repeating the above processes, it is determined whether the knock occurring ignition timing is retarded more than a determination value (for example, a retarded limit value of the knock occurring ignition timing in a case that proper gasoline is served). When the knock occurring ignition timing is retarded more than the determination value, it is determined that the improper fuel is mixed in the fuel.

    摘要翻译: 如果不正确的燃料(轻油或煤油)混入供应给发动机的燃油(汽油)中,则点火正时的爆震极限将被延迟。 基于这样的特征,每当基于来自爆震传感器的检测信号检测到爆震时,点火正时被存储为爆震点火正时,并且点火正时被延迟预定量。 在重复上述过程之后,确定爆震发生的点火正时是否比确定值延迟(例如,在服用适当的汽油的情况下,发生点火正时的延迟极限值)。 当爆震发生的点火正时被延迟超过确定值时,确定不合适的燃料混合在燃料中。

    SINTERED METAL MATERIAL, SINTERED OIL-IMPREGNATED BEARING FORMED OF THE METAL MATERIAL, AND FLUID LUBRICATION BEARING DEVICE
    9.
    发明申请
    SINTERED METAL MATERIAL, SINTERED OIL-IMPREGNATED BEARING FORMED OF THE METAL MATERIAL, AND FLUID LUBRICATION BEARING DEVICE 审中-公开
    烧结金属材料,金属材料形成的烧结油基轴承和流体润滑轴承装置

    公开(公告)号:US20090142010A1

    公开(公告)日:2009-06-04

    申请号:US11719809

    申请日:2005-12-27

    IPC分类号: F16C33/10 C22C9/00

    摘要: Provided are a sintered metal material improved in sliding property and wear resistance with respect to an associated sliding member to be supported, and a sintered oil-impregnated bearing formed of this metal material. A bearing sleeve is formed by compacting a mixed metal powder composed of not less than 5 wt % and not more than 94.3 wt % of Cu powder, not less than 5 wt % and not more than 94.3 wt % of SUS powder, not less than 0.2 wt % and not more than 10 wt % of Sn powder, and not less than 0.5 wt % and not more than wt % of graphite, and then performing sintering on a compact of the mixed metal powder.

    摘要翻译: 提供一种相对于要支撑的相关滑动构件提供的滑动性能和耐磨性改善的烧结金属材料,以及由该金属材料形成的烧结含油轴承。 通过将由不低于5重量%且不大于94.3重量%的Cu粉末组成的混合金属粉末压制成不小于5重量%且不大于94.3重量%的SUS粉末形成轴承套筒,不小于 Sn粉末的0.2重量%以上10重量%以下,石墨不少于0.5重量%以下,然后对该复合金属粉末的成形体进行烧结。

    HTTP server and program
    10.
    发明申请
    HTTP server and program 有权
    HTTP服务器和程序

    公开(公告)号:US20080225329A1

    公开(公告)日:2008-09-18

    申请号:US12009770

    申请日:2008-01-22

    申请人: Toshihiko Tanaka

    发明人: Toshihiko Tanaka

    IPC分类号: G06F3/12 G06F15/00 G06F15/173

    摘要: An HTTP server including a communication section which communicates with a client, and a control section which, as a response to an HTTP request for requesting a report pertaining to a monitoring object received from the client via the communication section, transmits the report via the communication section to the client by making the report with chunked data in chunked transfer coding, upon a change of the monitoring object occurs.

    摘要翻译: 一种HTTP服务器,包括与客户端通信的通信部分,以及控制部分,作为响应于经由通信部分从客户端接收到的关于请求与监视对象有关的报告的HTTP请求,经由通信发送报告 发生监视对象发生变化时,通过使用分块传输编码的分块数据生成报告给客户端。