Method of forming fine pattern
    3.
    发明申请
    Method of forming fine pattern 审中-公开
    形成精细图案的方法

    公开(公告)号:US20120067843A1

    公开(公告)日:2012-03-22

    申请号:US13064301

    申请日:2011-03-16

    IPC分类号: C23F1/02

    摘要: A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.

    摘要翻译: 根据实施例的形成精细图案的方法包括:在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层,二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案,所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上,其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成,并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。

    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus
    4.
    发明授权
    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus 有权
    用于磁记录介质的基板,磁记录介质和磁记录装置

    公开(公告)号:US08059368B2

    公开(公告)日:2011-11-15

    申请号:US12801299

    申请日:2010-06-02

    IPC分类号: G11B5/82

    摘要: It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.

    摘要翻译: 可以改善记录和再现S / N比,再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道,每个记录磁道由磁性材料形成,而非记录部分形成在基板上,每个非记录部分分隔相邻的记录磁道,每个记录磁道包括多个 记录部分和连接部分,用于在轨道纵向方向上连接与其相邻的记录部分,并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。

    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus
    5.
    发明授权
    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus 有权
    用于磁记录介质的基板,磁记录介质和磁记录装置

    公开(公告)号:US07760467B2

    公开(公告)日:2010-07-20

    申请号:US11397892

    申请日:2006-04-05

    IPC分类号: G11B5/82

    摘要: It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.

    摘要翻译: 可以改善记录和再现S / N比,再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道,每个记录磁道由磁性材料形成,而非记录部分形成在基板上,每个非记录部分分隔相邻的记录磁道,每个记录磁道包括多个 记录部分和连接部分,用于在轨道纵向方向上连接与其相邻的记录部分,并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。

    SUBSTRATE FOR MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS
    6.
    发明申请
    SUBSTRATE FOR MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS 有权
    用于磁记录介质,磁记录介质和磁记录和再现装置的基板

    公开(公告)号:US20090273858A1

    公开(公告)日:2009-11-05

    申请号:US12503458

    申请日:2009-07-15

    IPC分类号: G11B5/187

    摘要: It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.

    摘要翻译: 可以改善记录和再现S / N比,再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道,每个记录磁道由磁性材料形成,而非记录部分形成在基板上,每个非记录部分分隔相邻的记录磁道,每个记录磁道包括多个 记录部分和连接部分,用于在轨道纵向方向上连接与其相邻的记录部分,并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。

    Magnetic recording medium and method for manufacturing the same
    7.
    发明授权
    Magnetic recording medium and method for manufacturing the same 有权
    磁记录介质及其制造方法

    公开(公告)号:US07323258B2

    公开(公告)日:2008-01-29

    申请号:US10947132

    申请日:2004-09-23

    IPC分类号: G11B5/64 G11B5/39 B32B15/04

    摘要: A magnetic recording medium which allows high density recording and has excellent durability can be obtained. A magnetic recording medium includes: a plurality of ferromagnetic material dots arranged on a soft magnetic layer formed on a non-magnetic substrate so as to be separated from one another; and carbon films which are formed on the respective ferromagnetic material dots, each carbon film having a smooth film face shape in a section passing through the center of each ferromagnetic material dot and a film thickness gradually decreasing from the center of the ferromagnetic material dot toward an outer edge thereof.

    摘要翻译: 可以获得允许高密度记录并具有优异的耐久性的磁记录介质。 磁记录介质包括:多个铁磁材料点,其布置在形成在非磁性基板上以便彼此分离的软磁层上; 和形成在各个铁磁材料点上的碳膜,每个碳膜在穿过每个铁磁材料点的中心的部分中具有平滑的薄膜表面形状,并且薄膜厚度从铁磁材料点的中心逐渐减小到 的外边缘。

    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus
    8.
    发明申请
    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus 有权
    用于磁记录介质的基板,磁记录介质和磁记录装置

    公开(公告)号:US20070053107A1

    公开(公告)日:2007-03-08

    申请号:US11397892

    申请日:2006-04-05

    IPC分类号: G11B5/82

    摘要: It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.

    摘要翻译: 可以改善记录和再现S / N比,再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道,每个记录磁道由磁性材料形成,而非记录部分形成在基板上,每个非记录部分分隔相邻的记录磁道,每个记录磁道包括多个 记录部分和连接部分,用于在轨道纵向方向上连接与其相邻的记录部分,并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。

    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus
    10.
    发明授权
    Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus 有权
    用于磁记录介质的基板,磁记录介质和磁记录和重放装置

    公开(公告)号:US07936537B2

    公开(公告)日:2011-05-03

    申请号:US12503458

    申请日:2009-07-15

    IPC分类号: G11B5/82

    摘要: It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.

    摘要翻译: 可以改善记录和再现S / N比,再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道,每个记录磁道由磁性材料形成,而非记录部分形成在基板上,每个非记录部分分隔相邻的记录磁道,每个记录磁道包括多个 记录部分和连接部分,用于在轨道纵向方向上连接与其相邻的记录部分,并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。