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    Piezoelectric film device, and driving method of the same
    9.
    发明申请
    Piezoelectric film device, and driving method of the same 有权
    压电薄膜器件及其驱动方法

    公开(公告)号：US20050140249A1

    公开(公告)日：2005-06-30

    申请号：US11013994

    申请日：2004-12-16

    申请人： Hiroyuki Kita ,  Hirokazu Uchiyama ,  Toshiyuki Matsunaga ,  Fumiyo Tojo

    发明人： Hiroyuki Kita ,  Hirokazu Uchiyama ,  Toshiyuki Matsunaga ,  Fumiyo Tojo

    IPC分类号： B25J7/00 ,  B25J15/12 ,  G02B6/35 ,  G02B26/08 ,  H01L41/08 ,  H01L41/09

    CPC分类号： H01L41/0933 ,  B25J7/00 ,  B25J15/12 ,  G02B6/3512 ,  G02B6/352 ,  G02B6/3578 ,  G02B6/359 ,  G02B26/0825 ,  G02B26/0858 ,  H01L41/094 ,  H01L41/0986

    摘要： A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.

    摘要翻译： 压电薄膜器件具有压电薄膜元件和电源电路。 压电膜元件由夹在第一电极和第二电极之间并具有膜厚度方向的偏振矢量的第一电极，第二电极和压电膜形成。 通过施加通过第一电极和第二电极的预定电压而使极化矢量反转。 电源电路提供用于反转偏振矢量的电压。 压电膜根据极化矢量的方向具有不同的晶格常数。 即使在施加电压停止时，压电膜装置保持与极化矢量的方向对应的不同位移位置。

    Piezoelectric thin-film element and a manufacturing method thereof
    10.
    发明申请
    Piezoelectric thin-film element and a manufacturing method thereof 失效
    压电薄膜元件及其制造方法

    公开(公告)号：US20050099100A1

    公开(公告)日：2005-05-12

    申请号：US11014988

    申请日：2004-12-20

    申请人： Hiroyuki Kita ,  Hirokazu Uchiyama

    发明人： Hiroyuki Kita ,  Hirokazu Uchiyama

    IPC分类号： H01L41/047 ,  H01L41/09 ,  H01L41/332 ,  H01L41/08

    CPC分类号： H01L41/332 ,  G11B5/4873 ,  G11B5/5552 ,  H01L41/0805 ,  H01L41/0986

    摘要： To provide a piezoelectric thin-film element small in leak current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element includes at least one unit laminated body composed of a piezoelectric thin-film having a mutually facing first surface and second surface, a first electrode metal film on the first surface, and a second electrode metal film on the second surface, in which an electrode separation surface composed of a piezoelectric thin-film surface parallel to the first surface is provided between the first electrode metal film and second electrode metal film.

    摘要翻译： 为了提供电极金属膜之间漏电流小的压电薄膜元件及其制造方法，压电薄膜元件包括至少一个由具有相互面对的第一表面的压电薄膜和 第二表面，第一表面上的第一电极金属膜和第二表面上的第二电极金属膜，其中由平行于第一表面的压电薄膜表面组成的电极分离表面设置在第一电极金属 薄膜和第二电极金属薄膜。