公开(公告)号：US06810687B2

公开(公告)日：2004-11-02

申请号：US10076034

申请日：2002-02-13

申请人： Hiroyuki Nishimura ,  Toru Yokota ,  Akira Fujinoki

发明人： Hiroyuki Nishimura ,  Toru Yokota ,  Akira Fujinoki

IPC分类号： C03C2100

CPC分类号： G03F7/70958 ,  C03B19/1453 ,  C03B2201/21 ,  C03C3/06 ,  C03C2201/21 ,  C03C2203/54 ,  Y02P40/57

摘要： In the light of the disadvantages of the prior art technology, an object of the present invention is to provide a method for producing a synthetic quartz glass member for excimer lasers, which comprises, while suppressing the generation of reductive defects which impairs the resistance against laser radiations, incorporating a sufficient amount of hydrogen molecules capable of achieving a high resistance against laser radiation into the quartz glass, yet uniformly incorporating the hydrogen molecules to realize a flat distribution in refractive indices attributed to the distribution in the density of hydrogen molecules. It is also an object of the present invention to provide a synthetic quartz glass member for excimer lasers obtained by the production method above, which yields high resistance against laser radiations and homogeneity. The above problems have been overcome by a method for producing a synthetic quartz glass member for excimer lasers, which, in a method for producing a synthetic quartz glass member for excimer laser optics comprising a step of incorporating hydrogen molecules into a synthetic quartz glass body by heat treating the synthetic quartz glass body at a temperature of 600° C. or lower under an atmosphere in a pressure range of 1 atm or higher but lower than 150 atm and containing hydrogen, said method comprises varying the pressure of the gas containing hydrogen either continuously or stepwise in at least a part of the heat treatment.

摘要翻译： 鉴于现有技术的缺点，本发明的一个目的是提供一种制造用于准分子激光器的合成石英玻璃构件的方法，该方法包括在抑制减少激光器抗性的还原性缺陷的产生的同时， 将足够量的能够实现激光辐射的高分子氢分子掺入到石英玻璃中，同时均匀地掺入氢分子以实现归因于氢分子密度分布的折射率的平坦分布。 本发明的另一个目的是提供一种通过上述制造方法获得的用于准分子激光器的合成石英玻璃构件，其产生高的抗激光辐射和均匀性。 上述问题已经通过用于制造用于准分子激光器的合成石英玻璃构件的方法得到克服，该方法在用于准分子激光光学器件的合成石英玻璃构件的制造方法中包括通过以下步骤将氢分子掺入合成石英玻璃体中： 在1atm以上但低于150atm的压力范围的气氛中在600℃以下的温度下对合成石英玻璃体进行热处理，并含有氢，所述方法包括改变含氢气体的压力 在热处理的至少一部分中连续地或逐步地。

公开(公告)号：US06689705B2

公开(公告)日：2004-02-10

申请号：US10048309

申请日：2002-01-29

申请人： Akira Fujinoki ,  Hiroyuki Nishimura ,  Toru Yokota ,  Yasuyuki Yaginuma ,  Akira Sato ,  Tetsuji Ueda

发明人： Akira Fujinoki ,  Hiroyuki Nishimura ,  Toru Yokota ,  Yasuyuki Yaginuma ,  Akira Sato ,  Tetsuji Ueda

IPC分类号： C03C306

CPC分类号： C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/32 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2203/54 ,  Y02P40/57

摘要： An object of the present invention is to provide a synthetic quartz glass optical material having a high optical transmittance for a radiation 157 nm in wavelength emitted from F2 excimer laser and a high resistance against irradiation of a F2 excimer laser radiation, yet having a uniformity suitable for such a fine patterning using a F2 excimer laser, and to provide an optical member using the same. The problems above are solved by a synthetic quartz glass optical material for F2 excimer lasers having an OH group concentration of 0.5 ppm or lower, a fluorine concentration of 0.1 to 2 mol %, a hydrogen molecule concentration of 5×1016 molecules/cm3 or lower, a difference between the maximum and minimum fluorine concentrations within 20 mol ppm, and a difference between the maximum and minimum refraction indices of 2×10−5 or lower.

摘要翻译： 本发明的目的是提供一种合成石英玻璃光学材料，其对于从F2准分子激光器发射的波长为157nm的辐射具有高的透光率，并且具有高的对F2准分子激光辐射照射的抗性，但具有适合的均匀性 对于使用F2准分子激光器的精细图案化，并提供使用其的光学部件。 上述问题由OH基浓度为0.5ppm以下，氟浓度为0.1〜2mol％，氢分子浓度为5×10 16分子/ cm 2的F2准分子激光的合成石英玻璃光学材料解决， 3>以下，最大和最小氟浓度在20mol ppm内的差异，以及最大和最小折射率之间的差异为2×10 -5或更低。

公开(公告)号：US06508084B1

公开(公告)日：2003-01-21

申请号：US09527655

申请日：2000-03-17

申请人： Toru Yokota ,  Hiroyuki Nishimura ,  Akira Fujinoki

发明人： Toru Yokota ,  Hiroyuki Nishimura ,  Akira Fujinoki

IPC分类号： C03B37018

CPC分类号： C03B19/1453 ,  C03B2201/21 ,  C03B2201/23 ,  Y02P40/57 ,  Y10S65/08 ,  Y10S65/90

摘要： A method for producing an optical quartz glass for use in excimer lasers, comprising a step of forming a porous silica preform by depositing silica in a soot-like form formed by flame hydrolysis of a high-purity volatile silicon compound, followed by a step of vitrifying said porous silica preform into transparent glass in an atmosphere containing water vapor and hydrogen, and a vertical type heating furnace for carrying out the production method therein.

摘要翻译： 一种用于准分子激光器的光学石英玻璃的制造方法，其特征在于，包括以高纯度挥发性硅化合物的火焰水解形成的烟灰状沉积二氧化硅，形成多孔二氧化硅预成型体的工序， 在含有水蒸气和氢气的气氛中将所述多孔二氧化硅预制件玻璃化成透明玻璃，以及在其中进行制造方法的立式加热炉。

公开(公告)号：US5080564A

公开(公告)日：1992-01-14

申请号：US469921

申请日：1990-01-24

申请人： Toshiaki Kasahara ,  Kenichi Kubo ,  Hiroshi Ishiwata ,  Toru Yokota ,  Susumu Yamaguchi

发明人： Toshiaki Kasahara ,  Kenichi Kubo ,  Hiroshi Ishiwata ,  Toru Yokota ,  Susumu Yamaguchi

IPC分类号： F02D1/08 ,  F02M59/24

CPC分类号： F02M59/246 ,  F02D1/08 ,  F02M2200/24

摘要： A prestroke control device for a fuel injection pump includes at least one control sleeve slidably fitted on at least one plunger, a control rod engaging the control sleeve, the control rod extending perpendicularly to the plunger and rotatable about an axis thereof for varying an axial position of the control sleeve relative to the plunger to thereby control the prestroke of the plunger, and an actuator for rotatively driving the control rod about its own axis. A counterweight is movable in unison with rotation of the control rod for cancelling a rotating force generated by axial movement of the control sleeve and acting upon the control rod.

公开(公告)号：US5502123A

公开(公告)日：1996-03-26

申请号：US288590

申请日：1994-08-10

申请人： Tadayoshi Hiyama ,  Toru Yokota ,  Tadashi Amano

发明人： Tadayoshi Hiyama ,  Toru Yokota ,  Tadashi Amano

IPC分类号： C08F2/18 ,  C08F2/20 ,  C08F14/02 ,  C08F14/06

CPC分类号： C08F14/06

摘要： Polyvinyl chloride is prepared by suspension polymerization of a monomeric charge of vinyl chloride dispersed and suspended in an aqueous medium while agitating the suspension. An oil-soluble partially saponified polyvinyl alcohol is added to the monomeric charge as a dispersant at the start of polymerization. A water-soluble partially saponified polyvinyl alcohol and/or a hydroxypropylmethyl cellulose is continuously added as a suspending agent from the start of polymerization. The suspending agent is entirely added while the polymerization rate is in the range of 5-50%. The agitating power applied to the aqueous suspension is 50-110 kg.multidot.m/s.multidot.ton while the suspending agent is being added, and increased above 110 kg.multidot.m/s.multidot.ton after the completion of addition. The resulting polymer has a high bulk density and a sharp particle size distribution and is susceptible to extrusion.

摘要翻译： 通过在搅拌悬浮液的同时将分散并悬浮在水性介质中的单体氯乙烯的电荷悬浮聚合制备聚氯乙烯。 在聚合开始时，将油溶性部分皂化的聚乙烯醇作为分散剂加入到单体电荷中。 从聚合开始起，作为悬浮剂，连续添加水溶性部分皂化聚乙烯醇和/或羟丙基甲基纤维素。 当聚合速率在5-50％的范围内时，全部添加悬浮剂。 施加到水悬浮液的搅拌功率为50-110kgxm / sxton，同时加入悬浮剂，并且在添加完成后增加到110kgxm / sxton以上。 所得聚合物具有高堆积密度和尖锐的粒度分布，并且易于挤出。

公开(公告)号：US5806493A

公开(公告)日：1998-09-15

申请号：US977239

申请日：1997-11-24

申请人： Kenichi Kubo ,  Mitsunori Urano ,  Toru Yokota ,  Jun Matsubara

发明人： Kenichi Kubo ,  Mitsunori Urano ,  Toru Yokota ,  Jun Matsubara

IPC分类号： F02D1/04 ,  F02M41/14 ,  F02M37/04

CPC分类号： F02M41/1405

摘要： In an inner-cam system fuel injection pump, two balance ports that are offset symmetrically relative to a distribution port in a circumferential direction to form a Y-shape are formed at a rotor. The opening ends of the balance ports and the opening end of the distribution port are positioned on the same plane that is perpendicular to the axis of the rotor. The offset angle .theta. by which the balance ports are offset in the circumferential direction relative to the axis of the distribution port, the opening area S.sub.1 of the distribution port and the opening area S.sub.2 of each of the balance ports are set to satisfy a relationship expressed as S.sub.1 =.vertline.2.multidot.S.sub.2 .multidot.cos .theta..vertline.. The phase intervals of the fuel delivery passages and the phase interval of the two balance ports are set equal to each other. Seizure at the area where the rotor slides in contact with its supporting member is prevented effectively and stable injection characteristics are achieved by equalizing the residual pressures in the individual fuel delivery passages.

摘要翻译： 在内凸轮系的燃料喷射泵中，在转子上形成有两个平衡端口，其相对于分配口在圆周方向上对称地偏移以形成Y形。 平衡口的开口端和分配口的开口端位于垂直于转子轴线的同一平面上。 平衡端口相对于分配口的轴线在圆周方向上偏移的偏移角度θ，分配口的开口面积S1和每个平衡端口的开口面积S2被设定为满足表达的关系 如S1 = | 2xS2xcos theta |。 燃料输送通道的相位间隔和两个平衡端口的相位间隔彼此相等。 有效地防止了转子滑动与其支撑构件接触的区域的缉获，并且通过均衡各个燃料输送通道中的残余压力来实现稳定的喷射特性。

公开(公告)号：US5566921A

公开(公告)日：1996-10-22

申请号：US286974

申请日：1994-08-08

申请人： Toru Yokota ,  Hiroshi Ishiwata

发明人： Toru Yokota ,  Hiroshi Ishiwata

IPC分类号： F02M59/46 ,  H01F7/16 ,  F16K31/02

CPC分类号： F02M59/466 ,  H01F7/1638 ,  H01F2007/1692

摘要： In a solenoid valve, a gap is formed between a solenoid, which includes a stator housed within a resin mold, and a retainer that secures the solenoid on a housing. The gap communicates with a armature chamber that houses the armature mounted on a front end of a plug valve. High-pressure fuel is charged from the fluid passage into the armature chamber and flows into the gap around the solenoid to apply even pressure to the periphery of the resin mold as well as to the intake end surface of the solenoid. This prevents deformation of the resin mold and, consequently, distortion of the intake end surface. Such distortion can also be prevented by internally fitting a protective plate made of a non magnetic body in the opening ends of the coil grooves formed in the intake end surface of the stator.

摘要翻译： 在电磁阀中，在包括固定在树脂模具内的定子的螺线管和将螺线管固定在壳体上的保持架之间形成间隙。 间隙与衔铁室连通，电枢室容纳安装在旋塞阀前端的电枢。 高压燃料从流体通道进入电枢室，并流入螺线管周围的间隙，以将均匀的压力施加到树脂模具的周边以及螺线管的进气端面。 这防止了树脂模具的变形，并因此防止了进气端面的变形。 也可以通过在形成在定子的进气端面中的线圈槽的开口端内部安装由非磁性体制成的保护板来防止这种变形。