摘要:
An operation part in a pattern inspection apparatus includes a defect candidate image generator for generating a binary defect candidate image representing a defect candidate area in an inspection image by comparing the inspection image with a reference image, in an inspection image masking part the inspection image is masked with the defect candidate image to obtain a masked inspection image. In a feature value calculation part, an autocorrelation feature value is obtained from the masked inspection image, and outputted to a classifying part. The classifying part comprises a classifier outputting a classification result on the basis of the autocorrelation feature value and a classifier construction part for constructing the classifier by learning. It is thereby possible to easily perform the high accurate classification of defect candidate using the autocorrelation feature value which is hard to characterize as compared with geometric feature value or feature value representing density.
摘要:
An operation part (50) in a pattern inspection apparatus (1) comprises a defect candidate image generator (511) for generating a binary defect candidate image representing a defect candidate area in an inspection image by comparing the inspection image with a reference image, in an inspection image masking part (521) the inspection image is masked with the defect candidate image to obtain a masked inspection image. In a feature value calculation part (531), an autocorrelation feature value is obtained from the masked inspection image, and outputted to a classifying part (54). The classifying part (54) comprises a classifier (541) outputting a classification result on the basis of the autocorrelation feature value and a classifier construction part (542) for constructing the classifier (541) by learning. It is thereby possible to easily perform the high accurate classification of defect candidate using the autocorrelation feature value which is hard to characterize as compared with geometric feature value or feature value representing density.
摘要:
In a defect detection apparatus 1, in a reference image inspection circuit 42 compared are a reference image representing a pattern in a die which is determined as a reference on a substrate 9 and a plurality of supervisory images which represent patterns in selected block areas, respectively, to detect defects included in the reference image. Subsequently, in the target image inspection circuit 44, a target image representing a pattern in another die and the reference image are compared to detect a plurality of defect candidates included in the target image. Then, a defect detector 45 excludes defect candidates overlapping with the defects included in the reference image from the plurality of defect candidates on the basis of at least positional information of the defects included in the reference image. This makes it possible to detect defects existing in the pattern in another die accurately while eliminating effects of the defects existing in the pattern in the die which is determined as the reference.
摘要:
An inspection apparatus (1) has an image pickup part (2) for performing an image pickup of a substrate (9), an operation part (4) to which an image signal is inputted from said image pickup part (2) and a computer (5), and the operation part (4) specifies an inspection image and a reference image from an object image acquired by the image pickup part (2). In the operation part (4), a region class to which each pixel of the specified inspection image belongs is specified on the basis of a corresponding pixel value of the reference image. In a comparator circuit of the operation part (4), a differential absolute value between each pixel of the inspection image and a corresponding pixel of the reference image is calculated and the differential absolute value is compared with a defect check threshold value in accordance with the specified region class, to perform defect check. The inspection apparatus (1) can thereby appropriately detect a defect in accordance with the region class to which each pixel belongs.
摘要:
A liquid ejecting apparatus includes the following elements. A carriage allows a head ejecting liquid which is curable by light irradiation to move in the moving direction intersecting the transporting direction in which a medium is transported. A precuring light source, provided for the carriage, radiates light for precuring to dots formed by applying the liquid ejected from the moving head onto the medium. A full curing light source is provided for the carriage so as to be located downstream of the precuring light source in the transporting direction. The full curing light source radiates light for full curing to the dots which have been irradiated with light for precuring.
摘要:
A printing device includes a plurality of heads ejecting ink cured by irradiation of light and arranged in a transport direction of a medium, a plurality of temporary curing light sources provided respectively corresponding to the plurality of heads and respectively irradiating light for temporary curing to dots formed on the medium by the respective heads, and a main curing light source irradiating light for main curing to the dots to which the plurality of temporary curing light sources have irradiated the light, wherein the printing device has a first printing mode where a clear ink is ejected from a head placed at the upper stream in the transport direction when seen from heads ejecting color inks, and a second printing mode where the clear ink is ejected from a head placed at the lower stream in the transport direction when seen from the heads ejecting the color inks.
摘要:
An objective of the present invention is to provide a three-dimensional position/attitude recognition apparatus, a three-dimensional position/attitude recognition method, and a three-dimensional position/attitude recognition program, that can perform three-dimensional position/attitude recognition on an object by analyzing an image of an edge portion with a simple configuration. A three-dimensional position/attitude recognition apparatus according to the present invention includes: a detection part for detecting an edge direction of an object by analyzing an image element of an object in at least one of first and second images that have been captured; a determination part for determining whether or not to change relative positions of the object and at least one of first and second image capturing parts based on a result of the detection; and a movement part for moving at least one of the first and second image capturing parts relative to the object.
摘要:
An electronic unit includes a first circuit board having a power semiconductor device and an electrolytic capacitor and a second circuit board having an electronic component to control the power semiconductor device. The second circuit board is arranged perpendicular to the first circuit board and along the surface of the electrolytic capacitor. The electronic unit further includes a connecting member being jointed at one end thereof to the first circuit board and jointed at the other end thereof to the second circuit board for electrical connection between the first and second circuit boards.
摘要:
A power converter apparatus that includes a substrate, plate-like positive and negative interconnection members, capacitors, and a cover is disclosed. Pairs of groups of switching elements are mounted on the substrate. The cover is arranged over the substrate to encompass the switching elements, the positive interconnection member, the negative interconnection member, and the capacitor. The positive interconnection member and the negative interconnection member each have a terminal portion that is joined to a circuit pattern on the substrate by ultrasonic bonding.
摘要:
A printing apparatus includes a head which discharges coating ink which coats a medium and electromagnetic radiation-curable ink for image formation having a surface tension lower than the surface tension of the coating ink, a curing unit which irradiates the electromagnetic radiation-curable ink for image formation with electromagnetic waves to cure the electromagnetic radiation-curable ink for image formation, and a controller which makes the head execute a first discharge processing of discharging the coating ink to coat the medium and makes the head execute a second discharge processing of discharging the electromagnetic radiation-curable ink for image formation onto the medium coated by the coating ink to form an image in this order, and then, makes the curing unit execute a curing processing of irradiating the electromagnetic radiation-curable ink for image formation discharged onto the medium with the electromagnetic waves to cure the electromagnetic radiation-curable ink for image formation.