X-ray fluorescence analyzer and method of displaying sample thereof

    公开(公告)号:US09829447B2

    公开(公告)日:2017-11-28

    申请号:US14833665

    申请日:2015-08-24

    Inventor: Isao Yagi

    CPC classification number: G01N23/223 G01N2223/61 G01N2223/633

    Abstract: An X-ray fluorescence analyzer includes a sample stage, a sample moving mechanism, an X-ray source, a detector detecting a fluorescent X-ray generated from the sample irradiated with a primary X-ray, an imaging device imaging the sample, a display device displaying the image on a screen, a pointing device designating a specific position on the screen for allowing an input at the specific position, an image processing device displaying a mark at the input position on the screen by the pointing device and a control device controlling the sample moving mechanism and the image processing device and, when the sample stage is moved, controlling the image processing device to display the mark on the screen with moving the mark in the same moving direction as that of the sample stage by the same moving distance.

    X-RAY INSPECTION APPARATUS AND X-RAY INSPECTION METHOD

    公开(公告)号:US20200284738A1

    公开(公告)日:2020-09-10

    申请号:US16730901

    申请日:2019-12-30

    Abstract: Provided are an X-ray inspection apparatus and an X-ray inspection method. The X-ray inspection apparatus includes: an X-ray source; a sample moving mechanism; the TDI sensor; and a TDI computing unit. The TDI computing unit includes a data transfer unit configured to transfer, to an outside, data of accumulated charges obtained by accumulating and transferring the charges, and has a function of setting in advance, as a determination region, a plurality of columns of line sensors with which the sample is detectable, and of detecting the sample in the determination region. The data transfer unit is configured to set, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transfer, to the outside, the data of accumulated charges only for pixels in the detecting rows.

    X-ray inspection apparatus and x-ray inspection method

    公开(公告)号:US10989674B2

    公开(公告)日:2021-04-27

    申请号:US16730901

    申请日:2019-12-30

    Abstract: Provided are an X-ray inspection apparatus and an X-ray inspection method. The X-ray inspection apparatus includes: an X-ray source; a sample moving mechanism; the TDI sensor; and a TDI computing unit. The TDI computing unit includes a data transfer unit configured to transfer, to an outside, data of accumulated charges obtained by accumulating and transferring the charges, and has a function of setting in advance, as a determination region, a plurality of columns of line sensors with which the sample is detectable, and of detecting the sample in the determination region. The data transfer unit is configured to set, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transfer, to the outside, the data of accumulated charges only for pixels in the detecting rows.

    X-ray fluorescence analyzer and measurement position adjusting method therefore

    公开(公告)号:US09791392B2

    公开(公告)日:2017-10-17

    申请号:US14805314

    申请日:2015-07-21

    Inventor: Isao Yagi

    CPC classification number: G01N23/223 G01N23/22 G01N2223/323

    Abstract: An X-ray fluorescence analyzer is provided with: a sample stage on which a sample subjected to an analysis is mounted; an X-ray source configured to irradiate the sample with primary X-rays; a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays; an imaging unit configured to capture an image of a predetermined field-of-view area on the sample stage; a display unit configured to display the field-of-view area of the image captured by the imaging unit; and a pointer irradiation unit configured to irradiate the sample stage with a visible light at an irradiation position within an area that is outside the field-of-view area and near the field-of-view area.

    X-ray fluorescence analyzer
    7.
    发明授权

    公开(公告)号:US09612214B2

    公开(公告)日:2017-04-04

    申请号:US14735393

    申请日:2015-06-10

    CPC classification number: G01N23/223 G01N35/00693 G21K1/067

    Abstract: An X-ray fluorescence analyzer includes: a measurement device having: an X-ray source that emits an X-ray; an irradiation area restricting member that restricts an area of a measurement sample to be irradiated with the X-ray as a primary X-ray; and a detector that detects a secondary X-ray generated from the measurement sample. The analyzer further includes: a sample stage that holds and moves the measurement sample between a measurement position at which the measurement sample is irradiated with the primary X-ray to detect the secondary X-ray by the detector and a first retracted position at which the measurement sample is retracted from the measurement position; and a calibration sample moving mechanism that holds a calibration sample for calibrating the measurement device and moves the calibration sample between the measurement position and a second retracted position at which the calibration sample is retracted from the measurement position.

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