-
公开(公告)号：US20200251304A1
公开(公告)日：2020-08-06
申请号：US16641870
申请日：2017-09-04
IPC分类号： H01J37/28 , H01J37/20 , H01J37/141 , H01J37/244
摘要： The present invention provides a charged particle beam apparatus capable of efficiently reducing the effect of a residual magnetic field when SEM observation is performed. The charged particle beam apparatus according to the present invention includes a first mode for passing a direct current to a second coil after turning off a first coil, and a second mode for passing an alternating current to the second coil after turning off the first coil.
-
公开(公告)号：US20200090903A1
公开(公告)日：2020-03-19
申请号：US16494595
申请日：2017-03-29
IPC分类号： H01J37/28 , H01J37/12 , H01J37/145 , H01J37/153
摘要： A charged particle beam device includes: a charged particle source that emits a charged particle beam; a boosting electrode disposed between the charged particle source and a sample to form a path of the charged particle beam and to accelerate and decelerate the charged particle beam; a first pole piece that covers the boosting electrode; a second pole piece that covers the first pole piece; a first lens coil disposed outside the first pole piece and inside the second pole piece to form a first lens; a second lens coil disposed outside the second pole piece to form a second lens; and a control electrode formed between a distal end portion of the first pole piece and a distal end portion of the second pole piece to control an electric field formed between the sample and the distal end portion of the second pole piece.
-
公开(公告)号：US20200219697A1
公开(公告)日：2020-07-09
申请号：US16641035
申请日：2017-09-04
IPC分类号： H01J37/28 , H01J37/30 , H01J37/141 , H01J37/20
摘要： The present invention realizes a composite charged particle beam apparatus capable of suppressing a leakage magnetic field from a pole piece forming an objective lens of an SEM with a simple structure. The charged particle beam apparatus according to the present invention obtains an ion beam observation image while passing a current to a first coil constituting the objective lens, and performs an operation of reducing the image shift by passing a current to a second coil with a plurality of current values, and determines a current to be passed to the second coil based on a difference between the operations.
-
4.发明申请公开(公告)号：US20160329188A1
公开(公告)日：2016-11-10
申请号：US15109481
申请日：2014-12-24
IPC分类号： H01J37/28 , H01J37/22 , H01J37/244
CPC分类号： H01J37/28 , H01J37/18 , H01J37/226 , H01J37/244 , H01J2237/24455 , H01J2237/2448 , H01J2237/2608
摘要： Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).
摘要翻译： 提供了能够以简单的方式观察样品的内部和表面的带电粒子束装置。 该带电粒子束装置以透射带电粒子图像模式和二次带电粒子图像模式工作。 在透射带电粒子图像模式中，透射带电粒子图像是根据与从发射元件（500）发射的光相关联的检测信号（512）产生的，该发光元件（500）在被透射的透射带电粒子照射时发光 样品（6）的内部。 在二次带电粒子图像模式中，基于由来自样品（6）的反射带电粒子或二次带电粒子（517）引起的检测信号（518）产生二次带电粒子图像。
-
公开(公告)号：US20130026363A1
公开(公告)日：2013-01-31
申请号：US13633476
申请日：2012-10-02
发明人： Junichi KATANE , Sukehiro ITO
IPC分类号： G01N23/08
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/2443 , H01J2237/2445 , H01J2237/2605
摘要： The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.
摘要翻译： 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。
-
-
-
-
搜索结果
5 条记录 (耗时 0.016 秒)
