公开(公告)号：US20150083908A1

公开(公告)日：2015-03-26

申请号：US14562260

申请日：2014-12-05

申请人： Hitachi High-Technologies Corporation

发明人： Yusuke OMINAMI ,  Mami KONOMI ,  Sukehiro ITO ,  Tomohisa OHTAKI ,  Shinsuke KAWANISHI

IPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/26 ,  H01J37/22

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

摘要： A sample observation method uses a charged particle beam apparatus comprising a charged particle optical column irradiating a charged particle beam, a vacuum chamber, and a sample chamber being capable of storing a sample. The method includes maintaining a pressure of the sample chamber higher than that of the vacuum chamber by a thin film which permits the charged particle beam to be transmitted, determining a relation between a height of a lower surface of the thin film and a height of a lower end of a lens barrel of an optical microscope, measuring a distance between the sample and the lens barrel, and setting a distance between the sample and thin film based on the relation and the distance.

摘要翻译： 样品观察方法使用带电粒子束装置，其包括照射带电粒子束的带电粒子光学柱，真空室和能够存储样品的样品室。 该方法包括通过允许带电粒子束透射的薄膜来保持样品室的压力高于真空室的压力，确定薄膜下表面的高度与薄膜的高度之间的关系 基于光学显微镜的镜筒的下端，测量样品和镜筒之间的距离，并根据关系和距离设定样品和薄膜之间的距离。

公开(公告)号：US20160126058A1

公开(公告)日：2016-05-05

申请号：US14891494

申请日：2014-03-12

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Yusuke OMINAMI ,  Taku SAKAZUME ,  Sukehiro ITO

IPC分类号： H01J37/22 ,  H01J37/26 ,  H01J37/20 ,  H01J37/10

CPC分类号： H01J37/22 ,  G01N23/046 ,  G01N2223/3307 ,  G01N2223/418 ,  H01J37/10 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/047 ,  H01J2237/10 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/24578 ,  H01J2237/2611 ,  H01J2237/2802

摘要： An electron microscope has a large depth of focus in comparison with an optical microscope. Thus, information is superimposed on one image in the direction of depth. Therefore, it is necessary to accurately specify the three-dimensional position and density of a structure in a specimen so as to observe the three-dimensional structure of the interior of the specimen by using the electron microscope. Furthermore, a specimen that is observed with the optical microscope on a slide glass is not put into a TEM device of the related art. Thus, performing three-dimensional internal structure observation with the electron microscope on a location that is observed with the optical microscope requires very cumbersome preparation of the specimen. By controlling a vector parameter that defines the interrelationship between a primary charged particle beam and the specimen and by irradiation with the primary charged particle beam with a plurality of different vector parameters, images of transmitted charged particles of the specimen that correspond to each of the vector parameters are obtained. Irradiation with the primary charged particle beam is performed on the specimen that is arranged either directly or through a predetermined member on a detector which detects charged particles transmitted through or scattered by the interior of the specimen.

摘要翻译： 与光学显微镜相比，电子显微镜具有较大的聚焦深度。 因此，信息在深度方向上叠加在一个图像上。 因此，必须准确地确定试样中的结构的三维位置和密度，以便通过电子显微镜观察试样内部的三维结构。 此外，用幻灯片玻璃上的光学显微镜观察的样品没有放入现有技术的TEM器件中。 因此，在用光学显微镜观察的位置上用电子显微镜进行三维内部结构观察需要非常繁琐的样品制备。 通过控制限定初级带电粒子束和样本之间的相互关系的矢量参数以及通过用多个不同矢量参数照射初级带电粒子束的样本的透射带电粒子对应于每个矢量的图像 获得参数。 对于直接或通过检测器上的预定部件布置的试样进行照射，该检测器检测通过样本内部传播或散射的带电粒子。

公开(公告)号：US20150318143A1

公开(公告)日：2015-11-05

申请号：US14646159

申请日：2013-11-26

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Yusuke OMINAMI ,  Takashi OHSHIMA ,  Sukehiro ITO

IPC分类号： H01J37/20 ,  H01J37/18 ,  H01J37/28

CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20235 ,  H01J2237/2445 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/2608 ,  H01J2237/2801

摘要： This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.

摘要翻译： 该带电粒子束装置将由带电粒子显微镜产生的初级带电粒子束照射到构成至少一部分试样基底的发光部件上的试样上，除了通过以下方式获得带电粒子显微镜图像 检测通过或散射在样品内的带电粒子的发光部件在样品仍然配置在样品平台上的同时通过光学显微镜获得光学显微镜图像。

公开(公告)号：US20140175278A1

公开(公告)日：2014-06-26

申请号：US14191769

申请日：2014-02-27

申请人： Hitachi High-Technologies Corporation

发明人： Yusuke OMINAMI ,  Sukehiro ITO ,  Tomohisa OHTAKI

IPC分类号： H01J37/18 ,  H01J37/244

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

摘要： Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

公开(公告)号：US20160025659A1

公开(公告)日：2016-01-28

申请号：US14774367

申请日：2014-01-22

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Yusuke OMINAMI ,  Mitsugu SATO ,  Kenko UCHIDA ,  Sadamitsu ASO ,  Taku SAKAZUME ,  Hideo MORISHITA ,  Sukehiro ITO ,  Takashi OHSHIMA

IPC分类号： G01N23/225 ,  G01N23/22

CPC分类号： G01N23/2251 ,  G01N23/2204 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/24455 ,  H01J2237/2605

摘要： The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.

摘要翻译： 本发明的目的是消除在使用透射带电粒子的观察中放置和提取样品的努力。 带电粒子束装置（601）的特征在于，具有：带有原色带电粒子束照射样品（6）的带电粒子光学透镜管; 具有发光元件（500）的样品台，其上由于在样品（6）内部传播或散射的带电粒子或具有发光元件（500）的样品台（600）而发光的发光元件 可拆卸地设置; 以及检测由发光部件发出的光的检测器（503）。

公开(公告)号：US20160329188A1

公开(公告)日：2016-11-10

申请号：US15109481

申请日：2014-12-24

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Yusuke OMINAMI ,  Junichi KATANE ,  Shinsuke KAWANISHI ,  Sukehiro ITO

IPC分类号： H01J37/28 ,  H01J37/22 ,  H01J37/244

CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J37/226 ,  H01J37/244 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2608

摘要： Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).

摘要翻译： 提供了能够以简单的方式观察样品的内部和表面的带电粒子束装置。 该带电粒子束装置以透射带电粒子图像模式和二次带电粒子图像模式工作。 在透射带电粒子图像模式中，透射带电粒子图像是根据与从发射元件（500）发射的光相关联的检测信号（512）产生的，该发光元件（500）在被透射的透射带电粒子照射时发光 样品（6）的内部。 在二次带电粒子图像模式中，基于由来自样品（6）的反射带电粒子或二次带电粒子（517）引起的检测信号（518）产生二次带电粒子图像。

公开(公告)号：US20150380208A1

公开(公告)日：2015-12-31

申请号：US14850085

申请日：2015-09-10

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Yusuke OMINAMI ,  Tomohisa OHTAKI ,  Sukehiro ITO

IPC分类号： H01J37/18 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/202 ,  H01J2237/2445 ,  H01J2237/2608

摘要： A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.

摘要翻译： 能够在空气气氛或气体气氛中观察样品的带电粒子束装置具有用于将压缩空间与减压空间分离的薄膜。 真空排气泵抽出第一壳体; 并且检测器检测在第一壳体中的带电粒子束（通过样品的照射获得）。 提供薄膜以至少沿着第一和第二壳体之间的界面的一部分分离第一壳体的内部和第二壳体的内部。 在薄膜中形成开口部，使得带电粒子照射单元侧的开口面积大于样品侧的开口面积; 并且覆盖开口部的样品侧的薄膜透过或允许通过初级带电粒子束和带电粒子束。

公开(公告)号：US20130026363A1

公开(公告)日：2013-01-31

申请号：US13633476

申请日：2012-10-02

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Junichi KATANE ,  Sukehiro ITO

IPC分类号： G01N23/08

CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2605

摘要： The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.

摘要翻译： 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。