公开(公告)号：US06811953B2

公开(公告)日：2004-11-02

申请号：US09861698

申请日：2001-05-22

申请人： Hitoshi Hatada ,  Masaki Kato ,  Motoo Koyama ,  Hiroshi Shirasu ,  Masahiro Iguchi

发明人： Hitoshi Hatada ,  Masaki Kato ,  Motoo Koyama ,  Hiroshi Shirasu ,  Masahiro Iguchi

IPC分类号： G01B1100

CPC分类号： G03F9/7026 ,  G03F7/70275 ,  G03F7/70358

摘要： The memory unit stores the correlation of the positional change in the image planes of the projection optical modules in the focusing direction and the light quantity change. The image plane position determination unit finds the positional change value of the image planes of the projection optical modules based on the correlation information that is stored in the memory unit and the information on changes in the amount of light that is emitted to the projection optical modules. The compensation value calculating unit calculates the compensation value corresponding to the change in the amount of curvature in the image planes of the projection optical modules. The compensating unit compensates the change value in conformity with the compensation value. The focus compensation optical system is driven based on the change value that is compensated.

摘要翻译： 存储单元存储投影光学模块在聚焦方向上的图像平面中的位置变化与光量变化的相关性。 图像平面位置确定单元基于存储在存储单元中的相关信息和关于发射到投影光学模块的光量变化的信息，找出投影光学模块的图像平面的位置变化值 。 补偿值计算单元计算与投影光学模块的图像平面中的曲率量的变化相对应的补偿值。 补偿单元根据补偿值补偿变化值。 基于补偿的变化值驱动聚焦补偿光学系统。

公开(公告)号：US08704431B2

公开(公告)日：2014-04-22

申请号：US13462454

申请日：2012-05-02

申请人： Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

发明人： Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

IPC分类号： H01J61/52

CPC分类号： F21V19/006 ,  G03F7/70016 ,  H01J5/56 ,  H01J61/523 ,  H01J61/822

摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

摘要翻译： 光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。 其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。 此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

公开(公告)号：US20120248960A1

公开(公告)日：2012-10-04

申请号：US13462454

申请日：2012-05-02

申请人： Hiroshi SHIRASU ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

发明人： Hiroshi SHIRASU ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

IPC分类号： H01J61/52

CPC分类号： F21V19/006 ,  G03F7/70016 ,  H01J5/56 ,  H01J61/523 ,  H01J61/822

摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

摘要翻译： 光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。 其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。 此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

公开(公告)号：US08531093B2

公开(公告)日：2013-09-10

申请号：US11896416

申请日：2007-08-31

申请人： Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

发明人： Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

IPC分类号： H01J7/26 ,  H01J1/02 ,  H01J61/52 ,  F21V29/00 ,  H01R13/00

CPC分类号： F21V19/006 ,  G03F7/70016 ,  H01J5/56 ,  H01J61/523 ,  H01J61/822

摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

摘要翻译： 光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。 其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。 此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

公开(公告)号：US20080218049A1

公开(公告)日：2008-09-11

申请号：US11896416

申请日：2007-08-31

申请人： Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

发明人： Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

IPC分类号： H01J7/26 ,  H01J61/52 ,  H01J9/46

CPC分类号： F21V19/006 ,  G03F7/70016 ,  H01J5/56 ,  H01J61/523 ,  H01J61/822

摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

摘要翻译： 光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。 其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。 此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

公开(公告)号：US06750951B2

公开(公告)日：2004-06-15

申请号：US09836430

申请日：2001-04-18

申请人： Motoo Koyama ,  Masaki Kato ,  Hidefumi Shibano

发明人： Motoo Koyama ,  Masaki Kato ,  Hidefumi Shibano

IPC分类号： G03B2754

CPC分类号： G03F7/70958 ,  G02B1/10 ,  G02B1/11 ,  G02B27/0025 ,  G03F7/70575

摘要： An optical apparatus having a suppressor that suppresses the wavelength dependence, in a predetermined wavelength band, of a thin film formed on an optical surface of the optical apparatus.

摘要翻译： 一种具有抑制器的光学装置，其抑制在光学装置的光学表面上形成的薄膜在预定波长带中的波长依赖性。

公开(公告)号：US06489624B1

公开(公告)日：2002-12-03

申请号：US09119162

申请日：1998-07-20

申请人： Yoshijiro Ushio ,  Takehiko Ueda ,  Eiji Matsukawa ,  Motoo Koyama

发明人： Yoshijiro Ushio ,  Takehiko Ueda ,  Eiji Matsukawa ,  Motoo Koyama

IPC分类号： G01N2186

CPC分类号： G01B11/0683

摘要： Apparatus and methods are disclosed that measure the thickness of a layer on a workpiece such as a semiconductor wafer, especially as the layer is undergoing a process such as polishing to achieve planarization of the layer. The apparatus comprises a probe light optical system that directs a beam of probe light to be incident on a surface of the layer, and produce a signal light from reflection of the probe light from or transmission of the probe light through the layer. A light detector retrieves and detects sufficient wavelengths of the signal light to produce a corresponding electronic signal encoding data regarding the intensity at various wavelengths of the signal light. At least one of the following is monitored: appearance or disappearance of maxima or minima in a spectrum of intensity or transmittance of the signal light, a change in wavelength at which a maximum or minimum is located in the spectrum, and change in intensity at a particular wavelength at which a maximum or minimum is located in the spectrum. The apparatus can be included with a polishing apparatus.

摘要翻译： 公开了测量诸如半导体晶片的工件上的层的厚度的装置和方法，特别是当该层经历诸如抛光的工艺以实现该层的平坦化时。 该装置包括探针光学系统，其将探测光束引导入入层的表面，并产生来自探测光的反射的信号光或探测光透过该层的透射。 光检测器检索并检测信号光的足够的波长，以产生相应的电子信号，该信号编码关于信号光的各种波长的强度的数据。 监视以下中的至少一个：信号光的强度或透射光谱中的最大值或最小值的出现或消失，最大或最小位于光谱中的波长变化，以及在 最大或最小位于光谱中的特定波长。 该装置可以包括在抛光装置中。

公开(公告)号：US06339219B1

公开(公告)日：2002-01-15

申请号：US09335782

申请日：1999-06-18

申请人： Tohru Ishizuya ,  Motoo Koyama

发明人： Tohru Ishizuya ,  Motoo Koyama

IPC分类号： G02F101

CPC分类号： G01J5/40

摘要： An imaging device is provided for efficient and accurate conversion of invisible infrared radiation into a visible optical image. In an example, the image device employs an improved configuration of a substrate transmissive to infrared radiation, an infrared lens system, an optical readout radiation/displacement conversion unit for converting the infrared radiation into displacements, a readout optical system for directing readout light towards reflectors of the optical readout radiation/displacement conversion unit. The image device also provides for ease in assembly and calibration by adopting an improved arrangement of the parts.

摘要翻译： 提供了一种成像装置，用于将不可见的红外辐射有效且准确地转换成可见光学图像。 在一个示例中，图像装置采用对红外辐射透射的基板的改进配置，红外透镜系统，用于将红外辐射转换成位移的光学读出辐射/位移转换单元，用于将读出光引导到反射器的读出光学系统 的光读出辐射/位移转换单元。 图像装置还通过采用改进的部件布置来提供组装和校准的容易性。

公开(公告)号：US5949503A

公开(公告)日：1999-09-07

申请号：US668943

申请日：1996-06-24

申请人： Motoo Koyama ,  Hideaki Shimomura

发明人： Motoo Koyama ,  Hideaki Shimomura

IPC分类号： G02F1/1334 ,  G02F1/1335 ,  H04N5/74 ,  G02F1/136

CPC分类号： G02F1/133553 ,  H04N5/7441 ,  G02F1/1334 ,  G02F2201/305 ,  G02F2203/22 ,  G02F2203/34

摘要： Reflective spatial light modulators (RSLMs) and projection apparatus employing such RSLMs are disclosed. The RSLM comprises a reflective surface and a superposed light-modulation layer. The reflective surface is configured to have a reflective diffraction optical element or a microfaceted reflective array. Incident light impinging on the RSLM can pass through the light-modulation layer, reflect from the reflective surface, and return through the light-modulation layer to become modulated signal light capable of forming a viewable image if projected onto a screen or other surface. The reflective diffraction optical element or microfaceted reflective array on the reflective surface is operable to cause the signal light to propagate from the RSLM in a different direction than any ghost light reflected from the RSLM. Projection apparatus employing such an RSLM comprise an illumination optical system, a projection optical system that may or may not be coaxial with the illumination optical system, and a stop operable to pass signal light but not ghost light to a screen for viewing. The viewed image has enhanced contrast over the prior art.

摘要翻译： 公开了使用这种RSLM的反射空间光调制器（RSLM）和投影装置。 RSLM包括反射表面和叠加的光调制层。 反射表面被配置为具有反射衍射光学元件或微量反射阵列。 入射到RSLM上的入射光可以通过光调制层，从反射面反射，并通过光调制层返回成为能够在投影到屏幕或其它表面上时形成可视图像的调制信号光。 反射表面上的反射衍射光学元件或微量反射阵列可操作以使信号光从与RSLM反射的任何重影光不同的方向从RSLM传播。 使用这样的RSLM的投影装置包括照明光学系统，可以与照明光学系统共轴的投影光学系统，以及可操作以将信号光而不是重影光传递到用于观看的屏幕的停止。 所观看的图像与现有技术相比具有增强的对比度。

公开(公告)号：US20080042044A1

公开(公告)日：2008-02-21

申请号：US11628052

申请日：2005-06-06

申请人： Motoo Koyama

发明人： Motoo Koyama

IPC分类号： G01J1/32 ,  G02B27/14

CPC分类号： G03F7/7085 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0414 ,  G03F7/70558

摘要： A light detecting apparatus which can be arranged even in an optical path of which converting angle is relatively large, and can accurately detect light entering along a predetermined direction in an optical path. The light detecting apparatus (10) for detecting light which enters in a predetermined direction in an optical path has a light splitting element (11) having two optical surfaces (11a, 11b) positioned in the optical path, and a photoelectric detector (12) for photo detecting light which propagates inside the light splitting element and which is guided from a side face (11c) of the light splitting element. The light splitting element further has an incident angle conversion section (13) for converting a part of light which enters one optical face of the light splitting element into light entering the other optical surface at an incident angle greater than or equal to a total reflection angle.

摘要翻译： 光检测装置即使在转换角度相对较大的光路中也能够被布置，并且能够精确地检测在光路中沿预定方向进入的光。 用于检测在光路中沿预定方向进入的光的光检测装置（10）具有分光元件（11），其具有位于光路中的两个光学表面（11a，11b），以及光电检测器 12），用于在分光元件内传播并从分光元件的侧面（11c）引导的光检测光。 光分离元件还具有入射角转换部（13），其将进入分光元件的一个光学面的一部分光转换成入射角大于或等于全反射角的入射光 。