摘要:
Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising:an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing;a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; andan optical detection device for quantifying the amount of grains deposited.
摘要:
Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising: an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and an optical detection device for quantifying the amount of grains deposited.
摘要:
Provided is a method using a dry deposition apparatus for depositing grains on a substrate comprising: an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and an optical detection device for quantifying the amount of grains deposited.
摘要:
A substrate is roboticaly picked up at a station and transported to a measuring station to measure the distance to a reference. The substrate is aligned to a robot before measurement. The measured substrate is then transported to a pharmaceutical or diagnostic powder/grain deposition station where the powder/grains are controllably deposited on the substrate to predetermined thicknesses over a plurality of powder/grain collection zones. The deposited powder/grains are then measured to determine the thickness and area covered by the deposited powder/grains at each collection zone. The substrate is then transported to a lamination station and each collection zone of powder/grains is welded to a cover substrate. The system remembers which collection zones are out of specification so that they can be later selectively discarded.
摘要:
AC waveforms biasing of bead transporter chucks and their accumulated charge sensing circuits tailored for low resistivity substrates and beads where if traditional DC quasi-static biasing potentials were used, the bead attraction potentials of the chuck would undergo rapid RC decay and cause the bead transporter chuck to stop working. Methods for selecting AC waveforms are given, including those that maximize the time average of the bead attraction potential at the bead collection zone of the bead contact surface.
摘要:
AC waveforms biasing of bead transporter chucks and their accumulated charge sensing circuits tailored for low resistivity substrates and beads where if traditional DC quasi-static biasing potentials were used, the bead attraction potentials of the chuck would undergo rapid RC decay and cause the bead transporter chuck to stop working. Methods for selecting AC waveforms are given, including those that maximize the time average of the bead attraction potential at the bead collection zone of the bead contact surface.
摘要:
This invention pertains to a method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer wherein the poly(olefin sulfone) layer is exposed to ultra violet radiation prior to sputter etching the surface relief pattern into the metal layer.
摘要:
A method for developing an electrostatic latent charge image formed on a photoreceptor 36 which is disposed on an interior surface of a faceplate panel 12 of a CRT 10 utilizes a developer 40 having a developing chamber 42 with a sidewall 50 closed by a bottom end 44 and a panel support 46 at the other end. An opening 48 is formed through the panel support 46 to provide access to and support for the faceplate panel 12. A panel grid 74 is disposed in proximity to said interior surface of said faceplate panel 12 and operated at a first potential to control the electric field from the latent charge image. A tank grid 56 is disposed within said developer 40 and spaced from the sidewall 50, the bottom 44 and the panel grid 74. A triboelectric gun 84 is disposed within the developer 40 for imparting a desired charge polarity to the screen structure material and for distributing the charged screen structure material onto the latent charge image. An electrometer 66 and a phosphor deposition monitor 90 monitor the deposition of the charged screen structure material onto the latent charge image; and a controller 68 terminates the deposition of the charged screen structure material when sufficient material is deposited. The Tank grid 56 is operated at a potential different from the potential on the panel grid 74 so that the tank grid 56 controls the electrostatic forces within the developer 40.
摘要:
Three developer solvents 2-methylcyclohexanone, 3-methylcyclohexanone, and a mixture of acetonyl acetate and acetone, improve the resolution of electron beam exposed films of poly(1-methyl-1-cyclopentene-SO.sub.2) copolymers.
摘要:
The invention is directed to a corona charging device having a powder feed with an outlet. The device has an internal charging cavity having an inlet and a charged powder outlet. The powder feed outlet is positioned at the internal charging cavity inlet. The device is adapted to guide a powder stream downstream from the powder feed outlet to the charged powder outlet. The device also includes a corona charger having one or more needle projections (each having a tip) positioned and adapted to facilitate a corona ion flow from the needle projections and intersecting the powder stream. The device also includes a rotating ground electrode adapted to be charged or grounded to attract the corona flow from the needle projections, and to rotate segments of the ground electrode between the internal charging cavity and a ground electrode cleaner.