公开(公告)号：US06551652B2

公开(公告)日：2003-04-22

申请号：US09451147

申请日：1999-11-30

申请人： Hong Qiu ,  Soichi Moriya ,  Hiroyuki Kamei ,  Koji Sumi ,  Masami Murai ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Soichi Moriya ,  Hiroyuki Kamei ,  Koji Sumi ,  Masami Murai ,  Tsutomu Nishiwaki

IPC分类号： B05D512

CPC分类号： C23C18/1254 ,  C23C18/1216 ,  C23C18/1225 ,  H01L41/1876 ,  H01L41/318 ,  Y10T29/42

摘要： A piezoelectric element having a piezoelectric film where the difference in the quantity of lead along the thickness of the film is minimized. The film is obtained by first applying, at least once, a first sol for use in forming a PZT film on a substrate having a lower electrode formed thereon. Second, applying a second sol having the greater lead content than the first sol. Third, subjecting these films to heat treatment at a predetermined temperature at least once. The second sol has a composition capable of forming a piezoelectric film having a Perovskite structure expressed generally by AxByO3, and the content of material constituting the A site of the first sol is greater than what constitutes the A site of the second sol.

摘要翻译： 具有压电膜的压电元件，其中沿着膜的厚度的铅的量的差最小化。 通过首先在其上形成有下电极的基板上施加至少一次用于形成PZT膜的第一溶胶来获得膜。 其次，应用比第一溶胶具有更大铅含量的第二溶胶。 第三，使这些膜在预定温度下进行至少一次的热处理。 第二溶胶具有能够形成具有通常由AxByO3表示的钙钛矿结构的压电膜的组合物，构成第一溶胶的A位置的材料的含量大于构成第二溶胶的A位置的材料的含量。

公开(公告)号：US06281617B1

公开(公告)日：2001-08-28

申请号：US09458665

申请日：1999-12-10

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki

IPC分类号： H01L4104

CPC分类号： C09K11/06 ,  G01N21/70 ,  Y10T29/42 ,  Y10T29/49156

摘要： Provided is a luminous element which utilizes a tribo-luminescence phenomenon. The luminous element comprises: a pressure luminous layer (14) which emits light upon the application of pressure; and a piezoelectric element which comprises a piezoelectric film (12) held between electrode films (11) and (13), and which is located so as to be capable of applying pressure on the pressure luminous layer.

摘要翻译： 提供了利用摩擦发光现象的发光元件。 发光元件包括：在施加压力时发光的压力发光层（14）; 以及压电元件，其包括保持在电极膜（11）和（13）之间的压电膜（12），其被定位成能够对压力发光层施加压力。

公开(公告)号：US06419849B1

公开(公告)日：2002-07-16

申请号：US09534573

申请日：2000-03-27

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhiqiang Wei

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhiqiang Wei

IPC分类号： H01L4100

CPC分类号： B41J2/1628 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/318

摘要： When a piezoelectric material is manufactured by hydrothermal method, the proper amount of lead contained in the piezoelectric film can be ensured and decreases in piezoelectric characteristics can be prevented. A method for manufacturing a piezoelectric material expressed by the formula ABO3, containing an element “a” as the element expressed by A above, and having a perovskite crystal structure, comprises a first step of producing an oxide containing an element “a′”, and a second step of producing a piezoelectric material by subjecting the oxide produced in the first step to a hydrothermal processing using an aqueous solution containing the element “a”, wherein the amount of the element “a” contained in the piezoelectric material produced in the second step is increased over the amount of the element “a” contained in the oxide produced in the first step.

摘要翻译： 当通过水热法制造压电材料时，可以确保压电膜中所含的适量的铅，并且可以防止压电特性的降低。 制备由式ABO3表示的压电材料的方法，其包含元素“a”作为上述A表示的元素，并且具有钙钛矿晶体结构，包括制备含有元素“a”的氧化物的第一步骤， 以及第二步骤，通过使用含有元素“a”的水溶液对在第一步骤中产生的氧化物进行水热处理来制造压电材料，其中包含在所述压电材料中产生的压电材料中的元素“a”的量 第一步骤中生成的氧化物中含有的元素“a”的量增加。

公开(公告)号：US06803702B2

公开(公告)日：2004-10-12

申请号：US10050586

申请日：2002-01-18

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhiqiang Wei

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhiqiang Wei

IPC分类号： H01L4108

CPC分类号： B41J2/1628 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/318

摘要： When a piezoelectric material is manufactured by hydrothermal method, the proper amount of lead contained in the piezoelectric film can be ensured and decreases in piezoelectric characteristics can be prevented. A method for manufacturing a piezoelectric material expressed by the formula ABO3, containing an element “a” as the element expressed by A above, and having a perovskite crystal structure, comprises a first step of producing an oxide containing an element “a′”, and a second step of producing a piezoelectric material by subjecting the oxide produced in the first step to a hydrothermal processing using an aqueous solution containing the element “a”, wherein the amount of the element “a”, contained in the piezoelectric material produced in the second step is increased over the amount of the element “a” contained in the oxide produced in the first step.

摘要翻译： 当通过水热法制造压电材料时，可以确保压电膜中所含的适量的铅，并且可以防止压电特性的降低。 制备由式ABO3表示的压电材料的方法，其包含元素“a”作为上述A表示的元素，并且具有钙钛矿晶体结构，包括制备含有元素“a”的氧化物的第一步骤， 以及第二步骤，通过使用含有元素“a”的水溶液对第一步骤中产生的氧化物进行水热处理来制造压电材料，其中包含在压电材料中所含的元素“a”的量 第二步骤比第一步产生的氧化物中所含的元素“a”的量增加。

公开(公告)号：US06571446B2

公开(公告)日：2003-06-03

申请号：US09916747

申请日：2001-07-30

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki

IPC分类号： H04R1700

CPC分类号： C09K11/06 ,  G01N21/70 ,  Y10T29/42 ,  Y10T29/49156

摘要： A method for manufacturing a piezoelectric element is disclosed. The method includes the steps of forming a lower electrode over a substrate, forming a piezoelectric luminous film over the lower electrode, forming an upper electrode over the piezoelectric film, forming a pressure luminous layer for emitting light upon application of pressure on the upper electrode, and attaching a substrate to the pressure luminous layer—has been inserted as a new abstract.

摘要翻译： 公开了一种制造压电元件的方法。 该方法包括以下步骤：在衬底上形成下电极，在下电极上形成压电发光膜，在压电膜上形成上电极，形成用于在上电极施加压力时发光的压力发光层， 并将基板附着到压力发光层 - 作为新的摘要插入。

公开(公告)号：US06419848B1

公开(公告)日：2002-07-16

申请号：US09518189

申请日：2000-03-02

申请人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Haruo Nakamura

发明人： Hong Qiu ,  Koji Sumi ,  Tsutomu Nishiwaki ,  Haruo Nakamura

IPC分类号： H01L4100

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/318 ,  Y10T29/42

摘要： A piezoelectric actuator, comprising a stacked structure consisting of a top electrode 5, a piezoelectric film 4, and a bottom electrode 3, wherein the piezoelectric film comprises a first group 42 of piezoelectric ceramic particles and a second group 43 of piezoelectric ceramic particles. A distinctive feature is that the particles constituting the first group of piezoelectric ceramic particles are larger than the jingo particles constituting the second group of piezoelectric ceramic particles, and the first group of piezoelectric ceramic particles and the second group of piezoelectric ceramic particles have mutually different compositions. The piezoelectric actuator can thus be manufactured by an application method in a low-temperature environment, and a thicker piezoelectric film can be obtained. In addition, a highly practical piezoelectric film can be provided by combining the advantages of a plurality of material types.

摘要翻译： 一种压电致动器，包括由顶部电极5，压电膜4和底部电极3组成的堆叠结构，其中压电膜包括压电陶瓷颗粒的第一组42和压电陶瓷颗粒的第二组43。 其特征在于构成第一组压电陶瓷颗粒的颗粒大于构成第二组压电陶瓷颗粒的微型颗粒，并且第一组压电陶瓷颗粒和第二组压电陶瓷颗粒具有相互不同的组成 。 因此，压电致动器可以通过在低温环境中的施加方法制造，并且可以获得更厚的压电膜。 此外，通过组合多种材料的优点，可以提供高度实用的压电膜。

公开(公告)号：US06639340B1

公开(公告)日：2003-10-28

申请号：US09549209

申请日：2000-04-13

申请人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

IPC分类号： H01L4108

CPC分类号： H01L41/0805 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/318

摘要： Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.

摘要翻译： 提供一种压电元件的制造方法，该压电元件具有优异的压电特性，并且可以制成较厚的膜。 压电薄膜通过将包含压电陶瓷的金属元素的压电前体膜4021至4025涂覆材料干燥，热解，然后在扩散炉中在规定条件下进行热处理的方法结晶化。 利用该方法，可以将压电薄膜制成较厚的膜而不引起开裂。

公开(公告)号：US06402304B1

公开(公告)日：2002-06-11

申请号：US09372990

申请日：1999-08-12

申请人： Hong Qiu ,  Koji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhi Quiang Wei

发明人： Hong Qiu ,  Koji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhi Quiang Wei

IPC分类号： B41J2045

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1645 ,  B41J2002/14387 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/317

摘要： A piezoelectric actuator, made of a substrate and a piezoelectric film layer resistant to erosion is provided. The area of the piezoelectric actuator can be enlarged, and has a flat top surface. The present invention further provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head. The piezoelectric actuator includes a piezoelectric film disposed between a lower electrode and an upper electrode. Columnar crystal grains of piezoelectric ceramic which compose the piezoelectric actuator are random-oriented in a film thickness direction, and have a mean diameter in the range of 100 nm to 15,000 nm. The method for manufacturing the actuator includes the step of forming precursor films, which are composed of metal and oxygen, over a lower electrode, providing a hydrothermal treatment by dipping the precursor films in an alkaline solution, which as 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and promoting the crystallization under certain conditions.

摘要翻译： 提供了一种由基片制成的压电致动器和耐腐蚀的压电薄膜层。 压电致动器的面积可以扩大，并且具有平坦的顶表面。 本发明还提供一种喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法。 压电致动器包括设置在下电极和上电极之间的压电膜。 构成压电致动器的压电陶瓷的柱状晶粒在膜厚度方向上是随机取向的，并且具有在100nm至15,000nm范围内的平均直径。 制造致动器的方法包括在下电极上形成由金属和氧构成的前体膜的步骤，通过将前体膜浸入碱溶液中进行水热处理，碱溶液为2M [mol / l] 或更低，更优选0.1M [mol / l]或更低，给定碱性溶质的浓度，并且在某些条件下促进结晶。

公开(公告)号：US06455106B1

公开(公告)日：2002-09-24

申请号：US09381163

申请日：1999-12-28

申请人： Hong Qiu ,  Kouji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Kazumasa Hasegawa

发明人： Hong Qiu ,  Kouji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Kazumasa Hasegawa

IPC分类号： B05D302

CPC分类号： H01L27/10 ,  C23C18/1208 ,  C23C18/1254 ,  C23C18/1295 ,  H01L21/316 ,  H01L21/31691

摘要： A process for the formation of an oxide ceramic thin film, which permits the control of film oxygen content and can give a film reduced in oxygen deficiency. The process is characterized in that the step of forming an amorphous thin film, the step of heating the thin film to crystallize it or the step of heat-treating the crystallized film is conducted in a moisture-containing atmosphere.

摘要翻译： 用于形成氧化物陶瓷薄膜的方法，其允许控制膜氧含量并且可以减少氧缺乏的膜。 该方法的特征在于，在含水气氛中进行形成非晶薄膜的步骤，加热薄膜使其结晶的步骤或对结晶薄膜进行热处理的步骤。

公开(公告)号：US6142615A

公开(公告)日：2000-11-07

申请号：US47432

申请日：1998-03-25

申请人： Hong Qiu ,  Soichi Moriya ,  Hiroyuki Kamei ,  Koji Sumi

发明人： Hong Qiu ,  Soichi Moriya ,  Hiroyuki Kamei ,  Koji Sumi

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  C04B35/49 ,  C04B35/493 ,  H01L41/09 ,  H01L41/187 ,  H01L41/318 ,  H01L41/39

CPC分类号： B41J2/1628 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/187 ,  B41J2002/14258 ,  B41J2002/14387

摘要： A piezoelectric device for an ink jet print head that has a greater displacement at a low drive voltage. The ink-jet recording head includes a vibration plate, on which is mounted one or more piezoelectric devices that change the volumes of pressure chambers upon application of a voltage. The device is mounted at least on one face of a pressure chamber substrate that is to be filled with ink. Such piezoelectric device includes a second piezoelectric layer having a piezoelectric constant g of a constant value or higher; and a first piezoelectric layer having a dielectric constant of a specific value or higher. Since the piezoelectric constant d of the piezoelectric device correlates with the product of the largest piezoelectric constant g and the largest dielectric device of the piezoelectric devices, a piezoelectric constant d larger than in the conventional case, i.e., having a greater displacement, can be obtained.

摘要翻译： 一种用于喷墨打印头的压电装置，其在低驱动电压下具有较大的位移。 喷墨记录头包括振动板，在该振动板上安装有一个或多个在施加电压时改变压力室体积的压电装置。 装置至少安装在待填充油墨的压力室基板的一个面上。 这种压电装置包括具有恒定值或更高的压电常数g的第二压电层; 以及具有特定值或更高的介电常数的第一压电层。 由于压电元件的压电常数d与压电元件的最大压电常数g和最大电介质器件的乘积相关，所以可以获得比常规情况下更大位移（即具有较大位移）的压电常数d 。