摘要:
A substrate-treatment installation includes a vacuum chamber, a substrate treatment device within the vacuum chamber, a substrate transport device within the vacuum chamber for guiding a substrate along a longitudinal direction in a substrate transport plane past the substrate treatment device, and a device for controlling substrate temperature. The substrate temperature controlling device includes a heat-absorbing cooler on one side of the substrate transport plane and an insulation member selectively displaceable between at least two different positions to vary extent of thermal shielding of the heat-absorbing cooler relative to the substrate transport plane by the insulation member.
摘要:
A device for controlling the temperature of substrates in a substrate-treatment system, in which a substrate can be guided in the longitudinal extension of the substrate-treatment system in a substrate transport plane within a vacuum chamber past a treatment device, solves the problem of dynamically shaping a dynamic change of the thermal insulation to control the heat transfer in the substrate and thereby, reduce, in particular, thermal inertias by providing a heat-absorbing cooler side of the substrate transport plane. The heat-absorbing cooler can be shielded, at least partially from the substrate transport plane, using an insulation member.
摘要:
A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.
摘要:
A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.
摘要:
A transport cylinder for the vacuum treatment of substrates includes a roll body and at least one spacer element arranged on the roll body and enveloping the roll body. The spacer element is made of a knitted tube containing metallic or/and metallic threads.
摘要:
A surge protection device (SPD) includes a spark gap (SG) and in series to the spark gap (SG) a temperature-dependent resistance element (R) with positive temperature coefficient, wherein the spark gap (SG) has a certain holding current, wherein the resistance element (R) is sized such that when a switching temperature is reached, the current is limited such that the holding current of the spark gap is undercut and is switched off, and wherein the resistance element is sized such that in the case of a transient event, the switching temperature is not reached.
摘要:
An aircraft (1) provided with a tail boom (4) including a tail plane (100) provided with an airfoil surface (5), the airfoil surface (5) being provided with at least one stabilizer portion (11, 12) extending laterally outside the tail boom (4) and with a central portion (13) extending inside the tail boom (4), said stabilizer portion (11, 12) being implanted in an orifice (6, 7) of the tail boom (4) that is defined by a peripheral wall (6′, 7′), clearance (21, 22) existing between said stabilizer portion (11, 12) and said peripheral wall (6, 7). The aircraft includes combating means (30) for combating the flutter phenomenon, which means are provided with stiffener means (31, 32) exerting predetermined compressive stress on said stabilizer portion (11, 12), said stiffener means (31, 32) being arranged at the root of the stabilizer portion (11, 12).
摘要:
A wind turbine having two blades is rotated by omnidirectional gas motion. A generator is connected by a shaft to the wind turbine for generating electrical power by the rotation of the wind turbine. A method of extracting energy from moving gas comprises rotating a wind turbine having two blades by omnidirectional gas motion. The method includes connecting a generator by a shaft to the wind turbine and generating electrical power by the rotation of the wind turbine.
摘要:
An overvoltage protection element with a housing, with at least one overvoltage limiting component which is located in the housing, with terminal elements for electrical connection of the overvoltage protection element to the current or signal path which is to be protected, and with a state display which has a display element for display of the state of the overvoltage protection element. A conclusion about the state of the overvoltage protection element is easily possible as a result of a thermally activatable, endothermic material being both in thermal contact with the overvoltage limiting component and also in mechanical contact with the display element of the state display. When the overvoltage limiting component is heated above a certain minimum temperature, expansion of the thermally activatable, endothermic material produces a change in position of the display element whose magnitude is a measure of the heating of the overvoltage limiting component.