摘要:
A method for forming a fine pattern in a semiconductor device removes roughness from a pattern produced in a fine pattern fabrication process using a silylation process as being one kind of a TSI process, eliminates smoothly a photosensitive film residue caused by a residue silylation layer remained on a-non-pattern area, and increases a margin of a lithography process. To achieve the foregoing, the method performs an etching process with a fluorine/oxygen mixture gas so as to remove a thin oxide film being formed on the non-pattern area after a silylation process, enables an edge portion of a silylation region to be planarized so as to prevent the pattern from becoming rough, and forms a photosensitive film pattern by developing the photosensitive film with oxygen plasma. Thereafter, the photosensitive film residue is etched again with a mixture gas of fluorine/oxygen, thereby increasing a fabrication margin of the fine pattern.
摘要:
A digital garment and a fabrication method thereof are provided. The digital garment is fabricated using a knitting technique. The digital garment comprises a plurality of knitting yarns forming loops at regular intervals and interwoven through the loops, and one or more conductive digital yarns tied to the loops of the knitting yarns to form high-speed information communication circuits. The knitting yarns and the digital yarns are knitted together into a garment. During knitting, the digital yarns are used to form high-speed information communication circuits in a rapid and economical manner.
摘要:
Disclosed are a digital band connector, a receptacle, and a connector assembly for easily connecting digital bands formed of digital yarns to an external circuit. The digital band connector includes connect pins spaced apart from each other in a direction, passing through the digital bands made of digital yarns and to fix the digital bands, and electrically connected with the digital bands, a lower housing fixing the digital bands and the connect pins in a lower part and exposing one end of each of the connect pins through a lower surface, and an upper housing coupled with an upper part of the lower housing to fix the digital bands and the connect pins.
摘要:
Disclosed is a digital garment using embroidery technology. In the digital garment, a digital embroidery pattern is formed on a common garment to provide a communication path, an antenna pattern, etc. The digital garment comprises a garment made of a textile and having one side and the other side opposite to each other, a digital embroidery pattern formed along the inner or outer surface of the garment using embroidery technology to provide a communication path to the garment, a sensor attached to the garment and electrically connected to the digital embroidery pattern to convert physical signals to electrical signals, an arithmetic unit attached to the garment and electrically connected to the digital embroidery pattern to process the electrical signals inputted from the sensor, and a communication module attached to the garment and electrically connected to the digital embroidery pattern to perform wireless communication. Further disclosed is a method for fabricating the digital garment using embroidery technology.
摘要:
Disclosed is a digital garment that can provide a high-speed communication path by using a digital band that is quickly and easily attachable to a conventional garment (clothes), and a fabricating method thereof. The digital garment includes: a garment formed of textile; a digital band provided along the outside or inside of the garment so as to provide a communication path; a sensor, attached to the garment, being electrically coupled to the digital band, converting a physical signal into an electrical signal; an operation device, attached to the garment, being electrically coupled to the digital band, receiving the electrical signal from the sensor and processing the signal; and a communication module, attached to the garment, being electrically coupled to the digital band so as to perform wireless communication.
摘要:
The present invention relates to a plasma reaction apparatus and a plasma reaction method using the same. More particularly, the present invention relates to a plasma reaction apparatus which is applied to the reforming of fuel by generating rotating arc plasma and using the rotating arc being generated, the chemical treatment of a persistent gas, and the apparatus for decreasing NOx by an occlusion catalyst, and a plasma reaction method using the same. For this purpose, a raw material for a reaction is allowed to flow through an inflow hole in a swirl structure so that the raw material forms a rotating flow to progress. Accordingly, the raw material is sufficiently reacted in a plasma reaction space of a restrictive volume, and a high temperature plasma reaction is more promptly performed. Furthermore, a plasma reaction zone is expanded, prior to discharge, by a broad area chamber formed as the width of an upper part of a furnace is expanded, and plasma being generated is expanded and stayed as a pointed end spaced from an electrode at a predetermined interval is formed at an expanded end. Accordingly, the present invention relates to a plasma reaction apparatus and a plasma reaction method using the same, a plasma reaction method of a persistent gas, and an apparatus decreasing NOx by an occlusion catalyst, all of which are capable of excluding the discontinuity of the plasma reaction zone.
摘要:
A manufacturing method and apparatus for producing digital yarns using hybrid metal for high speed communication, which can be connected to a network to exchange information in real time in the ubiquitous era, and digital yarns made using the method thereof. The manufacturing method and apparatus for producing digital yarns using hybrid metal for high speed communication and digital yarns thereof comprises producing a hybrid metal rod; drawing the hybrid metal rod; producing a micro filament; feeding the micro filament; softening the micro filament; forming a sliver; forming a spun yarn; winding the spun yarn; coating the spun yarn with an electromagnetic shielding resin; drying the spun yarn with the electromagnetic shielding resin; and covering the spun yarn with a textile yarn and the digital yarn made in accordance with this method.
摘要:
A wind-hydro power generation system and its power generation method which use both wind power and hydraulic power. Increasing the size of a hydraulic turbine for the hydraulic power generation may result in the decreased rotation power of the hydraulic turbine caused by the resistance of the wind when blades on the hydraulic turbine come out of the water. A blade rotation system on the blades of the hydraulic turbine is provided so that the blades may rotate according to the direction of the wind. As a result, wind resistance is not effected to the rotation of the hydraulic turbine even when the blades on the hydraulic turbine are out of water, but enhances the rotation power of the hydraulic turbine, which enables the use of wind power and hydraulic power at the same time.
摘要:
The present invention relates to a textile digital band which is capable of providing a high-speed communication path with surrounding computing devices, through easy and convenient attachment thereof to a conventional garment, and a fabrication method thereof. For this purpose, disclosed herein is a textile digital band comprising a plurality of warps formed parallel to each other in the first direction, and a plurality of wefts formed parallel to each other in the second direction perpendicular to the first direction, wherein the warp includes at least one digital yarn through which electrical currents can flow.
摘要:
A hydraulic power generating system is disclosed. The hydraulic power generating system includes a looped rail, a plurality of pulleys moving along the looped rail, a plurality of water receiving plates, each being installed to each of the pulleys, side plates which are hingedly coupled to left and right side portions of each of the water receiving plates by hinge shafts, and spread adjusting devices which make the side plates spread against a direction of water flow. Accordingly, since the spread direction of the side plates hingedly coupled to both side portions of the water receiving plate can be changed forward and backward according to the direction of water flow so as to receive a larger amount of water, efficiency in generating power using water energy increases.