Method for forming a fine pattern in a semiconductor device
    1.
    发明授权
    Method for forming a fine pattern in a semiconductor device 有权
    在半导体器件中形成精细图案的方法

    公开(公告)号:US6156668A

    公开(公告)日:2000-12-05

    申请号:US294874

    申请日:1999-04-20

    IPC分类号: H01L21/302 G03F7/38 H01L21/00

    CPC分类号: G03F7/38

    摘要: A method for forming a fine pattern in a semiconductor device removes roughness from a pattern produced in a fine pattern fabrication process using a silylation process as being one kind of a TSI process, eliminates smoothly a photosensitive film residue caused by a residue silylation layer remained on a-non-pattern area, and increases a margin of a lithography process. To achieve the foregoing, the method performs an etching process with a fluorine/oxygen mixture gas so as to remove a thin oxide film being formed on the non-pattern area after a silylation process, enables an edge portion of a silylation region to be planarized so as to prevent the pattern from becoming rough, and forms a photosensitive film pattern by developing the photosensitive film with oxygen plasma. Thereafter, the photosensitive film residue is etched again with a mixture gas of fluorine/oxygen, thereby increasing a fabrication margin of the fine pattern.

    摘要翻译: 在半导体器件中形成精细图案的方法从使用硅烷化工艺的精细图案制造工艺中产生的图案中除去粗糙度作为一种TSI工艺,平滑地消除由剩余的甲硅烷基层残留的感光性膜残留物 非图案区域,并增加了光刻工艺的余量。 为了实现上述目的,该方法用氟/氧混合气体进行蚀刻处理,以便在甲硅烷化过程之后除去在非图案区域上形成的薄氧化膜,使甲硅烷基化区域的边缘部分平坦化 以防止图案变粗糙,并且通过用氧等离子体显影感光膜形成感光膜图案。 此后,用氟/氧的混合气体再次蚀刻感光性膜残渣,从而增加精细图案的制造余量。

    Digital garment using knitting technology and fabricating method thereof
    2.
    发明授权
    Digital garment using knitting technology and fabricating method thereof 有权
    使用针织技术的数字服装及其制造方法

    公开(公告)号:US08116898B2

    公开(公告)日:2012-02-14

    申请号:US12919294

    申请日:2008-06-27

    IPC分类号: G06F19/00

    摘要: A digital garment and a fabrication method thereof are provided. The digital garment is fabricated using a knitting technique. The digital garment comprises a plurality of knitting yarns forming loops at regular intervals and interwoven through the loops, and one or more conductive digital yarns tied to the loops of the knitting yarns to form high-speed information communication circuits. The knitting yarns and the digital yarns are knitted together into a garment. During knitting, the digital yarns are used to form high-speed information communication circuits in a rapid and economical manner.

    摘要翻译: 提供了一种数字服装及其制造方法。 数码服装采用针织技术制造。 数字服装包括多个针织纱,其以规则间隔形成环,并且通过环交织,以及一根或多根连接到针织纱的圈的导电数字纱,以形成高速信息通信电路。 针织纱和数字纱一起编织成衣服。 在编织期间,数字纱线以快速和经济的方式用于形成高速信息通信电路。

    Connector, Receptable, and Connector Assembly for Digital Band
    3.
    发明申请
    Connector, Receptable, and Connector Assembly for Digital Band 有权
    连接器,可接受和数字频段的连接器组件

    公开(公告)号:US20110318955A1

    公开(公告)日:2011-12-29

    申请号:US13061186

    申请日:2009-08-27

    CPC分类号: H01R12/675 H01R13/582

    摘要: Disclosed are a digital band connector, a receptacle, and a connector assembly for easily connecting digital bands formed of digital yarns to an external circuit. The digital band connector includes connect pins spaced apart from each other in a direction, passing through the digital bands made of digital yarns and to fix the digital bands, and electrically connected with the digital bands, a lower housing fixing the digital bands and the connect pins in a lower part and exposing one end of each of the connect pins through a lower surface, and an upper housing coupled with an upper part of the lower housing to fix the digital bands and the connect pins.

    摘要翻译: 公开了一种数字带式连接器,插座和用于容易地将由数字线形成的数字带连接到外部电路的连接器组件。 数字带式连接器包括在一条方向上彼此分开的连接销,该方向通过数字纱线制成的数字带并固定数字带,并与数字带电连接,固定数字频带的下壳体和连接 引脚位于下部,并且通过下表面暴露每个连接引脚的一端,以及与下壳体的上部联接以固定数字带和连接引脚的上壳体。

    DIGITAL GARMENT USING EMBROIDERY TECHNOLOGY AND FABRICATING METHOD THEREOF
    4.
    发明申请
    DIGITAL GARMENT USING EMBROIDERY TECHNOLOGY AND FABRICATING METHOD THEREOF 有权
    数码服饰使用刺绣技术及其制作方法

    公开(公告)号:US20110000412A1

    公开(公告)日:2011-01-06

    申请号:US12919432

    申请日:2009-02-12

    IPC分类号: D05C3/00 D05C5/02 D05B19/00

    摘要: Disclosed is a digital garment using embroidery technology. In the digital garment, a digital embroidery pattern is formed on a common garment to provide a communication path, an antenna pattern, etc. The digital garment comprises a garment made of a textile and having one side and the other side opposite to each other, a digital embroidery pattern formed along the inner or outer surface of the garment using embroidery technology to provide a communication path to the garment, a sensor attached to the garment and electrically connected to the digital embroidery pattern to convert physical signals to electrical signals, an arithmetic unit attached to the garment and electrically connected to the digital embroidery pattern to process the electrical signals inputted from the sensor, and a communication module attached to the garment and electrically connected to the digital embroidery pattern to perform wireless communication. Further disclosed is a method for fabricating the digital garment using embroidery technology.

    摘要翻译: 披露的是使用刺绣技术的数字服装。 在数字服装中,数字刺绣图案形成在普通的衣服上以提供通信路径,天线图案等。数字服装包括由纺织品制成的衣服,并且具有彼此相对的一侧和另一侧, 使用刺绣技术沿着衣服的内表面或外表面形成的数字刺绣图案,以提供到衣服的通信路径,附接到衣服并电连接到数字刺绣图案以将物理信号转换为电信号的传感器,算术 连接到衣服并电连接到数字刺绣图案以处理从传感器输入的电信号的单元,以及连接到衣服并电连接到数字刺绣图案以执行无线通信的通信模块。 另外公开了使用刺绣技术制造数字服装的方法。

    PLASMA REACTION APPARATUS, PLASMA REACTION METHOD USING THE SAME, PLASMA REACTION METHOD OF PERSISTENT GAS, AND APPARATUS FOR DECREASING NOx BY OCCLUSION CATALYST
    6.
    发明申请
    PLASMA REACTION APPARATUS, PLASMA REACTION METHOD USING THE SAME, PLASMA REACTION METHOD OF PERSISTENT GAS, AND APPARATUS FOR DECREASING NOx BY OCCLUSION CATALYST 有权
    等离子体反应装置,使用其的等离子体反应方法,等离子体气体的等离子体反应方法和用于通过催化剂催化剂降低NOx的装置

    公开(公告)号:US20100008831A1

    公开(公告)日:2010-01-14

    申请号:US11992077

    申请日:2006-10-09

    IPC分类号: B01D53/34 B01J19/08 H05H1/24

    摘要: The present invention relates to a plasma reaction apparatus and a plasma reaction method using the same. More particularly, the present invention relates to a plasma reaction apparatus which is applied to the reforming of fuel by generating rotating arc plasma and using the rotating arc being generated, the chemical treatment of a persistent gas, and the apparatus for decreasing NOx by an occlusion catalyst, and a plasma reaction method using the same. For this purpose, a raw material for a reaction is allowed to flow through an inflow hole in a swirl structure so that the raw material forms a rotating flow to progress. Accordingly, the raw material is sufficiently reacted in a plasma reaction space of a restrictive volume, and a high temperature plasma reaction is more promptly performed. Furthermore, a plasma reaction zone is expanded, prior to discharge, by a broad area chamber formed as the width of an upper part of a furnace is expanded, and plasma being generated is expanded and stayed as a pointed end spaced from an electrode at a predetermined interval is formed at an expanded end. Accordingly, the present invention relates to a plasma reaction apparatus and a plasma reaction method using the same, a plasma reaction method of a persistent gas, and an apparatus decreasing NOx by an occlusion catalyst, all of which are capable of excluding the discontinuity of the plasma reaction zone.

    摘要翻译: 本发明涉及一种等离子体反应装置及使用其的等离子体反应方法。 更具体地,本发明涉及一种等离子体反应装置,其通过产生旋转电弧等离子体并利用所产生的旋转电弧,持续气体的化学处理和通过闭塞来降低NOx的装置应用于燃料重整 催化剂和使用其的等离子体反应方法。 为此,允许用于反应的原料流过旋流结构中的流入孔,使得原料形成旋转流动进行。 因此,原料在限制体积的等离子体反应空间中充分反应,更迅速地进行高温等离子体反应。 此外,等离子体反应区在放电之前被扩大,当炉的上部的宽度被扩大时形成的宽区域,并且产生的等离子体膨胀并且作为与电极间隔开的尖端保持 在扩展端形成预定间隔。 因此,本发明涉及使用其的等离子体反应装置及其等离子体反应方法,持续气体的等离子体反应方法以及通过阻塞催化剂减少NOx的装置,所有这些都能够排除不均匀性 等离子体反应区。

    Manufacturing method and apparatus for producing digital yarns using hybrid metal for high speed communication and digital yarns thereof
    7.
    发明申请

    公开(公告)号:US20080182103A1

    公开(公告)日:2008-07-31

    申请号:US11986728

    申请日:2007-11-26

    IPC分类号: D02G3/12 B05D7/14

    摘要: A manufacturing method and apparatus for producing digital yarns using hybrid metal for high speed communication, which can be connected to a network to exchange information in real time in the ubiquitous era, and digital yarns made using the method thereof. The manufacturing method and apparatus for producing digital yarns using hybrid metal for high speed communication and digital yarns thereof comprises producing a hybrid metal rod; drawing the hybrid metal rod; producing a micro filament; feeding the micro filament; softening the micro filament; forming a sliver; forming a spun yarn; winding the spun yarn; coating the spun yarn with an electromagnetic shielding resin; drying the spun yarn with the electromagnetic shielding resin; and covering the spun yarn with a textile yarn and the digital yarn made in accordance with this method.

    摘要翻译: 一种用于高速通信的混合金属生产数字纱线的制造方法和装置,其可以连接到网络以便在无处不在的时代实时交换信息,以及使用其方法制造的数字纱线。 用于高速通信和数字纱线的混合金属生产数字纱线的制造方法和装置包括制造复合金属棒; 绘制复合金属棒; 生产微丝; 喂养微丝; 软化微丝; 形成条子 形成细纱; 缠绕细纱; 用电磁屏蔽树脂涂覆细纱; 用电磁屏蔽树脂干燥细纱; 用纺织纱线和根据该方法制造的数字纱线覆盖纺纱。

    Wind-hydro power generating system and method
    8.
    发明授权
    Wind-hydro power generating system and method 失效
    风力发电系统及方法

    公开(公告)号:US08378517B2

    公开(公告)日:2013-02-19

    申请号:US12734997

    申请日:2008-12-08

    IPC分类号: F03B13/00

    摘要: A wind-hydro power generation system and its power generation method which use both wind power and hydraulic power. Increasing the size of a hydraulic turbine for the hydraulic power generation may result in the decreased rotation power of the hydraulic turbine caused by the resistance of the wind when blades on the hydraulic turbine come out of the water. A blade rotation system on the blades of the hydraulic turbine is provided so that the blades may rotate according to the direction of the wind. As a result, wind resistance is not effected to the rotation of the hydraulic turbine even when the blades on the hydraulic turbine are out of water, but enhances the rotation power of the hydraulic turbine, which enables the use of wind power and hydraulic power at the same time.

    摘要翻译: 风力发电系统及其发电方式,既有风力又是水力发电。 增加用于液压发电的水轮机的尺寸可以导致当水轮机上的叶片从水中出来时由风阻力引起的水轮机的旋转功率降低。 设置在水轮机的叶片上的叶片旋转系统,使得叶片可以根据风的方向旋转。 因此,即使在水轮机上的叶片脱水的同时,也不会对水轮机的旋转造成风阻,而是提高了水轮机的旋转功率,能够将风力和液压动力用于 同一时间。

    Hydraulic power generating system
    10.
    发明授权
    Hydraulic power generating system 失效
    液压发电系统

    公开(公告)号:US07744309B2

    公开(公告)日:2010-06-29

    申请号:US11790312

    申请日:2007-04-25

    IPC分类号: E02B9/00 F03B13/12

    摘要: A hydraulic power generating system is disclosed. The hydraulic power generating system includes a looped rail, a plurality of pulleys moving along the looped rail, a plurality of water receiving plates, each being installed to each of the pulleys, side plates which are hingedly coupled to left and right side portions of each of the water receiving plates by hinge shafts, and spread adjusting devices which make the side plates spread against a direction of water flow. Accordingly, since the spread direction of the side plates hingedly coupled to both side portions of the water receiving plate can be changed forward and backward according to the direction of water flow so as to receive a larger amount of water, efficiency in generating power using water energy increases.

    摘要翻译: 公开了一种液压发电系统。 液压发电系统包括环形轨道,沿着环形轨道移动的多个滑轮,多个水接收板,各自被安装到每个滑轮,侧板铰接地联接到每个的左侧和右侧部分 的接收板,以及使侧板相对于水流方向扩散的铺展调节装置。 因此,由于与受水板的两侧部铰接的侧板的展开方向能够根据水流的方向而前后变化,以接收更多的水,因此使用水的发电效率 能量增加。