公开(公告)号：US11886110B2

公开(公告)日：2024-01-30

申请号：US17209814

申请日：2021-03-23

Applicant: ILLUMINA, INC.

Inventor： Timothy J. Merkel ,  Ruibo Wang ,  Daniel Wright ,  Danny Yuan Chan ,  Avishek Aiyar ,  Tanmay Ghonge ,  Neil Brahma ,  Arthur Pitera

IPC: G03F7/00 ,  B29C59/02 ,  C09D183/14 ,  G03F7/16 ,  B29K83/00 ,  B29K105/00

CPC classification number: G03F7/0002 ,  B29C59/022 ,  C09D183/14 ,  G03F7/162 ,  G03F7/168 ,  B29K2083/00 ,  B29K2105/0002

Abstract: An imprinting apparatus includes a silicon master and an anti-stick layer coating the silicon master. The silicon master includes a plurality of features positioned at an average pitch of less than about 425 nm, each of the plurality of features comprises a depression having an opening with its largest opening dimension being less than about 300 nm. The anti-stick layer includes a crosslinked silane polymer network.

公开(公告)号：US20210302832A1

公开(公告)日：2021-09-30

申请号：US17209814

申请日：2021-03-23

Applicant: ILLUMINA, INC.

Inventor： Timothy J. Merkel ,  Ruibo Wang ,  Daniel Wright ,  Danny Yuan Chan ,  Avishek Aiyar ,  Tanmay Ghonge ,  Neil Brahma ,  Arthur Pitera

IPC: G03F7/00 ,  C09D183/14 ,  B29C59/02 ,  G03F7/16

Abstract: An imprinting apparatus includes a silicon master and an anti-stick layer coating the silicon master. The silicon master includes a plurality of features positioned at an average pitch of less than about 425 nm, each of the plurality of features comprises a depression having an opening with its largest opening dimension being less than about 300 nm. The anti-stick layer includes a crosslinked silane polymer network.

公开(公告)号：US20220187710A1

公开(公告)日：2022-06-16

申请号：US17550681

申请日：2021-12-14

Applicant: ILLUMINA, INC.

Inventor： Neil Brahma ,  Tyler J. Dill ,  Michelle Kate Fu ,  Brian A. Hanos ,  Sahngki Hong ,  Brinda Kodira Cariappa ,  Lewis J. Kraft

IPC: G03F7/20 ,  G01N21/64 ,  G03F7/16

Abstract: In an example method, a water-soluble protective coating solution is applied over a bonding region and either i) a patterned region of a patterned structure or ii) a lane region of a non-patterned structure. The patterned region includes depressions having at least a polymeric hydrogel therein, and interstitial regions separating the depressions. The lane region includes a lane having at least the polymeric hydrogel therein. The water-soluble protective coating solution is dried to form a solid coating or a gel coating over the bonding region and over either i) the patterned region or ii) the lane region. Portions of the solid coating or the gel coating are selectively removed from the bonding region while leaving other portions of the solid coating or the gel coating over either i) the patterned region or ii) the lane region.