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    Pressure sensor with calibration device and calibration method thereof
    1.
    发明授权
    Pressure sensor with calibration device and calibration method thereof 有权

    公开(公告)号：US11630020B2

    公开(公告)日：2023-04-18

    申请号：US17371102

    申请日：2021-07-09

    Applicant: Industrial Technology Research Institute

    Inventor： Che-Kai Yeh ,  Tzung-Ching Lee ,  Yu-Wen Hsu ,  Chao-Ta Huang

    IPC: G01L27/00 ,  G01L19/14 ,  G01L19/00

    Abstract: A pressure sensor with calibration device includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes the pressure applied to the medium. The pressure sensor with calibration device adjusts the pressure value sensed by the sensing element via the calibration element.

    Composite micro-electro-mechanical-system apparatus and manufacturing method thereof
    3.
    发明授权
    Composite micro-electro-mechanical-system apparatus and manufacturing method thereof 有权
    复合微机电系统装置及其制造方法

    公开(公告)号：US09238576B2

    公开(公告)日：2016-01-19

    申请号：US14149833

    申请日：2014-01-08

    Applicant: Industrial Technology Research Institute

    Inventor： Chung-Yuan Su ,  Chao-Ta Huang ,  Tzung-Ching Lee ,  Yu-Wen Hsu

    IPC: G01P15/097 ,  B81B3/00 ,  H03H3/007

    CPC classification number: B81B3/0008 ,  B81B2201/0271 ,  G01P15/097 ,  H03H3/0072

    Abstract: A MEMS apparatus comprising composite vibrating unit and the manufacturing method thereof are disclosed. The vibrating unit includes a stiffness element on which a first material is disposed. A second material being a conductive material is disposed on the first material and is extended to the stiffness element to remove electric charge on first material. When a temperature is changed, a variation direction of a Young's modulus of the first material is opposite to a variation direction of a Young's modulus of the stiffness element. The unique attributes above allow vibrating unit of the MEMS apparatus such as resonator and gyroscope to have stable resonance frequency against the change of temperature.

    Abstract translation: 公开了一种包括复合振动单元的MEMS装置及其制造方法。 所述振动单元包括其上设置有第一材料的刚度元件。 作为导电材料的第二材料设置在第一材料上并延伸到刚度元件以去除第一材料上的电荷。 当温度变化时，第一材料的杨氏模量的变化方向与刚度元件的杨氏模量的变化方向相反。 上述独特的属性允许诸如谐振器和陀螺仪之类的MEMS装置的振动单元相对于温度变化具有稳定的共振频率。

    PRESSURE SENSOR WITH CALIBRATION FUNCTION AND CALIBRATION METHOD THEREOF
    5.
    发明申请
    PRESSURE SENSOR WITH CALIBRATION FUNCTION AND CALIBRATION METHOD THEREOF 有权

    公开(公告)号：US20220196505A1

    公开(公告)日：2022-06-23

    申请号：US17371102

    申请日：2021-07-09

    Applicant: Industrial Technology Research Institute

    Inventor： Che-Kai Yeh ,  Tzung-Ching Lee ,  Yu-Wen Hsu ,  Chao-Ta Huang

    IPC: G01L27/00 ,  G01L19/00 ,  G01L19/14

    Abstract: A pressure sensor with calibration function includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing, the at least one calibration element changes the pressure applied to the medium.

    COMPOSITE MICRO-ELECTRO-MECHANICAL-SYSTEM APPARATUS AND MANUFACTURING METHOD THEREOF
    7.
    发明申请
    COMPOSITE MICRO-ELECTRO-MECHANICAL-SYSTEM APPARATUS AND MANUFACTURING METHOD THEREOF 有权
    复合微电子机械系统设备及其制造方法

    公开(公告)号：US20140284603A1

    公开(公告)日：2014-09-25

    申请号：US14149833

    申请日：2014-01-08

    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

    Inventor： Chung-Yuan Su ,  Chao-Ta Huang ,  Tzung-Ching Lee ,  Yu-Wen Hsu

    IPC: B81B3/00 ,  B81C1/00

    CPC classification number: B81B3/0008 ,  B81B2201/0271 ,  G01P15/097 ,  H03H3/0072

    Abstract: A MEMS apparatus comprising composite vibrating unit and the manufacturing method thereof are disclosed. The vibrating unit includes a stiffness element on which a first material is disposed. A second material being a conductive material is disposed on the first material and is extended to the stiffness element to remove electric charge on first material. When a temperature is changed, a variation direction of a Young's modulus of the first material is opposite to a variation direction of a Young's modulus of the stiffness element. The unique attributes above allow vibrating unit of the MEMS apparatus such as resonator and gyroscope to have stable resonance frequency against the change of temperature.

    Abstract translation: 公开了一种包括复合振动单元的MEMS装置及其制造方法。 所述振动单元包括其上设置有第一材料的刚度元件。 作为导电材料的第二材料设置在第一材料上并延伸到刚度元件以去除第一材料上的电荷。 当温度变化时，第一材料的杨氏模量的变化方向与刚度元件的杨氏模量的变化方向相反。 上述独特的属性允许诸如谐振器和陀螺仪之类的MEMS装置的振动单元相对于温度变化具有稳定的共振频率。

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