DEPTH MEASUREMENT APPARATUS AND DEPTH MEASUREMENT METHOD

    公开(公告)号:US20220364848A1

    公开(公告)日:2022-11-17

    申请号:US17319107

    申请日:2021-05-13

    摘要: A depth measurement apparatus including an illumination module, a beam splitter, an objective lens, an image capture module, a controller and a processor is provided. The illumination module is configured to generate an illumination beam. The beam splitter and the objective lens are disposed on an optical path of the illumination beam, and the object lens is configured to focus the illumination beam into a hole formed in an object. The image capture module is configured to capture images of the hole at different heights. The controller is coupled to the illumination module and the image capture module. The processor is coupled to the controller and the image capture module, and configured to perform focus distance evaluations on the images captured by the image capture module to obtain a height difference between two surfaces of the object. A depth measurement method is also provided.

    Method and system for measuring distance
    5.
    发明授权
    Method and system for measuring distance 有权
    距离测量方法和系统

    公开(公告)号:US09228829B2

    公开(公告)日:2016-01-05

    申请号:US14447354

    申请日:2014-07-30

    摘要: A method and a system for measuring a distance from a reference point to an object are provided. The method comprises the following steps. At least one image of an object is captured through a lens comprising a phase mask composed of a parallel plate and a wedge prism. At least two corresponding regions of interest (ROI) are obtained from the images. The regions of interest correspond to identical portions of the object. The relative coordinates between corresponding locations within the corresponding regions of interest is measured. The distance is calculated according to the relative coordinates.

    摘要翻译: 提供了一种用于测量从参考点到物体的距离的方法和系统。 该方法包括以下步骤。 通过包括由平行板和楔形棱镜组成的相位掩模的透镜捕获物体的至少一个图像。 从图像中获得至少两个对应的感兴趣区域(ROI)。 感兴趣的区域对应于物体的相同部分。 测量相应的感兴趣区域内相应位置之间的相对坐标。 距离根据相对坐标进行计算。

    Surface topography optical measuring system and surface topography optical measuring method

    公开(公告)号:US10571252B2

    公开(公告)日:2020-02-25

    申请号:US16036952

    申请日:2018-07-17

    摘要: A surface topography optical measuring system including image capture modules, a control module and a computation module is provided. Each image capture module includes an electronically controlled focal length tunable lens, an optical assembly and an image sensor, wherein the image capture modules respectively capture images at different heights between a lowest and a highest surfaces of an object. The control module is coupled to the image capture modules to independently control the image capture modules. The computation module is coupled to the control module and the image sensor of each image capture module, wherein the computation module perform calibration of the surface topography optical measuring system and assesses in-focused pixels in the captured images to measure a height difference between a highest and a lowest surfaces of the object or between any surfaces of interest of the object. A surface topography optical measuring method is also provided.

    SURFACE TOPOGRAPHY OPTICAL MEASURING SYSTEM AND SURFACE TOPOGRAPHY OPTICAL MEASURING METHOD

    公开(公告)号:US20200025555A1

    公开(公告)日:2020-01-23

    申请号:US16036952

    申请日:2018-07-17

    摘要: A surface topography optical measuring system including image capture modules, a control module and a computation module is provided. Each image capture module includes an electronically controlled focal length tunable lens, an optical assembly and an image sensor, wherein the image capture modules respectively capture images at different heights between a lowest and a highest surfaces of an object. The control module is coupled to the image capture modules to independently control the image capture modules. The computation module is coupled to the control module and the image sensor of each image capture module, wherein the computation module perform calibration of the surface topography optical measuring system and assesses in-focused pixels in the captured images to measure a height difference between a highest and a lowest surfaces of the object or between any surfaces of interest of the object. A surface topography optical measuring method is also provided.

    Profile measurement system and profile measurement method

    公开(公告)号:US11162784B2

    公开(公告)日:2021-11-02

    申请号:US16729499

    申请日:2019-12-30

    摘要: System and method for profile measurement are provided. The profile measurement system includes a light projector, an imaging device, a control system, and a processing unit. The light projector includes a light source, a mask, and an optical system. An aperture of the mask allows a portion of light to pass through and generates a pattern. The optical system includes a variable focal length lens element configured to project the pattern at different projection distances. The imaging device is configured to capture images of the pattern projected at the different projection distances. The control system is configured to control a projection distance of the light projector and a focus distance of the imaging device. The processing unit is configured to obtain in-focus pixels in the captured images, generate mask images, reconstruct a large depth of field pattern image based on the captured images and reconstruct the object profile.

    PROFILE MEASUREMENT SYSTEM AND PROFILE MEASUREMENT METHOD

    公开(公告)号:US20210199425A1

    公开(公告)日:2021-07-01

    申请号:US16729499

    申请日:2019-12-30

    IPC分类号: G01B11/25 G02B3/14

    摘要: System and method for profile measurement are provided. The profile measurement system includes a light projector, an imaging device, a control system, and a processing unit. The light projector includes a light source, a mask, and an optical system. An aperture of the mask allows a portion of light to pass through and generates a pattern. The optical system includes a variable focal length lens element configured to project the pattern at different projection distances. The imaging device is configured to capture images of the pattern projected at the different projection distances. The control system is configured to control a projection distance of the light projector and a focus distance of the imaging device. The processing unit is configured to obtain in-focus pixels in the captured images, generate mask images, reconstruct a large depth of field pattern image based on the captured images and reconstruct the object profile.