STACKED TRANSISTORS WITH STRAIN MATERIALS ON SOURCE AND DRAIN

    公开(公告)号:US20250113561A1

    公开(公告)日:2025-04-03

    申请号:US18476624

    申请日:2023-09-28

    Abstract: In stacked transistor device, such as a complementary field-effect-transistor (CFET) device, different strain materials may be used in different layers, e.g., a tensile material is deposited in a first isolation region in the PMOS layer, and a compressive material is deposited in second isolation region in the NMOS layer. The strain materials may be stacked, such that the second isolation region may be positioned over the first isolation region. In some cases, in one or both of the isolation regions, a liner material is included between the strain material and the source and drain regions. Certain embodiments provide independent tuning of strain forces in a stacked transistor device. Different materials are selected for different layers in the stacked device to provide favorable performance enhancement or tuning (e.g., adjustment of the threshold voltage) in NMOS and PMOS layers.

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