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1.发明公开公开(公告)号：US20240253977A1
公开(公告)日：2024-08-01
申请号：US18414932
申请日：2024-01-17
Applicant: Infineon Technologies AG
Inventor： Hutomo Suryo Wasisto , Sebastian Anzinger , Fabian Streb
CPC classification number: B81C1/00182 , B81B3/0027 , B81B2201/0257 , B81B2203/0127 , B81C2201/0109 , B81C2201/0143 , B81C2201/0149 , B81C2201/0154
Abstract: In accordance with an embodiment, a method producing a microelectromechanical system (MEMS) device includes: providing a substrate comprising a first substrate surface and an opposite second substrate surface, wherein the substrate comprises a sacrificial layer arranged at the first substrate surface; depositing a membrane material layer onto the sacrificial layer; the membrane material layer forms a free-standing membrane structure covering the cavity; and creating nanostructures in at least one of a first membrane surface or an opposite second membrane surface of the membrane material layer, wherein the nanostructures protrude from the respective membrane surface of the membrane material layer, and the nanostructures are created by applying a laser structuring process.
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公开(公告)号：US20180065847A1
公开(公告)日：2018-03-08
申请号：US15807661
申请日：2017-11-09
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first electrode, forming a second cantilevered electrode over a second electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to at least one of the first electrode and a second electrode, and the first cantilevered electrode includes an arm with an extending protrusion which extends upward from an upper surface of the arm.
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公开(公告)号：US20170183222A1
公开(公告)日：2017-06-29
申请号：US15457498
申请日：2017-03-13
Inventor： JUNG-HUEI PENG , CHIA-HUA CHU , FEI-LUNG LAI , SHIANG-CHI LIN
IPC: B81C1/00
CPC classification number: B81C1/00238 , B81B7/0038 , B81B2201/0235 , B81B2201/0242 , B81B2203/0127 , B81B2203/0315 , B81B2203/04 , B81B2207/012 , B81C1/00285 , B81C2201/0125 , B81C2201/0154 , B81C2201/019 , B81C2203/0118 , B81C2203/035 , B81C2203/0792
Abstract: The present disclosure provides a CMOS structure, including a substrate, a metallization layer over the substrate, a sensing structure over the metallization layer, and a signal transmitting structure adjacent to the sensing structure. The sensing structure includes an outgassing layer over the metallization layer, a patterned outgassing barrier over the outgassing layer; and an electrode over the patterned outgassing barrier. The signal transmitting structure electrically couples the electrode and the metallization layer.
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公开(公告)号：US08451077B2
公开(公告)日：2013-05-28
申请号：US12107118
申请日：2008-04-22
Applicant: Stephen E. Luce , Anthony K. Stamper
Inventor： Stephen E. Luce , Anthony K. Stamper
IPC: H01H51/22
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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公开(公告)号：US20120167262A1
公开(公告)日：2012-06-28
申请号：US13375361
申请日：2010-06-04
Applicant: Chad A. Mirkin , Wooyoung Shim , Adam B. Braunschweig , Xing Liao , Jinan Chai , Jong Kuk Lim , Gengfeng Zheng , Zijian Zheng
Inventor： Chad A. Mirkin , Wooyoung Shim , Adam B. Braunschweig , Xing Liao , Jinan Chai , Jong Kuk Lim , Gengfeng Zheng , Zijian Zheng
CPC classification number: G03F7/0002 , B81B2203/0361 , B81B2207/056 , B81C1/00111 , B81C1/0046 , B81C2201/0154 , B81C2201/0185 , B82Y10/00 , B82Y40/00 , Y10S977/732
Abstract: Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
Abstract translation: 公开了使用具有连接到背衬层的多个笔的尖端阵列的光刻方法，其中尖端可以包括金属，准金属和/或半导电材料，并且背衬层可以包括弹性体聚合物。 尖端阵列可用于执行光刻工艺，其中尖端涂覆有当尖端与衬底表面接触时沉积到衬底上的油墨（例如，图案化组合物）。 尖端可以容易地平整到基底上，并且可以通过背衬层的光反射的变化和/或在尖端与基底表面接触时靠近尖端附近来光学地监测流平。
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Patent Agency Ranking
公开(公告)号：US07655578B2
公开(公告)日：2010-02-02
申请号：US11773082
申请日：2007-07-03
Applicant: Frank Fournel , Jérôme Meziere , Alexis Bavard , Florent Pigeon , Florence Garrelie
Inventor： Frank Fournel , Jérôme Meziere , Alexis Bavard , Florent Pigeon , Florence Garrelie
IPC: H01L21/26
CPC classification number: B81C1/00634 , B81B2203/033 , B81C2201/0154 , H01L21/221 , H01L21/26506 , H01L21/268
Abstract: Under consideration here is a method for the production of periodic nanostructuring on one of the surfaces of a substrate (10), presenting a periodic network of dislocations, embedded within a crystalline area (4) located in the neighborhood of an interface (5) between the crystalline material surfaces of two components (1, 2) assembled by bonding to form the substrate (10). It comprises the following steps: formation, in the dislocations (3), of implants (6) made of a material other than that of the crystalline area (4); irradiation of the substrate (10) with electromagnetic waves (11) in order to cause absorption of electromagnetic energy localized in the implants (6), this absorption leading to the appearance of the periodic nanostructuring (12) on the surface of the substrate (10).
Abstract translation: 这里考虑的是一种用于在衬底（10）的一个表面上生产周期性纳米结构的方法，其呈现位于邻近界面（5）附近的结晶区域（4）内的位错周期性网络 通过结合组装以形成基板（10）的两个部件（1,2）的结晶材料表面。 它包括以下步骤：在位错（3）中形成由不同于结晶区域（4）的材料制成的植入物（6）; 为了引起位于植入物（6）中的电磁能量的吸收，用电磁波（11）照射基板（10），这种吸收导致在基板（10）的表面上出现周期性纳米结构（12） ）。
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公开(公告)号：US20080280419A1
公开(公告)日：2008-11-13
申请号：US11773082
申请日：2007-07-03
Applicant: Frank Fournel , Jerome Meziere , Alexis Bavard , Florent Pigeon , Florence Garrelie
Inventor： Frank Fournel , Jerome Meziere , Alexis Bavard , Florent Pigeon , Florence Garrelie
CPC classification number: B81C1/00634 , B81B2203/033 , B81C2201/0154 , H01L21/221 , H01L21/26506 , H01L21/268
Abstract: Under consideration here is a method for the production of periodic nanostructuring on one of the surfaces of a substrate (10), presenting a periodic network of dislocations, embedded within a crystalline area (4) located in the neighbourhood of an interface (5) between the crystalline material surfaces of two components (1, 2) assembled by bonding to form the substrate (10). It comprises the following steps: formation, in the dislocations (3), of implants (6) made of a material other than that of the crystalline area (4); irradiation of the sbstrate (10) with electromagnetic waves (11) in order to cause absorption of electromagnetic energy localised in the implants (6), this absorption leading to the appearance of the periodic nanostructuring (12) on the surface of the substrate (10).
Abstract translation: 这里考虑的是一种用于在衬底（10）的一个表面上生产周期性纳米结构的方法，其呈现位于邻近界面（5）附近的结晶区域（4）内的位错周期性网络 通过结合组装以形成基板（10）的两个部件（1,2）的结晶材料表面。 它包括以下步骤：在位错（3）中形成由不同于结晶区域（4）的材料制成的植入物（6）; 用电磁波（11）照射sbstrate（10），以引起位于植入物（6）中的电磁能的吸收，这种吸收导致在衬底（10）的表面上出现周期性纳米结构（12） ）。
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公开(公告)号：US20180370084A1
公开(公告)日：2018-12-27
申请号：US16061828
申请日：2016-12-20
Applicant: 3M INNOVATIVE PROPERTIES COMPANY
Inventor： Evan Koon Lun Yuuji Hajime , Jason D. Clapper , Kurt J. Halverson , Myungchan Kang
CPC classification number: B29C35/0266 , B29C35/0805 , B29C59/16 , B29C59/18 , B29C61/02 , B29C71/04 , B29C2035/0827 , B29C2035/0844 , B29C2035/085 , B29C2035/0877 , B81C2201/0154
Abstract: Three-dimensional polymeric article (100) having first (101) and second (102) opposed major surfaces, a first dimension perpendicular to a second dimension, a thickness orthogonal to the first and second dimensions, and a plurality of alternating first (107) and second (109) polymeric regions along the first or second dimensions, wherein the first (107) and second (108) regions extend at least partially across the second dimension, wherein the first regions (107) are in a common plane (115) and wherein some of the second regions (108) project outwardly from the plane (115) in a first direction (generally perpendicular from the plane), and some of the second regions (108) project outwardly from the plane (115) in a second direction that is generally 180 degrees from the first direction, where the first regions (107) have a first crosslink density, wherein the second regions (108) have a second crosslink density, and wherein the second crosslink density of the second regions (108) are less than the first crosslink density of the first regions (107). Embodiments of the articles are useful for example, for providing a dual-sided, textured wrapping film such that greater grip is realized both on an item wrapped by the film and the wrapped item itself.
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公开(公告)号：US09824834B2
公开(公告)日：2017-11-21
申请号：US14883836
申请日：2015-10-15
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. Luce , Anthony K. Stamper
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode and the second fixed electrode, and operable to directly contact the second fixed electrode upon an application of a voltage to the first fixed electrode, forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps the first cantilevered electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
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公开(公告)号：US20160035512A1
公开(公告)日：2016-02-04
申请号：US14883836
申请日：2015-10-15
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Stephen E. LUCE , Anthony K. STAMPER
CPC classification number: B81C1/00698 , B81C1/0015 , B81C1/00166 , B81C1/00523 , B81C2201/0132 , B81C2201/0133 , B81C2201/0145 , B81C2201/0154 , B81C2203/0145 , H01H1/0036 , H01H1/58 , H01H11/00 , H01H49/00 , H01H59/00 , H01H59/0009 , H01H2059/0018 , Y10T29/49105
Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
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