公开(公告)号：US20240191341A1

公开(公告)日：2024-06-13

申请号：US18537523

申请日：2023-12-12

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Thomas P. Nolan ,  Stephen M. Daly ,  Jae Ha Choi ,  Zachary Lyons ,  Jim Sullivan ,  Mike Anthony ,  Todd Morimoto

IPC: C23C14/35 ,  C23C14/50 ,  C23C14/56

CPC classification number: C23C14/352 ,  C23C14/50 ,  C23C14/568

Abstract: A plasma chamber for physical vapor deposition, having an anode aperture shield that reduces the field of view to the substrate for deposition particles from the sputtering target. The anode aperture shield limits the deposition particles reaching the substrate to selected maximum angles from the vertical, and rejects particles approaching with a larger angle from the vertical. The node aperture shield is grounded and may be constructed of an upper plate and a lower plate spaced apart from the upper plate, wherein the upper plate may include perforations or may incorporate an electron filter.

公开(公告)号：US20240191342A1

公开(公告)日：2024-06-13

申请号：US18534479

申请日：2023-12-08

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Thomas P. Nolan ,  Stephen M. Daly ,  Mike Anthony ,  Todd Morimoto

IPC: C23C14/50 ,  C23C14/34

CPC classification number: C23C14/50 ,  C23C14/34

Abstract: Embodiments of a substrate carrier are described. The substrate carrier includes a carrier tray having a deposition surface and a set of pedestal positions on the deposition surface. In some embodiments, the set comprises an N×M array of pedestal positions with N≥1 and M≥1. Each pedestal position is adapted to receive a corresponding substrate pedestal, and each pedestal has a working surface adapted to receive a substrate. One or more adjusters are positioned in a corresponding pedestal position. The adjuster can adjust a distance between the deposition surface and the working surface, an angular orientation of the working surface relative to the deposition surface, or both.

公开(公告)号：US20240194464A1

公开(公告)日：2024-06-13

申请号：US18529106

申请日：2023-12-05

Applicant: INTEVAC, INC.

Inventor： Samuel D. Harkness, IV ,  Thomas P. Nolan ,  Stephen M. Daly

IPC: H01J37/34

CPC classification number: H01J37/3438 ,  H01J37/3452 ,  H01J37/3461 ,  H01J37/3405 ,  H01J2237/3323

Abstract: An anode for a plasma chamber, having an anode block having a front surface to face a plasma and a rear surface to face away from the plasma; a magnet positioned within the anode block and generating magnetic field lines extending outwardly from the front surface of the anode block; and an electron filter bar spaced apart and extending over the front surface of the anode block and intercepting at least part of the magnetic field lines.