公开(公告)号：US5300850A

公开(公告)日：1994-04-05

申请号：US827866

申请日：1992-01-30

申请人： Ichiro Okumura ,  Hitoshi Mukohjima ,  Takayuki Tsukimoto ,  Akio Atsuta ,  Koichi Ueda ,  Hajime Kanazawa

发明人： Ichiro Okumura ,  Hitoshi Mukohjima ,  Takayuki Tsukimoto ,  Akio Atsuta ,  Koichi Ueda ,  Hajime Kanazawa

IPC分类号： H01L41/09 ,  H02N2/16 ,  H01L41/08

CPC分类号： H02N2/163

摘要： A vibration wave device having a resilient member, and electro-mechanical energy conversion means for inducing a travelling vibration wave in the resilient member, the travelling vibration wave being used as a drive source, includes means provided on at least one member of the vibration wave device at a location integer times or approximately integer times 1/2 of the wavelength of a vibration wave which may produce noise and making the dynamic rigidity of the member non-uniform.

摘要翻译： 具有弹性构件的振动波装置和用于在弹性构件中引起行进振动波的机电能量转换装置，所述行驶振动波用作驱动源，包括设置在振动波的至少一个构件上的装置 装置在可能产生噪声并使构件的动态刚度不均匀的振动波的波长的整数倍或近似整数倍的位置处。

公开(公告)号：US5298829A

公开(公告)日：1994-03-29

申请号：US649902

申请日：1991-02-01

申请人： Takayuki Tsukimoto ,  Takashi Maeno ,  Hitoshi Mukohjima ,  Hajime Kanazawa ,  Shinichi Koreeda ,  Ichiro Chiba ,  Akio Atsuta

发明人： Takayuki Tsukimoto ,  Takashi Maeno ,  Hitoshi Mukohjima ,  Hajime Kanazawa ,  Shinichi Koreeda ,  Ichiro Chiba ,  Akio Atsuta

IPC分类号： H02N2/00 ,  H01L41/09 ,  H02N2/16 ,  H01L41/08

CPC分类号： H02N2/163

摘要： In a vibration wave driven motor wherein an AC electric field is applied to an electro-mechanical energy conversion element secured to an elastic member to thereby excite a plurality of standing waves differing in phase from each other in the elastic member and a travelling wave is formed in the elastic member by the combination of the standing waves, whereby a member which is in pressure contact with the elastic member and the elastic member are moved relative to each other by a frictional force, provision is made of means for making the contact pressure on the surface of contact between the elastic member and the member which is in pressure contact with the elastic member non-uniform, and means for making the dynamic rigidity of a vibration member non-uniform in an unnecessary vibration mode created by the means for making the contact pressure non-uniform, whereby the occurrence of noise is prevented by simple and inexpensive means.

摘要翻译： 在振动波驱动电动机中，其中AC电场被施加到固定到弹性构件的机电能量转换元件，从而在弹性构件中激发相位彼此不同的多个驻波，形成行波 在弹性构件中通过驻波的组合，由此与弹性构件和弹性构件压力接触的构件通过摩擦力相对于彼此移动，提供用于使接触压力上升的装置 弹性构件与与弹性构件压力接触的构件之间的接触表面不均匀，以及用于使振动构件的动态刚度在由不可避免的振动模式产生的不必要的振动模式下产生的动态刚度的装置 接触压力不均匀，从而通过简单廉价的方法防止了噪音的发生。

公开(公告)号：US5625145A

公开(公告)日：1997-04-29

申请号：US228268

申请日：1994-04-15

申请人： Takashi Maeno ,  Takayuki Tsukimoto ,  Hajime Kanazawa ,  Ichiro Chiba

发明人： Takashi Maeno ,  Takayuki Tsukimoto ,  Hajime Kanazawa ,  Ichiro Chiba

IPC分类号： G01C19/56 ,  G01C19/5642 ,  G01C19/5705 ,  G01P9/04

CPC分类号： G01C19/5642

摘要： In an angular velocity detection arrangement, a vibration member excites and detects vibration in different directions and the angular velocity is detected by detecting a vibration in directions other than the direction of a vibration excited by the vibration member.

摘要翻译： 在角速度检测装置中，振动部件激发并检测不同方向的振动，并且通过检测除振动部件所激励的振动的方向以外的方向的振动来检测角速度。

公开(公告)号：US20050184248A1

公开(公告)日：2005-08-25

申请号：US11062026

申请日：2005-02-18

申请人： Hajime Kanazawa ,  Akira Miyake ,  Fumitaro Masaki

发明人： Hajime Kanazawa ,  Akira Miyake ,  Fumitaro Masaki

IPC分类号： G01J3/36 ,  G01J3/00 ,  G01J3/18 ,  G01N23/207 ,  G01T1/29 ,  G01T1/36 ,  G03F7/20 ,  G21K1/06 ,  H05G2/00 ,  G01J1/42

CPC分类号： G01J3/18 ,  G01J3/0286 ,  G01J3/0291 ,  G01N23/2076 ,  G03F7/70575 ,  G21K1/06 ,  H05G2/001

摘要： A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.

摘要翻译： 用于测量从极紫外光源的发散中心点偏离的极紫外光谱的测量装置包括光谱测量单元，其包括光谱仪和在光谱仪的光谱形成方向上具有空间分辨率的检测器 以及驱动机构，其使得光谱测量单元相对于发散中心点移动。

公开(公告)号：US5632074A

公开(公告)日：1997-05-27

申请号：US446577

申请日：1995-05-19

申请人： Hajime Kanazawa

发明人： Hajime Kanazawa

IPC分类号： H01L41/09 ,  H02N2/00 ,  H02N2/16 ,  H01L41/22

CPC分类号： H02N2/163 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/49165

摘要： A vibration wave driven motor having an electromechanical energy conversion member for generating a vibration wave in an elastic member. This conversion member has first and second surfaces opposite to each other, and first and second surfaces respectively formed on the first and second electrodes to receive an applied electrical signal. The first electrode is formed in a position such as to face one side of the elastic member and has an electrical signal input terminal provided on the second surface side of the conversion member. This input terminal and the first electrode are electrically connected by, for example, a conductor formed in a through hole. It is thereby possible to supply an electric current to each electrode with reliability while maintaining the conversion member and the elastic member in desired close contact with each other.

摘要翻译： 一种振动波驱动电动机，具有用于在弹性部件中产生振动波的机电能量转换部件。 该转换构件具有彼此相对的第一和第二表面，以及分别形成在第一和第二电极上以接收所施加的电信号的第一和第二表面。 第一电极形成在面对弹性构件的一侧的位置，并且具有设置在转换构件的第二表面侧上的电信号输入端子。 该输入端子和第一电极通过例如形成在通孔中的导体电连接。 由此，可以在将转换构件和弹性构件保持在期望的彼此紧密接触的同时，可靠地向每个电极提供电流。

公开(公告)号：US4725866A

公开(公告)日：1988-02-16

申请号：US912334

申请日：1986-09-26

申请人： Tokuichi Tsunekawa ,  Hajime Kanazawa ,  Hiroshi Ohmura

发明人： Tokuichi Tsunekawa ,  Hajime Kanazawa ,  Hiroshi Ohmura

IPC分类号： G01J1/44 ,  G03B7/091 ,  G01J1/42

CPC分类号： G03B7/091 ,  G01J1/44

摘要： The present invention is characterized by repeatedly AD converting in a time series an output of each light sensitive element, and at the same time an added value or a mean value of each one of said AD converted values is obtained so that such added value or a mean value is used as an output of each light sensitive element. According to the present invention, an influence of flickering of an artificial light source can be eliminated and at the same time a light measuring computation with a high level of accuracy can be made with a higher speed than that in a conventional method, and particularly in a light measuring apparatus housing a number of light sensitive elements a light measuring computation with a high level of accuracy can be made in a by far faster speed than that in a conventional method.

摘要翻译： 本发明的特征在于，以时间序列反复AD转换每个光敏元件的输出，并且同时获得每个所述AD转换值的相加值或平均值，使得这样的附加值或 平均值用作每个光敏元件的输出。 根据本发明，可以消除人造光源的闪烁的影响，同时可以以比常规方法更高的速度进行具有高精度的光测量计算，特别是在 可以以比传统方法更快的速度进行容纳多个光敏元件的具有高精度的光测量计算的光测量装置。

公开(公告)号：US08487512B2

公开(公告)日：2013-07-16

申请号：US13051997

申请日：2011-03-18

申请人： Hajime Kanazawa

发明人： Hajime Kanazawa

IPC分类号： H01L41/08

CPC分类号： H02N2/001 ,  H02N2/006 ,  H02N2/163

摘要： An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body.

摘要翻译： 振荡波马达包括具有振荡体和机电能量转换元件的振荡器，以及配置为消散由振荡波马达产生的热量的柔性导热构件。 摆动波马达通过振荡器的椭圆运动来驱动与形成在振荡体中的接触部分接触的移动体，并且除了传导由振荡器产生的热量的导热路径之外还提供导热构件 波导电机通过支撑振荡器的振荡器支撑构件或者通过移动体传导热量的导热路径。

公开(公告)号：US20120110758A1

公开(公告)日：2012-05-10

申请号：US13273172

申请日：2011-10-13

申请人： Hajime Kanazawa

发明人： Hajime Kanazawa

IPC分类号： F28G7/00 ,  H02N2/06 ,  H01L41/09

CPC分类号： B06B1/0261 ,  B06B2201/55 ,  H01L41/042 ,  H02N2/0075

摘要： A driving method for a piezoelectric vibrator including a driving piezoelectric element and a detection piezoelectric element formed of the same material as a material of the driving piezoelectric element, for driving the piezoelectric vibrator by applying, to the driving piezoelectric element, an alternating voltage having a frequency close to a resonance frequency of the piezoelectric vibrator, the driving method including, in the case where it is detected based on variations in output detected from the detection piezoelectric element that at least one of variations in mechanical resistance of the piezoelectric vibrator and variations in piezoelectric characteristic of a piezoelectric element have occurred, applying an alternating voltage adjusted in accordance with the variations in mechanical resistance of the piezoelectric vibrator and/or the variations in piezoelectric characteristic of the piezoelectric element, to thereby adjust an electrical input to the piezoelectric vibrator to suppress variations in vibration amplitude of the piezoelectric vibrator.

摘要翻译： 一种压电振动器的驱动方法，包括驱动压电元件和由与驱动压电元件的材料相同的材料形成的检测压电元件，用于通过向驱动压电元件施加具有 频率接近压电振动器的谐振频率，该驱动方法包括在基于从检测压电元件检测到的输出的变化来检测的情况下，压电振动器的机械电阻的变化和变化中的至少一个 发生压电元件的压电特性，施加根据压电振动器的机械阻抗的变化调整的交流电压和/或压电元件的压电特性的变化，从而调节对压电振动器的电输入 以抑制压电振动器的振幅的变化。

公开(公告)号：US20090072167A1

公开(公告)日：2009-03-19

申请号：US12256816

申请日：2008-10-23

申请人： Hajime Kanazawa

发明人： Hajime Kanazawa

IPC分类号： H05H1/24 ,  G03B27/42

CPC分类号： G03F7/7085 ,  B82Y10/00 ,  G03F7/70033

摘要： An exposure apparatus for exposing a pattern of a mask onto an object, said exposure apparatus includes a light source for generating a plasma, said light source including a condenser mirror that condenses a light irradiated from the plasma, an illumination optical system for illuminating the mask using the light condensed by the condenser mirror, a detector that is provided between the condenser mirror and the illumination optical system, said detector detecting a property of the light, and a changing part for changing a state of the plasma based on a detected result of the detector.

摘要翻译： 一种用于将掩模图案曝光在物体上的曝光装置，所述曝光装置包括用于产生等离子体的光源，所述光源包括冷凝从等离子体照射的光的聚光镜，用于照亮掩模的照明光学系统 使用由聚光镜聚光的光，设置在聚光镜和照明光学系统之间的检测器，所述检测器检测光的特性，以及改变部，用于根据检测结果检测等离子体的状态 检测器。

公开(公告)号：US20050045829A1

公开(公告)日：2005-03-03

申请号：US10923574

申请日：2004-08-20

申请人： Jun Ito ,  Hajime Kanazawa

发明人： Jun Ito ,  Hajime Kanazawa

IPC分类号： G01J1/42 ,  G01J3/51 ,  G21K1/02 ,  G21K1/06 ,  H01L21/027

CPC分类号： G03F7/70575 ,  G01J1/429 ,  G01J3/51

摘要： A spectrum measuring apparatus that includes an extinction member for decreasing a light intensity from an EUV light source, a spectrum member for extracting light with a desired wavelength band from the decreased intensity light and a detector for detecting a light intensity of the light with a desired wavelength band is disclosed. Then, a spectrum intensity distribution (spectrum) is obtained by (a) a plural opening is located in the extinction member, and the light from the EUV light source passes through the plural opening at the same time, or (b) the detector detects the light volume of the light with a desired wavelength band as thermal energy.

摘要翻译： 一种光谱测量装置，包括用于降低来自EUV光源的光强度的消光部件，用于从降低的强度光中提取具有期望波长带的光的光谱部件和用于检测具有期望的光的光强度的检测器 公开了波长带。 然后，通过（a）多个开口位于消光部件中，并且来自EUV光源的光同时穿过多个开口获得光谱强度分布（光谱），或者（b）检测器检测 具有期望波长带的光的光体积作为热能。