公开(公告)号：US07552645B2

公开(公告)日：2009-06-30

申请号：US10590485

申请日：2005-02-24

申请人： Igor Bargatin ,  Edward B. Myers ,  Mo Li ,  Jessica Arlett ,  Benjamin Gudlewski ,  Michael L. Roukes ,  Darron K. Young ,  Hong X. Tang

发明人： Igor Bargatin ,  Edward B. Myers ,  Mo Li ,  Jessica Arlett ,  Benjamin Gudlewski ,  Michael L. Roukes ,  Darron K. Young ,  Hong X. Tang

IPC分类号： G01B7/16

CPC分类号： G01Q20/04

摘要： A system containing a micro-mechanical or nano-mechanical device and a method of operating the same is provided. The device includes a resonator and a piezoresistive element connected to the resonator. The method includes AC biasing the piezoresistive element at a first frequency, driving the resonator at a second frequency different from the first frequency, and detecting a mechanical response of the resonator at one or both of a difference frequency and a sum frequency of the first and second frequencies.

摘要翻译： 提供了一种包含微机械或纳米机械装置的系统及其操作方法。 该器件包括连接到谐振器的谐振器和压阻元件。 该方法包括以第一频率对压阻元件进行AC偏置，以不同于第一频率的第二频率驱动谐振器，并且检测谐振器在第一和第二频率的差频率和和频之一或两者处的机械响应 第二频率。

公开(公告)号：US20080216583A1

公开(公告)日：2008-09-11

申请号：US10590485

申请日：2005-02-24

申请人： Igor Bargatin ,  Edward B. Myers ,  Mo Li ,  Jessica Arlett ,  Benjamin Gudlewski ,  Michael L. Roukes ,  Darron K. Young ,  Hong X. Tang

发明人： Igor Bargatin ,  Edward B. Myers ,  Mo Li ,  Jessica Arlett ,  Benjamin Gudlewski ,  Michael L. Roukes ,  Darron K. Young ,  Hong X. Tang

IPC分类号： G01B7/16 ,  H01L21/00

CPC分类号： G01Q20/04

摘要： A system containing a micro-mechanical or nano-mechanical device and a method of operating the same is provided. The device includes a resonator and a piezoresistive element connected to the resonator. The method includes AC biasing the piezoresistive element at a first frequency, driving the resonator at a second frequency different from the first frequency, and detecting a mechanical response of the resonator at one or both of a difference frequency and a sum frequency of the first and second frequencies.

摘要翻译： 提供了一种包含微机械或纳米机械装置的系统及其操作方法。 该器件包括连接到谐振器的谐振器和压阻元件。 该方法包括以第一频率对压阻元件进行AC偏置，以不同于第一频率的第二频率驱动谐振器，并且检测谐振器在第一和第二频率的差频率和和频之一或两者处的机械响应 第二频率。

公开(公告)号：US20080068000A1

公开(公告)日：2008-03-20

申请号：US11857615

申请日：2007-09-19

申请人： Igor Bargatin ,  Jessica Arlett ,  Michael Roukes ,  Inna Kozinsky ,  John Aldridge ,  Edward Myers

发明人： Igor Bargatin ,  Jessica Arlett ,  Michael Roukes ,  Inna Kozinsky ,  John Aldridge ,  Edward Myers

IPC分类号： G01R19/00 ,  H01L21/00

CPC分类号： G01N29/036 ,  G01N2291/0256 ,  Y10T29/41

摘要： Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.

摘要翻译： 描述了用于热致压压阻悬臂的系统和方法。 一个实施例包括在至少一个位置连接到衬底的纳米机电谐振器，形成在谐振器上的导电路径和连接到导电路径的信号源，并且被配置为提供能够激励谐振模式的振荡致动信号 谐振器。

公开(公告)号：US07959873B1

公开(公告)日：2011-06-14

申请号：US11491394

申请日：2006-07-20

申请人： Michael Roukes ,  Hongxing Tang ,  Jessica Arlett ,  James Maloney ,  Benjamin Gudlewski

发明人： Michael Roukes ,  Hongxing Tang ,  Jessica Arlett ,  James Maloney ,  Benjamin Gudlewski

IPC分类号： G01N33/00

CPC分类号： B81B3/0021 ,  B81B2201/0214 ,  B82Y15/00 ,  B82Y30/00 ,  G01N29/036 ,  G01N33/54366 ,  G01N2291/0257

摘要： A biosensor is comprised of a free and a biofunctionalized recognition self-sensing nanocantilever, a dock adjacent to the ends of the nanocantilevers, and a gap between the nanocantilevers and dock. The self-sensing cantilevers each include a semiconductor piezoresistor defined in a pair of legs about which the cantilevers flex. A bias power or current is applied to the piezoresistor. The sensitivity of the cantilevers is optimized for a given ambient temperature and geometry of the cantilevers and dock by minimizing the force spectral density, SF, of the cantilevers to determine the optimum bias power, Pin. A sub-aN/√Hz force sensitivity is obtained by scaling down the dimensions of the cantilevers and supplying an optimum bias power as a function of temperature and geometry.

摘要翻译： 生物传感器由免费的和生物功能化的识别自感纳米聚合物，邻近纳米聚合物末端的码头以及纳米悬臂与码头之间的间隙组成。 自感悬臂各自包括限定在一对腿部的半导体压敏电阻，悬臂弯曲在该支脚周围。 偏压电源或电流施加到压敏电阻。 通过最小化悬臂的力谱密度（SF）来确定最佳偏置功率Pin，悬臂梁的灵敏度对给定的环境温度和悬臂和基座的几何形状进行了优化。 通过缩小悬臂的尺寸并提供作为温度和几何形状的函数的最佳偏置功率，可以获得sub-aN /√Hz力灵敏度。

公开(公告)号：US20050161749A1

公开(公告)日：2005-07-28

申请号：US10502461

申请日：2003-05-07

申请人： Y. T. Yang ,  Darrell Harrington ,  Jean Casey ,  Jessica Arlett ,  H. X. Tang ,  X. M. H. Huang ,  Kamil Ekinci ,  Michael Roukes

发明人： Y. T. Yang ,  Darrell Harrington ,  Jean Casey ,  Jessica Arlett ,  H. X. Tang ,  X. M. H. Huang ,  Kamil Ekinci ,  Michael Roukes

IPC分类号： B81B3/00 ,  G01N27/00 ,  G01P15/08 ,  G01P15/097 ,  H01L27/14

CPC分类号： B81B3/0035 ,  G01P15/08 ,  G01P15/097 ,  H03H9/02244 ,  H03H9/2457 ,  H03H9/2463 ,  H03H2009/02496 ,  H03H2009/02511 ,  H03H2009/02519 ,  H03H2009/02527

摘要： A doubly clamped beam has an asymmetric piezoelectric layer within the beam with a gate proximate to the beam within a submicron distance with a gate and beam dipole. A suspended beam is formed using a Cl2/He plasma etch supplied at a flow rate ratio of 1:9 respectively into a plasma chamber. A parametric amplifier comprises a NEMS signal beam driven at resonance and a pair of pump beams driven at twice resonance to generate a modulated Lorentz force on the pump beams to perturb the spring constant of the signal beam. A bridge circuit provides two out-of-phase components of an excitation signal to a first and second NEMS beam in a first and second arm. A DC current is supplied to an AC driven NEMS device to tune the resonant frequency. An analyzer comprises a plurality of piezoresistive NEMS cantilevers with different resonant frequencies and a plurality of drive/sense elements, or an interacting plurality of beams to form an optical diffraction grating, or a plurality of strain-sensing NEMS cantilevers, each responsive to a different analyte, or a plurality of piezoresistive NEMS cantilevers with different IR absorbers.

摘要翻译： 双夹紧光束在光束内具有非对称压电层，栅极和栅极和光束偶极子之间的亚微米距离内的栅极靠近光束。 使用以1：9的流量比提供的Cl 2/2 / He等离子体蚀刻分别形成悬浮梁到等离子体室中。 参数放大器包括以共振驱动的NEMS信号光束和以两次谐振为驱动的一对泵浦光束，以在泵浦光束上产生调制的洛伦兹力，以扰乱信号光束的弹簧常数。 桥接电路在第一和第二臂中向第一和第二NEMS波束提供激励信号的两个异相分量。 直流电流被提供给AC驱动NEMS器件以调谐谐振频率。 分析器包括具有不同谐振频率的多个压阻NEMS悬臂和多个驱动/感测元件或相互作用的多个光束以形成光学衍射光栅，或多个应变感测NEMS悬臂，每个响应于不同的 分析物或具有不同IR吸收剂的多个压阻NEMS悬臂。