公开(公告)号：US09350138B2

公开(公告)日：2016-05-24

申请号：US14182335

申请日：2014-02-18

申请人： Innolume GmbH

发明人： Alexey Gubenko ,  Daniil Livshits ,  Sergey Mikhrin ,  Igor Krestnikov

IPC分类号： H01S5/00 ,  H01S5/125 ,  H01S5/22 ,  H01S5/12 ,  H01S5/187 ,  H01S5/02 ,  H01S5/343 ,  H01S5/026 ,  H01S5/0625 ,  H01S5/10 ,  H01S5/30

CPC分类号： H01S5/125 ,  H01S5/0202 ,  H01S5/026 ,  H01S5/06256 ,  H01S5/1085 ,  H01S5/12 ,  H01S5/1221 ,  H01S5/124 ,  H01S5/1246 ,  H01S5/187 ,  H01S5/22 ,  H01S5/221 ,  H01S5/2215 ,  H01S5/3054 ,  H01S5/34313

摘要： A transversely-coupled distributed feedback laser diode, which can be processed without overgrowth, is disclosed. The laser is made from an epitaxial heterostructure including a core layer located between two cladding layers, a cap layer, and at least one Al-rich layer. The lateral waveguide is formed by selective oxidation of the Al-rich layer. A surface corrugated grating is formed above the waveguide. The heteroepitaxial structure is designed so that the core layer is placed in close proximity to the top of the laser structure to provide a required overlap between the light and the grating. In order to avoid inadmissible optical losses, there is no metallization above the waveguide. Instead, the metal contacts are offset at some distance, so that the current has to spread in the cap layer before vertical injection into the core layer.

摘要翻译： 公开了一种横向耦合的分布反馈激光二极管，可以在不产生过度增长的情况下进行处理。 激光器由外延异质结构制成，其包括位于两个覆层之间的芯层，覆盖层和至少一个富Al层。 侧向波导通过富Al层的选择性氧化形成。 表面波纹光栅形成在波导上方。 异质外延结构被设计成使得芯层被放置在紧邻激光结构的顶部以提供光与光栅之间所需的重叠。 为了避免不可接受的光损耗，在波导上方没有金属化。 相反，金属触点偏移一定距离，使得电流必须在垂直注入芯层之前在盖层中扩展。

公开(公告)号：US20150280402A1

公开(公告)日：2015-10-01

申请号：US14182335

申请日：2014-02-18

申请人： Innolume GmbH

发明人： Alexey Gubenko ,  Daniil Livshits ,  Sergey Mikhrin ,  Igor Krestnikov

IPC分类号： H01S5/125 ,  H01S5/02 ,  H01S5/343

CPC分类号： H01S5/125 ,  H01S5/0202 ,  H01S5/026 ,  H01S5/06256 ,  H01S5/1085 ,  H01S5/12 ,  H01S5/1221 ,  H01S5/124 ,  H01S5/1246 ,  H01S5/187 ,  H01S5/22 ,  H01S5/221 ,  H01S5/2215 ,  H01S5/3054 ,  H01S5/34313

摘要： A transversely-coupled distributed feedback laser diode, which can be processed without overgrowth, is disclosed. The laser is made from an epitaxial heterostructure including a core layer located between two cladding layers, a cap layer, and at least one Al-rich layer. The lateral waveguide is formed by selective oxidation of the Al-rich layer.A surface corrugated grating is formed above the waveguide. The heteroepitaxial structure is designed so that the core layer is placed in close proximity to the top of the laser structure to provide a required overlap between the light and the grating. In order to avoid inadmissible optical losses, there is no metallization above the waveguide. Instead, the metal contacts are offset at some distance, so that the current has to spread in the cap layer before vertical injection into the core layer.

摘要翻译： 公开了一种横向耦合的分布反馈激光二极管，可以在不产生过度增长的情况下进行处理。 激光器由外延异质结构制成，其包括位于两个覆层之间的芯层，覆盖层和至少一个富Al层。 侧向波导通过富Al层的选择性氧化形成。 表面波纹光栅形成在波导上方。 异质外延结构被设计成使得芯层被放置在紧邻激光结构的顶部以提供光与光栅之间所需的重叠。 为了避免不可接受的光损耗，在波导上方没有金属化。 相反，金属触点偏移一定距离，使得电流必须在垂直注入芯层之前在盖层中扩展。