公开(公告)号：US20240332125A1

公开(公告)日：2024-10-03

申请号：US18128848

申请日：2023-03-30

Applicant: Intel Corporation

Inventor： Kyle ARRINGTON ,  Clay ARRINGTON ,  Bohan SHAN ,  Haobo CHEN ,  Srinivas V. PIETAMBARAM ,  Gang DUAN ,  Ziyin LIN ,  Hongxia FENG ,  Yiqun BAI ,  Xiaoying GUO ,  Dingying XU ,  Bai NIE

IPC: H01L23/373 ,  H01L21/48 ,  H01L23/24 ,  H01L23/498

CPC classification number: H01L23/3737 ,  H01L21/4857 ,  H01L21/486 ,  H01L23/24 ,  H01L23/49822 ,  H01L23/49827

Abstract: Embodiments disclosed herein include a package substrate. In an embodiment, the package substrate comprises a first layer and a second layer over the first layer. In an embodiment, the second layer comprises a dielectric material including sulfur. In an embodiment, fillers are within the second layer. In an embodiment, the fillers have a volume fraction that is less than approximately 0.2.