LITHOGRAPHY PILLAR PROCESS FOR EMBEDDED BRIDGE SCALING

    公开(公告)号:US20230090350A1

    公开(公告)日:2023-03-23

    申请号:US17478439

    申请日:2021-09-17

    Abstract: Embodiments disclosed herein include electronic packages. In an embodiment, the electronic package comprises a package substrate, and a first pad over the package substrate. In an embodiment, a layer is over the package substrate, where the layer is an insulating material. In an embodiment, the electronic package further comprises a via through the layer and in contact with the first pad. In an embodiment a first end of the via has a first width and a second end of the via that is in contact with the first pad has a second width that is larger than the first width. In an embodiment, the electronic package further comprises a second pad over the via.

    EMBEDDED BRIDGE ARCHITECTURE WITH THINNED SURFACE

    公开(公告)号:US20220310518A1

    公开(公告)日:2022-09-29

    申请号:US17213147

    申请日:2021-03-25

    Abstract: Embodiments disclosed herein include a multi-die packages with an embedded bridge and a thinned surface. In an example, a multi-die interconnect structure includes a package substrate having a cavity. A bridge die is in the cavity of the package substrate, the bridge die including silicon. A dielectric material is over the package substrate, over the bridge die, and in the cavity. A plurality of conductive bond pads is on the dielectric material. The multi-die interconnect structure further includes a plurality of conductive pillars, individual ones of the plurality of conductive pillars on a corresponding one of the plurality of conductive bond pads. A solder resist material is on the dielectric material, on exposed portions of the plurality of conductive bond pads, and laterally surrounding the plurality of conductive pillars. The plurality of conductive pillars has a top surface above a top surface of the solder resist material.

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