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公开(公告)号:US20190287934A1
公开(公告)日:2019-09-19
申请号:US15921511
申请日:2018-03-14
Applicant: Intel Corporation
Inventor: Yikang DENG , Jonathan ROSCH , Andrew BROWN , Junnan ZHAO
IPC: H01L23/64 , H01L23/498 , H01L21/48 , H01F27/40
Abstract: Techniques for fabricating a cored or coreless semiconductor package having one or more magnetic bilayer structures embedded therein are described. A magnetic bilayer structure includes a magnetic layer and a dielectric layer. For one technique, fabricating a cored or coreless semiconductor package includes: depositing a seed layer on a build-up layer; forming a raised pad structure and a trace on the seed layer; removing one or more uncovered portions of the seed layer to uncover top surfaces of one or more portions of the build-up layer; applying a magnetic bilayer structure on the raised pad structure, the trace, any unremoved portion of the seed layer, and the top surfaces of the one or more portions of the build-up layer, the magnetic bilayer structure comprises a magnetic layer and a dielectric layer; and forming a conductive structure on the raised pad structure. Other techniques are also described.
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公开(公告)号:US20220328431A1
公开(公告)日:2022-10-13
申请号:US17852003
申请日:2022-06-28
Applicant: Intel Corporation
Inventor: Cheng XU , Kyu-Oh LEE , Junnan ZHAO , Rahul JAIN , Ji Yong PARK , Sai VADLAMANI , Seo Young KIM
IPC: H01L23/64 , H01L23/498 , H01L23/00 , H01L21/48
Abstract: Embodiments include an electronic package that includes a first layer that comprises a dielectric material and a second layer over the first layer, where the second layer comprises a magnetic material. In an embodiment, a third layer is formed over the second layer, where the third layer comprises a dielectric material. In an embodiment, the third layer entirely covers a first surface of the second layer. In an embodiment a first conductive layer and a second conductive layer are embedded within the second layer. In an embodiment, sidewalls of the first conductive layer and the second conductive layer are substantially vertical.
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3.
公开(公告)号:US20190295937A1
公开(公告)日:2019-09-26
申请号:US15927047
申请日:2018-03-20
Applicant: Intel Corporation
Inventor: Chong ZHANG , Ying WANG , Cheng XU , Hongxia FENG , Meizi JIAO , Junnan ZHAO , Yikang DENG
IPC: H01L23/498 , C23C18/26 , H05K1/11 , H01L23/00 , H01L21/48
Abstract: Embodiments include semiconductor packages and a method of forming the semiconductor packages. A semiconductor package includes a trace disposed on a conductive layer. The semiconductor package has one or more adhesion anchoring points and a plurality of portions on the trace. An adhesion anchoring point is between two portions on the trace. A surface roughness of an adhesion anchoring point is greater than a surface roughness of a portion on the trace. The trace may be a high-speed input/output (HSIO) trace. The semiconductor package may include via pads disposed on each end of the trace, and a dielectric disposed on the trace. The dielectric is patterned to form openings on the dielectric that expose second portions on the trace. The dielectric remains over the portions. The semiconductor package may have a chemical treatment disposed on the exposed openings on the trace to form the adhesion anchoring points.
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公开(公告)号:US20230238368A1
公开(公告)日:2023-07-27
申请号:US18128952
申请日:2023-03-30
Applicant: Intel Corporation
Inventor: Chong ZHANG , Cheng XU , Junnan ZHAO , Ying WANG , Meizi JIAO
IPC: H01L25/16 , H01L23/538 , H01L23/498 , H01L21/56 , H01L23/528
CPC classification number: H01L25/16 , H01L23/5386 , H01L28/40 , H01L23/49811 , H01L21/568 , H01L23/528 , H01L2224/16265 , H01L2224/1623
Abstract: Microelectronic assemblies, related devices, and methods are disclosed herein. In some embodiments, a microelectronic assembly may include a die having a first surface and an opposing second surface; a capacitor having a surface, wherein the surface of the capacitor is coupled to the first surface of the die; and a conductive pillar coupled to the first surface of the die. In some embodiments, a microelectronic assembly may include a capacitor in a first dielectric layer; a conductive pillar in the first dielectric layer; a first die having a surface in the first dielectric layer; and a second die having a surface in a second dielectric layer, wherein the second dielectric layer is on the first dielectric layer, and wherein the surface of the second die is coupled to the capacitor, to the surface of the first die, and to the conductive pillar.
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公开(公告)号:US20220359115A1
公开(公告)日:2022-11-10
申请号:US17873509
申请日:2022-07-26
Applicant: Intel Corporation
Inventor: Kyu-Oh LEE , Rahul JAIN , Sai VADLAMANI , Cheng XU , Ji Yong PARK , Junnan ZHAO , Seo Young KIM
IPC: H01F27/32 , H01L23/498 , H01F41/04 , H01L21/48 , H01F27/28
Abstract: Apparatuses, systems and methods associated with a substrate assembly with an encapsulated magnetic feature for an inductor are disclosed herein. In embodiments, a substrate assembly may include a base substrate, a magnetic feature encapsulated within the base substrate, and a coil, wherein a portion of the coil extends through the magnetic feature. Other embodiments may be described and/or claimed.
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6.
公开(公告)号:US20190304933A1
公开(公告)日:2019-10-03
申请号:US15938114
申请日:2018-03-28
Applicant: Intel Corporation
Inventor: Cheng XU , Kyu-Oh LEE , Junnan ZHAO , Rahul JAIN , Ji Yong PARK , Sai VADLAMANI , Seo Young KIM
IPC: H01L23/64 , H01L23/498 , H01L23/00 , H01L21/48
Abstract: Embodiments include an electronic package that includes a first layer that comprises a dielectric material and a second layer over the first layer, where the second layer comprises a magnetic material. In an embodiment, a third layer is formed over the second layer, where the third layer comprises a dielectric material. In an embodiment, the third layer entirely covers a first surface of the second layer. In an embodiment a first conductive layer and a second conductive layer are embedded within the second layer. In an embodiment, sidewalls of the first conductive layer and the second conductive layer are substantially vertical.
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7.
公开(公告)号:US20220367104A1
公开(公告)日:2022-11-17
申请号:US17873518
申请日:2022-07-26
Applicant: Intel Corporation
Inventor: Cheng XU , Kyu-Oh LEE , Junnan ZHAO , Rahul JAIN , Ji Yong PARK , Sai VADLAMANI , Seo Young KIM
Abstract: Embodiments include an inductor that comprises an inductor trace and a magnetic body surrounding the inductor trace. In an embodiment, the magnetic body comprises a first step surface and a second step surface. Additional embodiments include an inductor that includes a barrier layer. In an embodiment, an inductor trace is formed over a first surface of the barrier layer. Embodiments include a first magnetic body over the inductor trace and the first surface of the barrier layer, and a second magnetic body over a second surface of the barrier layer opposite the first surface. In an embodiment, a width of the second magnetic body is greater than a width of the first magnetic body.
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公开(公告)号:US20190279806A1
公开(公告)日:2019-09-12
申请号:US15919066
申请日:2018-03-12
Applicant: Intel Corporation
Inventor: Kristof DARMAWIKARTA , Srinivas PIETAMBARAM , Sandeep GAAN , Sri Ranga Sai BOYAPATI , Prithwish CHATTERJEE , Sameer PAITAL , Rahul JAIN , Junnan ZHAO
Abstract: Embodiments include inductors and methods of forming inductors. In an embodiment, an inductor may include a substrate core and a conductive through-hole through the substrate core. Embodiments may also include a magnetic sheath around the conductive through hole. In an embodiment, the magnetic sheath is separated from the plated through hole by a barrier layer. In an embodiment, the barrier layer is formed over an inner surface of the magnetic sheath and over first and second surfaces of the magnetic sheath.
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9.
公开(公告)号:US20190274217A1
公开(公告)日:2019-09-05
申请号:US15910288
申请日:2018-03-02
Applicant: Intel Corporation
Inventor: Chong ZHANG , Ying WANG , Junnan ZHAO , Cheng XU , Yikang DENG
Abstract: Embodiments may include inductors with embedded magnetic cores and methods of making such inductors. In an embodiment, an integrated circuit package may include an integrated circuit die with a multi-phase voltage regulator electrically coupled to the integrated circuit die. In such embodiments, the multi-phase voltage regulator may include a substrate core and a plurality of inductors. The inductors may include a conductive through-hole disposed through the substrate core and a plugging layer comprising a dielectric material surrounding the conductive through-hole. In an embodiment, a magnetic sheath is formed around the plugging layer. In an embodiment, the magnetic sheath is separated from the plated through hole by the plugging layer. Additionally, a first layer comprising a dielectric material may be disposed over a first surface of the magnetic sheath, and a second layer comprising a dielectric material may be disposed over a second surface of the magnetic sheath.
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公开(公告)号:US20190272936A1
公开(公告)日:2019-09-05
申请号:US15911549
申请日:2018-03-05
Applicant: Intel Corporation
Inventor: Chong ZHANG , Cheng XU , Ying WANG , Junnan ZHAO , Meizi JIAO , Yikang DENG
Abstract: Embodiments include inductors with embedded magnetic cores and methods of forming such inductors. Some embodiments may include an integrated circuit package that utilizes such inductors. For example, the integrated circuit package may include an integrated circuit die and a multi-phase voltage regulator electrically coupled to the integrated circuit die. In an embodiment, the multi-phase voltage regulator includes a substrate core and a plurality of inductors in the substrate core. In an embodiment, the inductors may include a conductive loop in and around the substrate core. In an embodiment, the conductive loops are electrically coupled to a voltage out line. Embodiments may also include a magnetic core surrounded by the conductive loops. The magnetic core is separated from surfaces of the conductive loops by the substrate core
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