NON-ROUGHENED CU TRACE WITH ANCHORING TO REDUCE INSERTION LOSS OF HIGH SPEED IO ROUTING IN PACKAGE SUBSTRATE

    公开(公告)号:US20190295937A1

    公开(公告)日:2019-09-26

    申请号:US15927047

    申请日:2018-03-20

    申请人: Intel Corporation

    摘要: Embodiments include semiconductor packages and a method of forming the semiconductor packages. A semiconductor package includes a trace disposed on a conductive layer. The semiconductor package has one or more adhesion anchoring points and a plurality of portions on the trace. An adhesion anchoring point is between two portions on the trace. A surface roughness of an adhesion anchoring point is greater than a surface roughness of a portion on the trace. The trace may be a high-speed input/output (HSIO) trace. The semiconductor package may include via pads disposed on each end of the trace, and a dielectric disposed on the trace. The dielectric is patterned to form openings on the dielectric that expose second portions on the trace. The dielectric remains over the portions. The semiconductor package may have a chemical treatment disposed on the exposed openings on the trace to form the adhesion anchoring points.

    CORE LAYER WITH FULLY ENCAPSULATED CO-AXIAL MAGNETIC MATERIAL AROUND PTH IN IC PACKAGE SUBSTRATE

    公开(公告)号:US20190274217A1

    公开(公告)日:2019-09-05

    申请号:US15910288

    申请日:2018-03-02

    申请人: Intel Corporation

    摘要: Embodiments may include inductors with embedded magnetic cores and methods of making such inductors. In an embodiment, an integrated circuit package may include an integrated circuit die with a multi-phase voltage regulator electrically coupled to the integrated circuit die. In such embodiments, the multi-phase voltage regulator may include a substrate core and a plurality of inductors. The inductors may include a conductive through-hole disposed through the substrate core and a plugging layer comprising a dielectric material surrounding the conductive through-hole. In an embodiment, a magnetic sheath is formed around the plugging layer. In an embodiment, the magnetic sheath is separated from the plated through hole by the plugging layer. Additionally, a first layer comprising a dielectric material may be disposed over a first surface of the magnetic sheath, and a second layer comprising a dielectric material may be disposed over a second surface of the magnetic sheath.

    FULLY EMBEDDED MAGNETIC-CORE IN CORE LAYER FOR CUSTOM INDUCTOR IN IC SUBSTRATE

    公开(公告)号:US20190272936A1

    公开(公告)日:2019-09-05

    申请号:US15911549

    申请日:2018-03-05

    申请人: Intel Corporation

    摘要: Embodiments include inductors with embedded magnetic cores and methods of forming such inductors. Some embodiments may include an integrated circuit package that utilizes such inductors. For example, the integrated circuit package may include an integrated circuit die and a multi-phase voltage regulator electrically coupled to the integrated circuit die. In an embodiment, the multi-phase voltage regulator includes a substrate core and a plurality of inductors in the substrate core. In an embodiment, the inductors may include a conductive loop in and around the substrate core. In an embodiment, the conductive loops are electrically coupled to a voltage out line. Embodiments may also include a magnetic core surrounded by the conductive loops. The magnetic core is separated from surfaces of the conductive loops by the substrate core

    CORE LAYER WITH FULLY ENCAPSULATED CO-AXIAL MAGNETIC MATERIAL AROUND PTH IN IC PACKAGE SUBSTRATE

    公开(公告)号:US20220117089A1

    公开(公告)日:2022-04-14

    申请号:US17560004

    申请日:2021-12-22

    申请人: Intel Corporation

    摘要: Embodiments may include inductors with embedded magnetic cores and methods of making such inductors. In an embodiment, an integrated circuit package may include an integrated circuit die with a multi-phase voltage regulator electrically coupled to the integrated circuit die. In such embodiments, the multi-phase voltage regulator may include a substrate core and a plurality of inductors. The inductors may include a conductive through-hole disposed through the substrate core and a plugging layer comprising a dielectric material surrounding the conductive through-hole. In an embodiment, a magnetic sheath is formed around the plugging layer. In an embodiment, the magnetic sheath is separated from the plated through hole by the plugging layer. Additionally, a first layer comprising a dielectric material may be disposed over a first surface of the magnetic sheath, and a second layer comprising a dielectric material may be disposed over a second surface of the magnetic sheath.

    LITHOGRAPHICALLY DEFINED VERTICAL INTERCONNECT ACCESS (VIA) IN DIELECTRIC POCKETS IN A PACKAGE SUBSTRATE

    公开(公告)号:US20190304889A1

    公开(公告)日:2019-10-03

    申请号:US15941903

    申请日:2018-03-30

    申请人: Intel Corporation

    摘要: Techniques for fabricating a package substrate comprising a via, a conductive line, and a pad are described. The package substrate can be included in a semiconductor package. For one technique, a package substrate includes: a pad in a dielectric layer; a via; and a conductive line. The via and the conductive line can be part of a structure. Alternatively, the conductive line can be adjacent to the via. The dielectric layer can include a pocket above the pad. One or more portions of the via may be formed in the pocket above the pad. Zero or more portions of the via can be formed on the dielectric layer outside the pocket. In some scenarios, no pad is above the via. The package substrate provides several advantages. One exemplary advantage is that the package substrate can assist with increasing an input/output density per millimeter per layer (IO/mm/layer) of the package substrate.

    ACOUSTO-OPTIC DEFLECTOR WITH MULTIPLE TRANSDUCERS FOR OPTICAL BEAM STEERING
    10.
    发明申请
    ACOUSTO-OPTIC DEFLECTOR WITH MULTIPLE TRANSDUCERS FOR OPTICAL BEAM STEERING 审中-公开
    具有用于光束转向的多个传感器的ACOUSTO-光学偏转器

    公开(公告)号:US20150338718A1

    公开(公告)日:2015-11-26

    申请号:US14690341

    申请日:2015-04-17

    申请人: INTEL CORPORATION

    IPC分类号: G02F1/33

    CPC分类号: G02F1/33 G02F1/113 G02F1/332

    摘要: An acousto-optic deflector with multiple acoustic transducers is described that is suitable for use in substrate processing. In one example a method includes transmitting an optic beam through an acousto-optic deflector, applying an acoustic signal with a phase delay across multiple transducers of the acousto-optic deflector to deflect the beam along a first axis by the acousto-optic deflector, and directing the deflected beam onto a workpiece.

    摘要翻译: 描述了具有多个声换能器的声光偏转器,其适用于基板处理。 在一个示例中,一种方法包括通过声光偏转器传输光束,在声光偏转器的多个换能器上施加具有相位延迟的声信号,以通过声光偏转器沿着第一轴偏转光束;以及 将偏转的光束引导到工件上。