LITHOGRAPHY PILLAR PROCESS FOR EMBEDDED BRIDGE SCALING

    公开(公告)号:US20230090350A1

    公开(公告)日:2023-03-23

    申请号:US17478439

    申请日:2021-09-17

    申请人: Intel Corporation

    摘要: Embodiments disclosed herein include electronic packages. In an embodiment, the electronic package comprises a package substrate, and a first pad over the package substrate. In an embodiment, a layer is over the package substrate, where the layer is an insulating material. In an embodiment, the electronic package further comprises a via through the layer and in contact with the first pad. In an embodiment a first end of the via has a first width and a second end of the via that is in contact with the first pad has a second width that is larger than the first width. In an embodiment, the electronic package further comprises a second pad over the via.