公开(公告)号：US20240105800A1

公开(公告)日：2024-03-28

申请号：US17951532

申请日：2022-09-23

Applicant: Intel Corporation

Inventor： Reza Bayati ,  Alison V. Davis ,  Ramy Ghostine ,  Matthew J. Prince

IPC: H01L29/423 ,  H01L21/8234 ,  H01L29/06 ,  H01L29/786

CPC classification number: H01L29/42392 ,  H01L21/823431 ,  H01L21/823437 ,  H01L29/0673 ,  H01L29/78696

Abstract: Techniques are described to form semiconductor devices that include one or more gate cuts having a very high aspect ratio (e.g., an aspect ratio of 5:1 or greater). A semiconductor device includes a conductive material that is part of a transistor gate structure around or otherwise on a semiconductor region. The gate structure may be interrupted between two transistors with a gate cut that extends through an entire thickness of the gate structure. A plasma etching process may be performed to form the gate cut with a very high height-to-width aspect ratio with little to no tapering in its sidewall profile, so as to enable densely integrated devices. Furthermore, an etching process may be performed on a gate masking structure used to pattern the location of the gate cuts to ensure that the gate masking structure has low sidewall taper and sufficiently opened enough to expose the underlying gate.

公开(公告)号：US20240105452A1

公开(公告)日：2024-03-28

申请号：US17952695

申请日：2022-09-26

Applicant: Intel Corporation

Inventor： Reza Bayati ,  Matthew J. Prince ,  Alison V. Davis ,  Chun C. Kuo ,  Andrew Arnold ,  Ramy Ghostine ,  Li Huey Tan

IPC: H01L21/28 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775

CPC classification number: H01L21/28123 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823878 ,  H01L27/092 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/66545 ,  H01L29/775

Abstract: Techniques are provided to form semiconductor devices that include one or more gate cuts having a layer of polymer material at edges of the gate cut. The polymer layer may be provided as a byproduct of the etching process used to form the gate cut recess through the gate structure, and can protect any exposed portions of the source or drain regions from certain subsequent processes. The gate structure may be interrupted between two transistors with a gate cut that extends through an entire thickness of the gate structure and includes a dielectric material to electrically isolate the portions of the gate structure on either side of the gate cut. The edges of the gate cut may be lined with a polymer layer that is also on any exposed portions of the source or drain regions that were exposed during the etching process used to form the gate cut recess.

公开(公告)号：US20240332088A1

公开(公告)日：2024-10-03

申请号：US18129617

申请日：2023-03-31

Applicant: Intel Corporation

Inventor： Reza Bayati ,  Swapnadip Ghosh ,  Chiao-Ti Huang ,  Matthew Prince ,  Jeffrey Miles Tan ,  Ramy Ghostine ,  Anupama Bowonder

IPC: H01L21/8234 ,  H01L21/3213 ,  H01L27/088 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775

CPC classification number: H01L21/823456 ,  H01L21/32136 ,  H01L21/32139 ,  H01L21/823412 ,  H01L27/088 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/775

Abstract: One or more transistors may have gate structures with differing sidewall slopes. The gate structures may be over stacks of channel regions in nanosheets (or nanoribbons or nanowires), and the differing gate profiles may correspond to differing electrical characteristics. Transistors with metal gate structures may be tuned by strategically etching the gate structures, for example, using lower etch powers, higher etch temperatures, and/or longer etch durations, to achieve substantially vertical gate profiles.

公开(公告)号：US20240105453A1

公开(公告)日：2024-03-28

申请号：US17953873

申请日：2022-09-27

Applicant: Intel Corporation

Inventor： Reza Bayati ,  Matthew J. Prince ,  Alison V. Davis ,  Ramy Ghostine ,  Piyush M. Sinha ,  Oleg Golonzka ,  Swapnadip Ghosh ,  Manish Sharma

IPC: H01L21/28 ,  H01L21/02 ,  H01L21/311 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775

CPC classification number: H01L21/28123 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/31116 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823878 ,  H01L27/092 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/66545 ,  H01L29/775

Abstract: Techniques are provided herein to form semiconductor devices that include one or more gate cuts having a very high aspect ratio (e.g., an aspect ratio of 5:1 or greater, such as 10:1). In an example, a semiconductor device includes a conductive material that is part of a transistor gate structure around or otherwise on a semiconductor region. The semiconductor region can be, for example, a fin of semiconductor material that extends between a source region and a drain region, or one or more nanowires or nanoribbons of semiconductor material that extend between a source region and a drain region. The gate structure may be interrupted between two transistors with a gate cut that extends through an entire thickness of the gate structure. A particular plasma etching process may be performed to form the gate cut with a very high height-to-width aspect ratio so as to enable densely integrated devices.