公开(公告)号：US20200225038A1

公开(公告)日：2020-07-16

申请号：US16735351

申请日：2020-01-06

Applicant: INVENSENSE, INC.

Inventor： Ozan ANAC ,  Joseph SEEGER

IPC: G01C19/5762 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/08 ,  B81B3/00

Abstract: Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

公开(公告)号：US20180073875A1

公开(公告)日：2018-03-15

申请号：US15814373

申请日：2017-11-15

Applicant: INVENSENSE, INC.

Inventor： Ozan ANAC ,  Joseph SEEGER

IPC: G01C19/5762 ,  G01P15/08 ,  G01C19/5747 ,  B81B3/00 ,  G01C19/5733

CPC classification number: G01C19/5762 ,  B81B3/0051 ,  B81B2201/0242 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/0802

Abstract: Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

公开(公告)号：US20150211853A1

公开(公告)日：2015-07-30

申请号：US14678774

申请日：2015-04-03

Applicant: InvenSense, Inc.

Inventor： Ozan ANAC ,  Joseph SEEGER

IPC: G01C19/5705

CPC classification number: G01C19/5712

Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements.

Abstract translation: 在第一方面，角速度传感器包括基底和锚定到基底的旋转结构。 角速率传感器还包括锚定到基板的驱动块和连接驱动块和旋转结构的元件。 角速度传感器还包括致动器，用于将驱动质量块沿着平面中的第一轴线驱动到衬底并用于将旋转结构驱动为围绕垂直于衬底的第二轴线的旋转振荡; 响应于感测模式中的科里奥利力，感测旋转结构的运动的第一换能器; 以及用于在驱动模式期间感测传感器的运动的第二换能器。 在第二方面，角速率传感器包括基板和两个平行于基板的剪切质量，并通过柔性元件锚定到基板上。

公开(公告)号：US20150316379A1

公开(公告)日：2015-11-05

申请号：US14800612

申请日：2015-07-15

Applicant: InvenSense, Inc.

Inventor： Joseph SEEGER ,  Ozan ANAC

IPC: G01C19/5755

CPC classification number: G01C19/5755 ,  G01C19/5733

Abstract: A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction

Abstract translation: 根据实施例的系统和方法降低了陀螺仪的横轴灵敏度。 这是通过使用机械换能器构建陀螺仪来实现的，所述机械换能器包括弹簧系统，该弹簧系统对制造缺陷敏感度较低，并且被优化以最小化除了预期输入旋转轴线以外的旋转的响​​应。 第一和第二柔性元件的纵向轴线彼此平行并平行于第一方向

公开(公告)号：US20140366631A1

公开(公告)日：2014-12-18

申请号：US14472143

申请日：2014-08-28

Applicant: InvenSense, Inc.

Inventor： Joseph SEEGER ,  Ozan ANAC

IPC: G01C19/5733

CPC classification number: G01C19/5733 ,  G01C19/5712 ,  G01C19/574 ,  G01C19/5755

Abstract: A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

Abstract translation: 公开了一种陀螺仪。 陀螺仪包括基板; 和引导质量体系。 引导质量系统包括检验质量和引导臂。 证明物质和引导臂设置在平行于基底的平面中。 证明物质联接到引导臂。 引导臂也通过弹簧与基板相连。 引导臂允许证明物质在平面中的第一方向的运动。 引导臂和证明质量围绕第一感测轴线旋转。 第一感测轴在平面内并且平行于第一方向。 陀螺仪包括用于在第一方向上振动证明物质的致动器。 陀螺仪还包括用于响应于围绕在平面中并与第一方向正交的第一输入轴的角速度来感测与平面相反的质量法向运动的换能器。

公开(公告)号：US20140026662A1

公开(公告)日：2014-01-30

申请号：US14041810

申请日：2013-09-30

Applicant: InvenSense, Inc.

Inventor： Ozan ANAC ,  Joseph SEEGER

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  G01C19/574

Abstract: A gyroscope comprises a substrate and a guided mass system. The guided mass system comprises proof masses and guiding arms disposed in a plane parallel to the substrate. The proof masses are coupled to the guiding arm by springs. The guiding arm is coupled to the substrate by springs. At least one of the proof-masses is directly coupled to the substrate by at least one anchor via a spring system. The gyroscope also comprises an actuator for vibrating one of the proof-masses in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.

Abstract translation: 陀螺仪包括基板和引导质量系统。 引导质量系统包括设置在平行于基板的平面中的检验质量块和引导臂。 检测质量通过弹簧联接到引导臂。 引导臂通过弹簧联接到基板。 至少一个校验物质通过弹簧系统由至少一个锚定件直接耦合到衬底。 陀螺仪还包括用于在第一方向上振动一个证明质量块的致动器，这导致另一个证明物质在平面中旋转。 最后，陀螺仪还包括用于响应于围绕单个轴或多个输入轴的角速度来感测被引导质量系统的运动的换能器。

公开(公告)号：US20180128615A1

公开(公告)日：2018-05-10

申请号：US15866140

申请日：2018-01-09

Applicant: INVENSENSE, INC.

Inventor： Joseph SEEGER ,  Ozan ANAC

IPC: G01C19/5755 ,  G01C19/5733

CPC classification number: G01C19/5755 ,  G01C19/5733

Abstract: A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction

公开(公告)号：US20160363445A1

公开(公告)日：2016-12-15

申请号：US14495786

申请日：2014-09-24

Applicant: InvenSense, Inc.

Inventor： Ozan ANAC ,  Joseph SEEGER

IPC: G01C19/5762

CPC classification number: G01C19/5762 ,  B81B3/0051 ,  B81B2201/0242 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/0802

Abstract: Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized

Abstract translation: 公开了用于修改弹簧质量结构的实施例，其最小化对MEMS传感器的不期望的非线性运动的影响。 修改包括在弹簧质量构造的旋转结构之间提供刚性元件的任何或任何组合，调整旋转结构之间的弹簧系统并将电消除系统耦合到旋转结构。 在这样做时，诸如不需要的二次谐波运动的不期望的非线性运动被最小化