公开(公告)号：US06956365B2

公开(公告)日：2005-10-18

申请号：US10408988

申请日：2003-04-08

Applicant: Israel Niv ,  Steven Kasapi

Inventor： Israel Niv ,  Steven Kasapi

IPC: G01R31/311 ,  G01R31/319 ,  G01R31/3193 ,  G01R35/00 ,  G01R35/04

CPC classification number: G01R31/3191 ,  G01R31/311 ,  G01R31/31937 ,  G01R35/005

Abstract: A system and method for calibration of a commercial semiconductor test system (tester). The system receives a synchronization signal from the tester and detects light emission from a device under test (DUT). The system then compares the timing and characteristics of the light emission to the synchronization signal to obtain a delay timing and signal change caused by intermediate elements of the tester. The delay timing and signal change are used to calibrate the various channels of the tester. Also described are various designs for DUT's to obtained enhanced accuracy of the delay timing. Further, a system and method are described for reconstruction of a test signal and study of the effects of intermediate elements of the tester on the shape of the test signal.

Abstract translation: 用于商业半导体测试系统（测试仪）的校准的系统和方法。 系统从测试仪接收同步信号，并检测被测设备（DUT）的发光。 然后，该系统将发光的时序和特性与同步信号进行比较，以获得由测试仪的中间元件引起的延迟定时和信号变化。 延时定时和信号变化用于校准测试仪的各种通道。 还描述了DUT的各种设计，以获得延迟定时的增强的精度。 此外，描述了用于重建测试信号并研究测试仪的中间元件对测试信号的形状的影响的系统和方法。

公开(公告)号：US06891363B2

公开(公告)日：2005-05-10

申请号：US10234231

申请日：2002-09-03

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/311 ,  G01R31/02

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

Abstract translation: 用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。 该分析涉及光子发射的空间和/或时间相关性。 在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。 在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。 在一些情况下，重量反映了光子被晶体管发射的可能性。 该分析还可以包括自动识别光子发射图像中的晶体管。

公开(公告)号：US06836131B2

公开(公告)日：2004-12-28

申请号：US10379925

申请日：2003-03-04

Applicant: Tahir Cader ,  Nathan Stoddard ,  Donald Tilton ,  Nader Pakdaman ,  Steven Kasapi

Inventor： Tahir Cader ,  Nathan Stoddard ,  Donald Tilton ,  Nader Pakdaman ,  Steven Kasapi

IPC: G01R3128

CPC classification number: G01R31/2875 ,  G01R1/0458 ,  G01R31/2891

Abstract: A combination cooling plate and micro-spray cooling system beneficial for use in testers of electrically stimulated integrated circuit chips is disclosed. The system includes a transparent heat spreader and micro-spray heads disposed about the heat spreader. The spray heads spray cooling liquid onto a periphery of said heat spreader so as to remove heat from the chip. Alternatively, and micro-spray heads are provided inside the cooling plate holder so as to spray cooling liquid inside the interior of the holder so that the holder is cooled. The holder is in physical contact with the heat spreader, so that as the holder is cooled by the spray, heat is removed from the heat spreader, and thereby from the chip.

公开(公告)号：US07323862B2

公开(公告)日：2008-01-29

申请号：US11380044

申请日：2006-04-25

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William K. Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/28

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

公开(公告)号：US07227580B2

公开(公告)日：2007-06-05

申请号：US10719880

申请日：2003-11-20

Applicant: Steven Kasapi ,  Amit Nabarro ,  Ofir Baharav

Inventor： Steven Kasapi ,  Amit Nabarro ,  Ofir Baharav

IPC: G03B7/00 ,  G01R31/02

CPC classification number: G01B11/028

Abstract: A system and method for automatically and accurately determining the exact location of a knife-edge, such as an edge of an optical shutter, so that it can be controlled automatically. In one aspect the system comprises a mechanized shutter coupled to a shutter controller that can automatically control the shutter's location and movement. According to one implementation of the shutter controller the system takes a first image at a first shutter position. The shutter is then moved a predetermined about and a second image is taken. Then, the pixels of each image are added in the direction perpendicular to the movement of the shutter, so as to provide two one-dimension functions. A linear difference of the functions is then taken, so as to obtain a one-dimensional linear difference function. A peak in the linear difference function is then identified as the location of the shutter.

Abstract translation: 一种用于自动和准确地确定诸如光学快门的边缘的刀刃的确切位置的系统和方法，使得其可以被自动控制。 在一个方面，系统包括耦合到快门控制器的机械式快门，其可以自动控制快门的位置和移动。 根据快门控制器的一个实施方式，系统在第一快门位置拍摄第一图像。 然后将快门移动预定的大约和第二个图像。 然后，在与快门的移动垂直的方向上添加每个图像的像素，以提供两个一维功能。 然后获取函数的线性差，以获得一维线性差分函数。 然后将线性差函数中的峰值识别为快门的位置。

公开(公告)号：US20060108997A1

公开(公告)日：2006-05-25

申请号：US11296888

申请日：2005-12-08

Applicant: Romain Desplats ,  Patricia Le Coupanec ,  William Lo ,  Philippe Perdu ,  Steven Kasapi

Inventor： Romain Desplats ,  Patricia Le Coupanec ,  William Lo ,  Philippe Perdu ,  Steven Kasapi

IPC: G01R31/28

CPC classification number: G01R31/2656 ,  G01R31/311

Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

公开(公告)号：US20050174248A1

公开(公告)日：2005-08-11

申请号：US10845013

申请日：2004-05-14

Applicant: Gary Woods ,  Steven Kasapi

Inventor： Gary Woods ,  Steven Kasapi

IPC: G08B21/00

CPC classification number: G01R31/311

Abstract: A beacon circuit enabling study of active elements in an integrated circuit is disclosed. The beacon circuit may be integral to a DUT to be tested. The DUT is stimulated by a conventional ATE, so that its active devices are operating. The signal from the active device is sent to the beacon circuit which, in response to the signal, emits light having intensity that is proportional to the value of the signal. In one example, the beacon circuit is constructed as a voltage to current converter having its input connected to the node of interest and its output connected to a current to light converter. In one example, the current to light converter is implemented as a current mirror circuit. One beneficial implementation disclosed is the use of the beacon circuit for the study of voltage supply disturbances.

Abstract translation: 公开了一种能够研究集成电路中的有源元件的信标电路。 信标电路可以与待测试的DUT成为一体。 DUT由常规ATE激励，使其有源器件正在运行。 来自有源器件的信号被发送到信标电路，信标电路响应于信号发射具有与信号值成比例的强度的光。 在一个示例中，信标电路被构造为其电压到电流转换器，其输入连接到感兴趣的节点，并且其输出连接到电流到光转换器。 在一个示例中，电流到光转换器被实现为电流镜电路。 公开的一个有益实施是使用信标电路来研究电压干扰。

公开(公告)号：US07990167B2

公开(公告)日：2011-08-02

申请号：US12534069

申请日：2009-07-31

Applicant: Steven Kasapi

Inventor： Steven Kasapi

IPC: G01R31/305

CPC classification number: G01R31/311 ,  G01R31/2851 ,  G01R31/308

Abstract: An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.

Abstract translation: 公开了一种用于提供调制映射的设备。 该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间 调制图由选定时间段内收集的调制激光和IC的选定区域组成。

公开(公告)号：US07616312B2

公开(公告)日：2009-11-10

申请号：US11169423

申请日：2005-06-29

Applicant: Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

Inventor： Steven Kasapi ,  Kenneth Wilsher ,  Gary Woods ,  William Lo ,  Radu Ispasoiu ,  Nagamani Nataraj ,  Nina Boiadjieva

IPC: G01B11/00

CPC classification number: G01R31/308 ,  G01R31/311

Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

Abstract translation: 公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。 该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。 光束光学器件定义了共路径偏振微分探测（PDP）光学器件。 公共路径PDP光学将激光束分成两束正交极化。 由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。 可以研究这种差异来研究DUT对刺激信号的响应。

公开(公告)号：US07450245B2

公开(公告)日：2008-11-11

申请号：US11436267

申请日：2006-05-17

Applicant: Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

Inventor： Gary Woods ,  Steven Kasapi ,  Kenneth Wilsher

IPC: G01B9/02

CPC classification number: G01R31/308

Abstract: A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.

Abstract translation: 提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于 检测反射光束，采集和信号处理电子元件。 系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。 在替代实施例中，激光是CW并且调制被应用于光学检测器。