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1.发明授权Single stage charged particle beam energy width reduction system for charged particle beam system 有权用于带电粒子束系统的单级带电粒子束能量减小系统公开(公告)号：US07468517B2
公开(公告)日：2008-12-23
申请号：US10571345
申请日：2004-09-02
CPC分类号： H01J37/153 , H01J49/288 , H01J49/466 , H01J2237/057 , H01J2237/1534 , H01J2237/2801
摘要： The present invention provides a charged particle beam device. The device comprises a first lens generating a crossover a second lens positioned after the crossover and an element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.
摘要翻译： 本发明提供一种带电粒子束装置。 该装置包括产生交叉的第一透镜，位于交叉后的第二透镜和以聚焦和分散方式作用在x-z平面中的元件，其中元件的中心具有与交叉点基本相同的z位置。 此外，提供了作用于x-z平面和y-z平面的多极元件。 第一带电粒子选择元件和第二带电粒子选择元件用于选择一部分带电粒子。 因此，例如 可以减少带电粒子束的能量宽度。
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2.发明授权Switchable multi perspective detector, optics therefore and method of operating thereof 有权可切换多视角检测器，光学器件及其操作方法公开(公告)号：US08963083B2
公开(公告)日：2015-02-24
申请号：US13960393
申请日：2013-08-06
IPC分类号： H01J37/26 , H01J37/21 , H01J37/10 , H01J37/147
CPC分类号： H01J37/21 , H01J37/10 , H01J37/147 , H01J37/244 , H01J2237/24592
摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.
摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。
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3.发明授权公开(公告)号：US08723117B2
公开(公告)日：2014-05-13
申请号：US13543593
申请日：2012-07-06
申请人： Stefan Lanio , Gerald Schönecker , Dieter Winkler
发明人： Stefan Lanio , Gerald Schönecker , Dieter Winkler
IPC分类号： H01J37/26
CPC分类号： H01J37/09 , H01J37/147 , H01J37/244 , H01J2237/0453 , H01J2237/04756 , H01J2237/24465 , H01J2237/24592 , H01J2237/2817
摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.
摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位 孔开口和至少一个外孔开口。
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4.发明申请SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD OF OPERATING THEREOF 有权可切换的多视角检测器，其光学器件及其操作方法公开(公告)号：US20130270438A1
公开(公告)日：2013-10-17
申请号：US13543593
申请日：2012-07-06
申请人： Stefan LANIO , Gerald Schönecker , Dieter Winkler
发明人： Stefan LANIO , Gerald Schönecker , Dieter Winkler
IPC分类号： H01J37/244 , H01J37/21
CPC分类号： H01J37/09 , H01J37/147 , H01J37/244 , H01J2237/0453 , H01J2237/04756 , H01J2237/24465 , H01J2237/24592 , H01J2237/2817
摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.
摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位 孔开口和至少一个外孔开口。
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