公开(公告)号：US08963083B2

公开(公告)日：2015-02-24

申请号：US13960393

申请日：2013-08-06

申请人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

发明人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

IPC分类号： H01J37/26 ,  H01J37/21 ,  H01J37/10 ,  H01J37/147

CPC分类号： H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/24592

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。

公开(公告)号：US08723117B2

公开(公告)日：2014-05-13

申请号：US13543593

申请日：2012-07-06

申请人： Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

发明人： Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

IPC分类号： H01J37/26

CPC分类号： H01J37/09 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/0453 ,  H01J2237/04756 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位 孔开口和至少一个外孔开口。

公开(公告)号：US20130270438A1

公开(公告)日：2013-10-17

申请号：US13543593

申请日：2012-07-06

申请人： Stefan LANIO ,  Gerald Schönecker ,  Dieter Winkler

发明人： Stefan LANIO ,  Gerald Schönecker ,  Dieter Winkler

IPC分类号： H01J37/244 ,  H01J37/21

CPC分类号： H01J37/09 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/0453 ,  H01J2237/04756 ,  H01J2237/24465 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.

摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位 孔开口和至少一个外孔开口。

公开(公告)号：US08563927B2

公开(公告)日：2013-10-22

申请号：US13196778

申请日：2011-08-02

申请人： Dieter Winkler ,  Stefan Lanio

发明人： Dieter Winkler ,  Stefan Lanio

IPC分类号： G21K7/00 ,  G01N23/04

CPC分类号： H01J37/09 ,  H01J2237/0206 ,  H01J2237/026 ,  H01J2237/28

摘要： A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 Ωcm to about 1012 Ωcm.

摘要翻译： 带电粒子束装置的屏蔽构件包括导电基板; 以及延伸穿过导电基板的通孔。 导电衬底由具有约106Ω·cm至约1012Ω·cm范围内的特定电阻率的材料构成。

公开(公告)号：US20140175277A1

公开(公告)日：2014-06-26

申请号：US13734180

申请日：2013-01-04

申请人： Stefan Lanio

发明人： Stefan Lanio ,  Jüergen Frosien ,  Gerald Schoenecker ,  Dieter Winkler

IPC分类号： H01J37/26

CPC分类号： H01J37/244 ,  H01J37/147 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/24465 ,  H01J2237/2449 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2812 ,  H01J2237/2814

摘要： A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the secondary beam; a detection element for detecting the secondary beam particles, and three deflection elements, wherein at least a first deflector is provided between the beam bender and the focusing lens, at least a second deflector is provided between the focusing lens and the detection element, at least a third deflector is provided between the beam splitter and the detection element.

摘要翻译： 描述了带电粒子束装置的二次带电粒子检测系统。 检测系统包括用于分离初级束的分束器和在冲击样品上形成的次级束; 用于偏转次光束的光束弯曲机; 用于聚焦二次束的聚焦透镜; 用于检测次级束粒子的检测元件和三个偏转元件，其中至少第一偏转器设置在光束弯曲器和聚焦透镜之间，至少第二偏转器设置在聚焦透镜和检测元件之间，至少 在分束器和检测元件之间提供第三偏转器。

公开(公告)号：US08785849B2

公开(公告)日：2014-07-22

申请号：US12133298

申请日：2008-06-04

申请人： Juergen Frosien ,  Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

发明人： Juergen Frosien ,  Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

IPC分类号： G21K5/04

CPC分类号： H01J37/08 ,  H01J27/26 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/244 ,  H01J2237/24514 ,  H01J2237/24535 ,  H01J2237/24564 ,  H01J2237/24578 ,  H01J2237/2594 ,  H01J2237/2623 ,  H01J2237/2816 ,  H01J2237/2817

摘要： A focused ion beam device is described comprising a gas field ion source with an analyzer for analyzing and classifying the structure of a specimen, a controller for controlling and/or modifying the structure of the specimen according to the analysis of the analyzer, an emitter tip, the emitter tip has a base tip comprising a first material and a supertip comprising a material different from the first material, wherein the supertip is a single atom tip and the base tip is a single crystal base tip. Furthermore, the focused ion beam device has a probe current control and a sample charge control. A method of operating a focused ion beam device is provided comprising applying a voltage between a single emission center of the supertip and an electrode, supplying gas to the emitter tip, analyzing and classifying the structure of a specimen, and controlling the structure of the specimen.

摘要翻译： 描述了一种聚焦离子束装置，其包括气体离子源，其具有用于分析和分类样品结构的分析器，用于根据分析仪的分析来控制和/或改变样品的结构的控制器，发射器尖端 发射极尖端具有包括第一材料和超高压头的基座尖端，所述第一材料和第一材料包括不同于所述第一材料的材料，其中所述超高压是单个原子尖端，并且所述基座尖端是单晶基底尖端。 此外，聚焦离子束装置具有探针电流控制和样品充电控制。 提供了一种操作聚焦离子束装置的方法，包括在超高压的单个发射中心和电极之间施加电压，向发射极尖端供应气体，分析和分类样品的结构，以及控制样品的结构 。

公开(公告)号：US08026492B2

公开(公告)日：2011-09-27

申请号：US12264859

申请日：2008-11-04

申请人： Juergen Frosien ,  Dieter Winkler

发明人： Juergen Frosien ,  Dieter Winkler

IPC分类号： H01J27/02

CPC分类号： H01J37/08 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/0827 ,  H01J2237/31749

摘要： A focused ion beam device is provided, including: an ion beam column adapted to house a gas field ion source emitter with an emitter tip and an emitter area for generating ions, a heating means adapted to heat the emitter tip, one or more gas inlets adapted to introduce a first gas and at least one second gas to the emitter area, an objective lens adapted to focus the ion beam generated from the first gas or the second gas, and a controller adapted to switch between a first emitter tip temperature and a second emitter tip temperature for generating an ion beam of ions of the first gas or an ion beam of ions of the at least one second gas.

摘要翻译： 提供了一种聚焦离子束装置，包括：离子束柱，其适于容纳具有发射极尖端的气体场离子源发射体和用于产生离子的发射极区域，适于加热发射极尖端的加热装置，一个或多个气体入口 适于将第一气体和至少一个第二气体引入发射器区域，适于聚焦由第一气体或第二气体产生的离子束的物镜，以及适于在第一发射极尖端温度和 用于产生所述第一气体的离子离子束或所述至少一个第二气体的离子离子束的第二发射极尖端温度。

公开(公告)号：US20100115960A1

公开(公告)日：2010-05-13

申请号：US12645302

申请日：2009-12-22

申请人： Andreas Brautsch ,  Dieter Winkler ,  Richard Carroni

发明人： Andreas Brautsch ,  Dieter Winkler ,  Richard Carroni

IPC分类号： F02C7/00

CPC分类号： F23C9/00 ,  F02C3/30 ,  F02C3/34 ,  F02C7/143 ,  F05D2270/08 ,  F23C6/042 ,  F23C2202/20 ,  F23C2900/9901 ,  F23J15/06 ,  Y02E20/18 ,  Y02E20/363

摘要： A method and installation are disclosed which can, for example, provide for reliable, low-Nox-emission operation of a gas turbine installation with hydrogen-rich fuel gas. An exemplary gas turbine installation includes an arrangement for flue gas recirculation into a compressor inlet and for fuel gas dilution. Oxygen content in combustion air can be reduced by recirculation of recooled flue gas, and the fuel gas can be diluted with compressed flue gas. The oxygen reduction in the combustion air can lead to minimum residual oxygen in the flue gas which can be used for fuel gas dilution. As a result of the flue gas recirculation, water content in the combustion air can be increased by feedback of the water which results as a combustion product. The oxygen reduction, increased water content, and fuel dilution can reduce the flame velocity of hydrogen-rich fuel gases and enable a robust, reliable and low-emission combustion.

摘要翻译： 公开了一种方法和装置，其可以例如提供具有富氢燃料气体的燃气轮机装置的可靠的低NOx排放操作。 示例性的燃气轮机装置包括用于烟道气再循环到压缩机入口和用于燃料气体稀释的装置。 燃烧空气中的氧含量可以通过再冷却的烟道气的再循环来减少，燃料气体可以用压缩的烟道气稀释。 燃烧空气中的氧气还原可导致烟道气中的最小残留氧气，可用于燃料气体稀释。 作为烟道气再循环的结果，可以通过作为燃烧产物的水的反馈来增加燃烧空气中的含水量。 减少氧气，增加含水量和燃料稀释可以降低富氢燃料气体的火焰速度，并实现坚固，可靠和低排放的燃烧。

公开(公告)号：US07589328B2

公开(公告)日：2009-09-15

申请号：US11925609

申请日：2007-10-26

申请人： Juergen Frosien ,  Dieter Winkler

发明人： Juergen Frosien ,  Dieter Winkler

IPC分类号： H01J49/10 ,  H01J27/02 ,  H01J27/26

CPC分类号： H01J27/26 ,  H01J37/08 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/006 ,  H01J2237/0807 ,  H01J2237/0827 ,  H01J2237/244 ,  H01J2237/3174 ,  H01J2237/31749

摘要： A focused ion beam device is described. The device includes an ion beam column including an enclosure for housing an emitter with an emitter area for generating ions, a first gas inlet adapted to introduce a first gas to the emitter area, a second gas inlet adapted to introduce a second gas different from the first gas to the emitter area, and a switching unit adapted to switch between introducing the first gas and introducing the second gas.

摘要翻译： 描述了聚焦离子束装置。 该装置包括离子束柱，其包括用于容纳具有用于产生离子的发射极区域的发射极的外壳，适于将第一气体引入发射极区域的第一气体入口，适于引入不同于第二气体的第二气体的第二气体入口 第一气体到发射极区域，以及开关单元，其适于在引入第一气体和引入第二气体之间切换。

公开(公告)号：US20080236168A1

公开(公告)日：2008-10-02

申请号：US12051669

申请日：2008-03-19

申请人： Richard Carroni ,  Dieter Winkler ,  Andreas Brautsch

发明人： Richard Carroni ,  Dieter Winkler ,  Andreas Brautsch

IPC分类号： F02C3/30 ,  F02C3/20 ,  F02C3/26

CPC分类号： F02C3/30 ,  F02C7/1435 ,  F05D2270/082

摘要： The invention relates to a method for operating a turbogroup, especially of a power generating plant, in which combustion air is fed to a compressor, compressed therein, and fed to a burner, in which a fuel, which has a higher reactivity than natural gas, is fed to the burner, in which water is injected into the combustion air upstream of the burner and evaporated therein, in which the fuel in the burner is mixed with the combustion air-water vapor mixture and combusted, in which a burner exhaust gas which is produced in the burner is fed to a turbine and expanded therein.

摘要翻译： 本发明涉及一种用于操作涡轮组，特别是发电设备的方法，其中燃烧空气被供给到压缩机中，压缩在其中并被供给到燃烧器中，其中具有比天然气更高的反应性的燃料 被供给到燃烧器，其中水被喷射到燃烧器上游的燃烧空气中并在其中蒸发，其中燃烧器中的燃料与燃烧空气 - 水蒸汽混合物混合并燃烧，其中燃烧器排气 在燃烧器中产生的燃料供应到涡轮并在其中膨胀。