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公开(公告)号：US09972933B2
公开(公告)日：2018-05-15
申请号：US15674541
申请日：2017-08-11
发明人： Teppei Kimura , Noriyuki Fukushima , Atsuo Urata , Naoki Arita , Tomoyuki Takeda
CPC分类号： H01R13/2428 , G01R1/06716 , G01R1/06738 , G01R1/07357
摘要： The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings. The present invention has stacked structure that sandwiches an intermediate metallic layer 12 between outer metallic layers 11 and 13, and includes: a contact part 2 that is brought into abutting with a test object; an elastic deformation part 4 that is elastically deformed so as to be curved in a predetermine direction of curvature N by compression force in the longer direction; and a fore end part 3 that is formed between the contact part 2 and the elastic deformation part 4 and supported by a through-hole 121 of a guide plate 120 so as to make the contact part 2 movable in the longer direction, in which side surfaces of the fore end part 3 formed in the direction of curvature N and a direction N′ opposite to the N of the elastic deformation part 4 are configured to include the three metallic layers 11 to 13, and on the side surfaces, the intermediate metallic layer 12 is configured to protrude relative to the outer metallic layers 11 and 13.
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公开(公告)号：US09774121B2
公开(公告)日：2017-09-26
申请号：US14430557
申请日：2013-11-27
发明人： Teppei Kimura , Noriyuki Fukushima , Atsuo Urata , Naoki Arita , Tomoyuki Takeda
CPC分类号： H01R13/2428 , G01R1/06716 , G01R1/06738 , G01R1/07357
摘要： The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings. The present invention has stacked structure that sandwiches an intermediate metallic layer 12 between outer metallic layers 11 and 13, and includes: a contact part 2 that is brought into abutting with a test object; an elastic deformation part 4 that is elastically deformed so as to be curved in a predetermine direction of curvature N by compression force in the longer direction; and a fore end part 3 that is formed between the contact part 2 and the elastic deformation part 4 and supported by a through-hole 121 of a guide plate 120 so as to make the contact part 2 movable in the longer direction, in which side surfaces of the fore end part 3 formed in the direction of curvature N and a direction N′ opposite to the N of the elastic deformation part 4 are configured to include the three metallic layers 11 to 13, and on the side surfaces, the intermediate metallic layer 12 is configured to protrude relative to the outer metallic layers 11 and 13.
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公开(公告)号：US09459287B2
公开(公告)日：2016-10-04
申请号：US14206896
申请日：2014-03-12
IPC分类号： G01R1/073
CPC分类号： G01R1/07357
摘要： The invention provides a guide plate for a probe card including a silicon substrate including a surface and a through-hole, an edge part of the through-hole, and a curved-face part. The through-hole is configured to guide a probe and includes an inner wall face. The edge part of the through-hole is constituted by the surface of the silicon substrate and the inner wall face of the through-hole. The curved-face part is formed on the edge part and formed of a silicon dioxide film.
摘要翻译： 本发明提供了一种用于探针卡的引导板，其包括具有表面和通孔的硅衬底，通孔的边缘部分和曲面部分。 通孔构造成引导探针并且包括内壁面。 通孔的边缘部分由硅衬底的表面和通孔的内壁面构成。 曲面部分形成在边缘部分上并由二氧化硅膜形成。
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公开(公告)号：US09841438B2
公开(公告)日：2017-12-12
申请号：US15359157
申请日：2016-11-22
发明人： Teppei Kimura , Liwen Fan
CPC分类号： G01R1/07371 , C25D1/003 , C25D5/02 , C25D5/48 , G01R1/07357 , G01R1/18 , G01R3/00 , G01R31/2889
摘要： It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide plate 100 for a probe card includes a metal base 110; first insulation layers 120; and metal layers 130. The metal base 110 has a plurality of through holes 111 to receive probes therethrough, and inner walls of the through holes 111. The first insulation layers 120 are of tuboid shape and provided on the respective inner walls of the through holes 111 of the metal base 110. The metal layers 130 are provided on the first insulation layers 120.
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公开(公告)号：US09535096B2
公开(公告)日：2017-01-03
申请号：US14417760
申请日：2013-07-25
发明人： Teppei Kimura , Liwen Fan
CPC分类号： G01R1/07371 , C25D1/003 , C25D5/02 , C25D5/48 , G01R1/07357 , G01R1/18 , G01R3/00 , G01R31/2889
摘要： It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide plate 100 for a probe card includes a metal base 110; first insulation layers 120; and metal layers 130. The metal base 110 has a plurality of through holes 111 to receive probes therethrough, and inner walls of the through holes 111. The first insulation layers 120 are of tuboid shape and provided on the respective inner walls of the through holes 111 of the metal base 110. The metal layers 130 are provided on the first insulation layers 120.
摘要翻译： 本发明的目的是提供一种用于探针卡的引导板，其具有紧密间距的精细通孔并且具有增加的强度。 用于探针卡的引导板100包括金属基座110; 第一绝缘层120; 和金属层130.金属基底110具有多个通孔111，用于接收穿过其中的探针和通孔111的内壁。第一绝缘层120为扇形，并设置在通孔的相应内壁上 金属层130设置在第一绝缘层120上。
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公开(公告)号：US20170346211A1
公开(公告)日：2017-11-30
申请号：US15674541
申请日：2017-08-11
发明人： Teppei Kimura , Noriyuki Fukushima , Atsuo Urata , Naoki Arita , Tomoyuki Takeda
CPC分类号： H01R13/2428 , G01R1/06716 , G01R1/06738 , G01R1/07357
摘要： The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings. The present invention has stacked structure that sandwiches an intermediate metallic layer 12 between outer metallic layers 11 and 13, and includes: a contact part 2 that is brought into abutting with a test object; an elastic deformation part 4 that is elastically deformed so as to be curved in a predetermine direction of curvature N by compression force in the longer direction; and a fore end part 3 that is formed between the contact part 2 and the elastic deformation part 4 and supported by a through-hole 121 of a guide plate 120 so as to make the contact part 2 movable in the longer direction, in which side surfaces of the fore end part 3 formed in the direction of curvature N and a direction N′ opposite to the N of the elastic deformation part 4 are configured to include the three metallic layers 11 to 13, and on the side surfaces, the intermediate metallic layer 12 is configured to protrude relative to the outer metallic layers 11 and 13.
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公开(公告)号：US20150280345A1
公开(公告)日：2015-10-01
申请号：US14430557
申请日：2013-11-27
发明人： Teppei Kimura , Noriyuki Fukushima , Atsuo Urata , Naoki Arita , Tomoyuki Takeda
IPC分类号： H01R13/24
CPC分类号： H01R13/2428 , G01R1/06716 , G01R1/06738 , G01R1/07357
摘要： The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings. The present invention has stacked structure that sandwiches an intermediate metallic layer 12 between outer metallic layers 11 and 13, and includes: a contact part 2 that is brought into abutting with a test object; an elastic deformation part 4 that is elastically deformed so as to be curved in a predetermine curve direction N by compression force in the longer direction; and a fore end part 3 that is formed between the contact part 2 and the elastic deformation part 4 and supported by a through-hole 121 of a guide plate 120 so as to make the contact part 2 movable in the longer direction, in which side surfaces of the fore end part 3 formed in the curve direction N and a direction N′ opposite to the N of the elastic deformation part 4 are configured to include the three metallic layers 11 to 13, and on the side surfaces, the intermediate metallic layer 12 is configured to protrude relative to the outer metallic layers 11 and 13.
摘要翻译： 本发明旨在抑制接触探针干扰引导板以产生刨花。 本发明具有在外侧金属层11,13之间夹持中间金属层12的层叠结构，具有：与被检体抵接的接触部2; 弹性变形部4，通过长度方向的压缩力弹性变形成预定曲线方向N弯曲; 以及前端部3，其形成在接触部2和弹性变形部4之间，并且由导向板120的通孔121支撑，以使接触部2能够在较长的方向上移动，在该侧 形成在弯曲方向N上的前端部3的表面和与弹性变形部4的N相反的方向N'构成为包括三个金属层11〜13，在侧面，中间金属层 12被配置为相对于外部金属层11和13突出。
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