公开(公告)号：US11837437B2

公开(公告)日：2023-12-05

申请号：US17832001

申请日：2022-06-03

Applicant: JEOL Ltd.

Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Tsutomu Negishi ,  Hisashi Kawahara

IPC: H01J37/304 ,  H01J37/08 ,  H01J37/20 ,  H01J37/22

CPC classification number: H01J37/304 ,  H01J37/08 ,  H01J37/20 ,  H01J37/222 ,  H01J2237/002 ,  H01J2237/026 ,  H01J2237/20207 ,  H01J2237/30405 ,  H01J2237/30472

Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, an information provision unit for providing information indicating an expected machining completion time, and a storage unit for storing past machining information. The information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.

公开(公告)号：US20220392744A1

公开(公告)日：2022-12-08

申请号：US17832001

申请日：2022-06-03

Applicant: JEOL Ltd.

Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Tsutomu Negishi ,  Hisashi Kawahara

IPC: H01J37/304 ,  H01J37/08 ,  H01J37/20 ,  H01J37/22

Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, an information provision unit for providing information indicating an expected machining completion time, and a storage unit for storing past machining information. The information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.

公开(公告)号：US20220392739A1

公开(公告)日：2022-12-08

申请号：US17832054

申请日：2022-06-03

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka ,  Tsutomu Negishi ,  Tatsuhito Kimura ,  Yoshikazu Ishikawa ,  Hisashi Kawahara

IPC: H01J37/22 ,  H01J37/08 ,  H01J37/09 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305 ,  H01L21/66

Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a shielding member disposed on the specimen to block the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera, and a processing unit for determining whether to terminate the machining based on an image photographed by the camera. The processing unit performs processing for acquiring information indicating a target machined width, processing for acquiring the image, processing for measuring a machined width on the acquired image, and processing for terminating the machining when the measured machined width equals or exceeds the target machined width.