公开(公告)号：US20220392739A1

公开(公告)日：2022-12-08

申请号：US17832054

申请日：2022-06-03

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka ,  Tsutomu Negishi ,  Tatsuhito Kimura ,  Yoshikazu Ishikawa ,  Hisashi Kawahara

IPC: H01J37/22 ,  H01J37/08 ,  H01J37/09 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305 ,  H01L21/66

Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a shielding member disposed on the specimen to block the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera, and a processing unit for determining whether to terminate the machining based on an image photographed by the camera. The processing unit performs processing for acquiring information indicating a target machined width, processing for acquiring the image, processing for measuring a machined width on the acquired image, and processing for terminating the machining when the measured machined width equals or exceeds the target machined width.

公开(公告)号：US20240096584A1

公开(公告)日：2024-03-21

申请号：US18368789

申请日：2023-09-15

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka ,  Tsutomu Negishi ,  Tatsuhito Kimura

IPC: H01J37/09 ,  H01J37/305

CPC classification number: H01J37/09 ,  H01J37/305

Abstract: There is provided a sample milling apparatus capable of mitigating heat damage to a sample. The apparatus mills the sample by irradiating it with an ion beam and includes: an ion source for emitting the ion beam; and a shield plate placed on the sample and covering a part of the sample. The shield plate includes: a shield surface on which the ion beam impinges; and a bottom surface connected to the shield surface and forming a bottom edge. The bottom surface is smaller in area than the shield surface.

公开(公告)号：US20230015109A1

公开(公告)日：2023-01-19

申请号：US17865850

申请日：2022-07-15

Applicant: JEOL Ltd.

Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Naoki Sugano

IPC: G01B21/06 ,  G02B21/18 ,  G02B21/26

Abstract: A specimen machining device includes an illumination system that illuminates a specimen; a camera that photographs the specimen; and a processing unit that controls the illumination system and the camera, and acquires a machining control image which is used for controlling an ion source and a display image which is displayed on a display unit. The processing unit controls the illumination system to illuminate the specimen under a machining illumination condition; acquires the machining control image by controlling the camera to photograph the specimen illuminated under the machining control illumination condition; controls the ion source based on the machining control image; controls the illumination system to illuminate the specimen under a display illumination condition which is different from the machining control illumination condition; acquires the display image by controlling the camera to photograph the specimen illuminated under the display illumination condition; and displays the display image on the display unit.

公开(公告)号：US20230197401A1

公开(公告)日：2023-06-22

申请号：US18083630

申请日：2022-12-19

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka

IPC: H01J37/21 ,  H01J37/305

CPC classification number: H01J37/21 ,  H01J37/305 ,  H01J2237/083 ,  H01J2237/20214 ,  H01J2237/24578 ,  H01J2237/30477 ,  H01J2237/31749

Abstract: Provided is a sample milling apparatus capable of milling various samples efficiently. The sample milling apparatus includes an anode, a cathode for emitting electrons which are made to collide with gas molecules so that ions are generated, an extraction electrode for causing the generated ions to be extracted as an ion beam, and a focusing electrode disposed between the cathode and the extraction electrode and applied with a focusing voltage. The spatial profile of the ion beam is controlled by varying the focusing voltage applied to the focusing electrode.

公开(公告)号：US20220392744A1

公开(公告)日：2022-12-08

申请号：US17832001

申请日：2022-06-03

Applicant: JEOL Ltd.

Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Tsutomu Negishi ,  Hisashi Kawahara

IPC: H01J37/304 ,  H01J37/08 ,  H01J37/20 ,  H01J37/22

Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, an information provision unit for providing information indicating an expected machining completion time, and a storage unit for storing past machining information. The information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.

公开(公告)号：US20200266028A1

公开(公告)日：2020-08-20

申请号：US16788829

申请日：2020-02-12

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka

IPC: H01J37/244 ,  H01J37/24

Abstract: An apparatus for measuring ion beam current values without disturbing the state of ionization of an ion source includes a high-voltage circuit for applying a voltage between an anode and at least one cathode of an ion source based on a voltage condition and supplying its output current to the anode; a gas flow rate adjusting mechanism for adjusting the flow rate of a gas being an ion source material for generating ions and to be admitted into the ion source; a memory in which there is stored information representing a relationship between the flow rate of the gas and the value of an extraction current flowing through an extraction electrode; and an arithmetic processor for finding the extraction current corresponding to the flow rate of the gas based on the information stored in the memory and subtracting the value of the extraction current from the value of the output current supplied to the anode by the high-voltage circuit to compute the electrical current value of the ion beam.

公开(公告)号：US11837437B2

公开(公告)日：2023-12-05

申请号：US17832001

申请日：2022-06-03

Applicant: JEOL Ltd.

Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Tsutomu Negishi ,  Hisashi Kawahara

IPC: H01J37/304 ,  H01J37/08 ,  H01J37/20 ,  H01J37/22

CPC classification number: H01J37/304 ,  H01J37/08 ,  H01J37/20 ,  H01J37/222 ,  H01J2237/002 ,  H01J2237/026 ,  H01J2237/20207 ,  H01J2237/30405 ,  H01J2237/30472

Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, an information provision unit for providing information indicating an expected machining completion time, and a storage unit for storing past machining information. The information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.

公开(公告)号：US20220238310A1

公开(公告)日：2022-07-28

申请号：US17583464

申请日：2022-01-25

Applicant: JEOL Ltd.

Inventor： Tatsuhito Kimura ,  Munehiro Kozuka

IPC: H01J37/32

Abstract: At timing t0, a brake gas (raw material gas) starts to be supplied to an ion beam generator, and the brake gas is fed into a turbo molecular pump. After timing t1, a vent valve is opened intermittently to feed atmospheric air into the turbo molecular pump. The brake gas may be different from the raw material gas. The brake gas is supplied using a gas supply system.

公开(公告)号：US10861672B2

公开(公告)日：2020-12-08

申请号：US16788829

申请日：2020-02-12

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka

IPC: H01J37/244 ,  H01J37/24

Abstract: An apparatus for measuring ion beam current values without disturbing the state of ionization of an ion source includes a high-voltage circuit for applying a voltage between an anode and at least one cathode of an ion source based on a voltage condition and supplying its output current to the anode; a gas flow rate adjusting mechanism for adjusting the flow rate of a gas being an ion source material for generating ions and to be admitted into the ion source; a memory in which there is stored information representing a relationship between the flow rate of the gas and the value of an extraction current flowing through an extraction electrode; and an arithmetic processor for finding the extraction current corresponding to the flow rate of the gas based on the information stored in the memory and subtracting the value of the extraction current from the value of the output current supplied to the anode by the high-voltage circuit to compute the electrical current value of the ion beam.

公开(公告)号：US20250006458A1

公开(公告)日：2025-01-02

申请号：US18757874

申请日：2024-06-28

Applicant: JEOL Ltd.

Inventor： Munehiro Kozuka

IPC: H01J37/302 ,  H01J37/20 ,  H01J37/305

Abstract: There is provided a sample milling system permitting one to determine suitable milling process conditions easily. The sample milling system includes: a sample milling apparatus for milling a sample by making an ion beam impinge on the sample; and an image generator apparatus for generating forecasted imagery for a case where the sample is milled using the milling apparatus under preset milling process conditions. The forecasted imagery contains information about a distribution of directions of impingement of the ion beam.