摘要:
A gas distribution plate that is installed in a chamber providing a reaction space and supplies a reaction gas onto a substrate placed on a substrate placing plate, wherein the gas distribution plate includes: first and second surfaces opposing to each other, wherein the second surface faces the substrate placing plate and has a recess shape; and a plurality of injection holes each including: an inflow portion that extends from the first surface toward the second surface; a diffusing portion that extends from the second surface toward the first surface; and an orifice portion between the inflow portion and the diffusing portion, wherein the plurality of inflow portions of the plurality of injection holes decrease in gas path from edge to middle of the gas distribution plate, and wherein the plurality of diffusing portions of the plurality of injection holes have substantially the same gas path.
摘要:
A gas distribution plate that is installed in a chamber providing a reaction space and supplies a reaction gas onto a substrate placed on a substrate placing plate, wherein the gas distribution plate includes: first and second surfaces opposing to each other, wherein the second surface faces the substrate placing plate and has a recess shape; and a plurality of injection holes each including: an inflow portion that extends from the first surface toward the second surface; a diffusing portion that extends from the second surface toward the first surface; and an orifice portion between the inflow portion and the diffusing portion, wherein the plurality of inflow portions of the plurality of injection holes decrease in gas path from edge to middle of the gas distribution plate, and wherein the plurality of diffusing portions of the plurality of injection holes have substantially the same gas path.
摘要:
A semiconductor device includes: an active region defined by a device isolation layer on and/or over a substrate; a second conductive well on and/or over the active region; an extended drain formed at one side of the second conductive well; a gate electrode on and/or over the second conductive well and the extended drain; and a source and a drain formed at both sides of the gate electrode, in which extended regions are formed at the corners of the second conductive well under the gate electrode.
摘要:
Provided is a method of booting a computing system which performs boot image transmission and device initialization in parallel. For example, using an Internal RAM and direct memory access (DMA), hardware initialization and loading of boot image from a main storage medium to a main memory are performed in parallel, thereby reducing time spent on booting.
摘要:
An apparatus for searching a socket ID of a received packet in a transmission control protocol (TCP) and a user datagram protocol (UDP) is provided. The apparatus includes: a master managing unit for analyzing command information from a processor, transferring a command to a branch table managing unit and a tree table managing unit, receiving results from the branch table managing unit and the tree table managing unit, and reporting the received results to the processor; a branch table managing unit for receiving a command from the mater managing unit and managing a branch table; and a tree table managing unit for managing a binary tree.
摘要:
A metal-to-metal capacitor including a plurality of first metal blocks formed apart from each other in a vertical direction and arranged in an array format, and a plurality of second metal blocks formed apart from each other in a vertical direction and alternately arranged with the array of the first metal blocks. A first plurality of via contacts interconnect the first metal blocks in a vertical direction and are arranged in parallel, and a second plurality of via contacts interconnect the second metal blocks in a vertical direction and are arranged in parallel.
摘要:
Novel benzoarylureido compounds and a use thereof for prevention and/or treatment of the neurodegenerative brain disease are provided. The neurodegenerative brain diseases may include Alzheimer's disease, dementia, Parkinson's disease, stroke, amyloidosis, Pick's disease, Lou Gehrig's disease, Huntington's disease, Creutzfeld-Jakob disease, and the like.
摘要:
A method for guiding location includes commencing a call between a first terminal and a second terminal, the first terminal requesting the collection of location information from the second terminal, receiving the location information of the second terminal and displaying on the first terminal a geographic information map displaying the location information, and the user of the first terminal transmitting to the second terminal direction information that is displayed on the geographic information map. As a result, more intuitive and convenient location guidance is provided.
摘要:
Provided is a method of booting a computing system which performs boot image transmission and device initialization in parallel. For example, using an Internal RAM and direct memory access (DMA), hardware initialization and loading of boot image from a main storage medium to a main memory are performed in parallel, thereby reducing time spent on booting.
摘要:
An apparatus and method for measuring the characteristics of a semiconductor device is disclosed. The measuring apparatus may include first to M-th (wherein M is a positive integer not less than 1) starved devices each being biased in response to a bias voltage varying in accordance with a variable first supply voltage, thereby varying an amount of current flowing through a semiconductor device included in the starved device. Interconnect lines may interconnect the first to M-th starved devices. A measuring unit measures at least one of a delay time caused by the semiconductor devices of the starved devices themselves, and a compound delay time caused by the semiconductor devices of the starved devices themselves plus a delay time caused by the interconnect lines. The measured results can be analyzed under conditions more approximate to diverse situations exhibited in practical chips in accordance with development of manufacturing processes and techniques. It is also possible to provide the basis of a model which more effectively represents coupling geometry of more complex semiconductor devices and interconnect lines. The basis of the model may be applied to development of various tools, etc.