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    METHOD OF MEGASONIC CLEANING OF AN OBJECT
    5.
    发明申请
    METHOD OF MEGASONIC CLEANING OF AN OBJECT 有权
    物体清洗方法

    公开(公告)号：US20130008476A1

    公开(公告)日：2013-01-10

    申请号：US13618521

    申请日：2012-09-14

    申请人： Jae-Hyuck CHOI ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    发明人： Jae-Hyuck CHOI ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    IPC分类号： B08B3/12

    CPC分类号： B08B3/12 ,  G03F1/82 ,  H01L21/02057 ,  H01L21/67057

    摘要： A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.

    摘要翻译： 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒，同时防止图案损坏。

    Device supporting mobile internet protocol version 6 (Mobile IPv6)
    6.
    发明申请
    Device supporting mobile internet protocol version 6 (Mobile IPv6) 审中-公开
    支持移动互联网协议版本6（移动IPv6）的设备

    公开(公告)号：US20070160064A1

    公开(公告)日：2007-07-12

    申请号：US11645636

    申请日：2006-12-27

    申请人： Dae-Hyung Kwon ,  Kang-Young Moon ,  Hye-Sook Lim ,  Hye-Ran Kim ,  Sun-Gi Kim ,  Ju-Hyoung Mun ,  Won-Jung Kim ,  Suh-Young Jhee ,  Ha-Neul Chu

    发明人： Dae-Hyung Kwon ,  Kang-Young Moon ,  Hye-Sook Lim ,  Hye-Ran Kim ,  Sun-Gi Kim ,  Ju-Hyoung Mun ,  Won-Jung Kim ,  Suh-Young Jhee ,  Ha-Neul Chu

    IPC分类号： H04L12/28

    CPC分类号： H04W80/04 ,  H04L69/12

    摘要： A device supporting Mobile Internet Protocol version 6 (IPv6) includes: a mobile reception processor outputting home addresses of a mobile node and a correspondent node or mobility relevant header information according to whether a received packet is a Binding packet or a data packet; a binding cache storing Binding information that the mobile node has received; a binding update list storing Binding information that the mobile node has transmitted; a binding receiver receiving a Binding message that the correspondent node has created, receiving information on the home addresses of the mobile node and the correspondent node from the mobile reception processor, and providing information related to the Binding message to the binding cache and the binding update list; a binding transmitter receiving a request for creation of the Binding message, combining data using a calculated checksum, and creating and outputting a requested Binding message; and a mobile transmission processor determining a type of a header for Binding Update or Binding Acknowledgment through a Care-of Address (CoA) obtained by retrieving at least one of the binding cache and the binding update list, and creating and outputting a Mobile IPv6 header using the home addresses of the mobile node and the correspondent node received from the binding transmitter.

    摘要翻译： 支持移动互联网协议版本6（IPv6）的设备包括：移动接收处理器，根据所接收的分组是绑定分组还是数据分组，输出移动节点和对端节点的归属地址或移动性相关的头信息; 存储移动节点已经接收的绑定信息的绑定高速缓存; 存储移动节点发送的绑定信息的绑定更新列表; 接收对方节点已经创建的绑定消息的绑定接收者，从移动接收处理器接收关于移动节点和通信节点的归属地址的信息，并将与绑定消息相关的信息提供给绑定高速缓存和绑定更新 名单 接收用于创建绑定消息的请求的绑定发送器，使用计算的校验和组合数据，以及创建并输出所请求的绑定消息; 以及移动传输处理器，其通过通过检索绑定高速缓存和绑定更新列表中的至少一个获得的转交地址（CoA）来确定用于绑定更新或绑定确认的报头的类型，以及创建和输出移动IPv6报头 使用移动节点的归属地址和从绑定发射机接收到的通信节点。

    METHOD OF MEGASONIC CLEANING OF AN OBJECT
    7.
    发明申请
    METHOD OF MEGASONIC CLEANING OF AN OBJECT 有权
    物体清洗方法

    公开(公告)号：US20110297182A1

    公开(公告)日：2011-12-08

    申请号：US12907642

    申请日：2010-10-19

    申请人： Jae-Hyuck Choi ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    发明人： Jae-Hyuck Choi ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    IPC分类号： B08B3/12

    CPC分类号： B08B3/12 ,  G03F1/82 ,  H01L21/02057 ,  H01L21/67057

    摘要： A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.

    摘要翻译： 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒，同时防止图案损坏。

    Method of megasonic cleaning of an object
    8.
    发明授权
    Method of megasonic cleaning of an object 有权
    超声波清洗方法

    公开(公告)号：US09370805B2

    公开(公告)日：2016-06-21

    申请号：US13618521

    申请日：2012-09-14

    申请人： Jae-Hyuck Choi ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    发明人： Jae-Hyuck Choi ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    IPC分类号： B08B3/12 ,  G03F1/82 ,  H01L21/02 ,  H01L21/67

    CPC分类号： B08B3/12 ,  G03F1/82 ,  H01L21/02057 ,  H01L21/67057

    摘要： A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.

    摘要翻译： 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒，同时防止图案损坏。

    Method of megasonic cleaning of an object
    10.
    发明授权
    Method of megasonic cleaning of an object 有权
    超声波清洗方法

    公开(公告)号：US08293020B2

    公开(公告)日：2012-10-23

    申请号：US12907642

    申请日：2010-10-19

    申请人： Jae-Hyuck Choi ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    发明人： Jae-Hyuck Choi ,  Won-Jung Kim ,  Ho-Young Kim ,  Hyung-Ho Ko ,  Jong-Keun Oh ,  Chan-Uk Jeon ,  Keun-Hwan Park

    IPC分类号： B08B3/12

    CPC分类号： B08B3/12 ,  G03F1/82 ,  H01L21/02057 ,  H01L21/67057

    摘要： A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.

    摘要翻译： 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒，同时防止图案损坏。