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公开(公告)号：US08270100B2
公开(公告)日：2012-09-18
申请号：US12611474
申请日：2009-11-03
IPC分类号： G02B7/02
CPC分类号： G02B6/423 , G02B6/4214 , G02B7/003 , G02B7/1822
摘要： An optical component is provided. The optical component includes an optical-path portion including an arm-connecting portion and a lower portion, a first arm extending from a first end of the arm-connecting portion, and a second arm extending from a second end of the arm-connecting portion. The first arm has at least one resting feature and the second arm has at least one resting feature. The optical-path portion has an input surface. When the resting features of the first arm and the second arm are positioned on a top surface at short edges of a trench in a trench system, the optical-path portion is vertically aligned in the trench.
摘要翻译： 提供光学部件。 该光学部件包括：包括臂连接部和下部的光路部，从臂连接部的第一端延伸的第一臂和从臂连接部的第二端延伸的第二臂 。 第一臂具有至少一个休息特征，而第二臂具有至少一个休息特征。 光路部分具有输入表面。 当第一臂和第二臂的静止特征位于沟槽系统中的沟槽的短边缘的顶表面上时，光路部分在沟槽中垂直对准。
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公开(公告)号：US20110102894A1
公开(公告)日：2011-05-05
申请号：US12611474
申请日：2009-11-03
CPC分类号： G02B6/423 , G02B6/4214 , G02B7/003 , G02B7/1822
摘要： An optical component is provided. The optical component includes an optical-path portion including an arm-connecting portion and a lower portion, a first arm extending from a first end of the arm-connecting portion, and a second arm extending from a second end of the arm-connecting portion. The first arm has at least one resting feature and the second arm has at least one resting feature. The optical-path portion has an input surface. When the resting features of the first arm and the second arm are positioned on a top surface at short edges of a trench in a trench system, the optical-path portion is vertically aligned in the trench.
摘要翻译： 提供光学部件。 该光学部件包括：包括臂连接部和下部的光路部，从臂连接部的第一端延伸的第一臂和从臂连接部的第二端延伸的第二臂 。 第一臂具有至少一个休息特征，而第二臂具有至少一个休息特征。 光路部分具有输入表面。 当第一臂和第二臂的静止特征位于沟槽系统中的沟槽的短边缘的顶表面上时，光路部分在沟槽中垂直对准。
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公开(公告)号：US07802928B2
公开(公告)日：2010-09-28
申请号：US11969822
申请日：2008-01-04
CPC分类号： G01C19/727 , G02B6/264 , G02B6/3636 , G02B6/3652 , G02B6/3692 , G02B6/4204 , G02B6/4214 , G02B6/423
摘要： A fiber optic alignment device on a crystalline substrate support is disclosed. An exemplary embodiment embodied in a resonator fiber optic gyro is fabricated by a process of forming a crystalline substrate support structure operable to support the first end portion of the optical fiber and the second end portion of the optical fiber; forming a first end V-groove portion and a second end V-groove portion in the support structure; physically coupling the first end portion of the optical fiber to the first end V-groove portion; and physically coupling the second end portion of the optical fiber to the second end V-groove portion.
摘要翻译： 公开了一种在晶体衬底支架上的光纤对准装置。 通过形成可操作以支撑光纤的第一端部分和光纤的第二端部的结晶衬底支撑结构的工艺来制造体现在谐振器光纤陀螺仪中的示例性实施例; 在支撑结构中形成第一端V形槽部分和第二端V形槽部分; 将光纤的第一端部物理耦合到第一端V形槽部分; 并将光纤的第二端部物理耦合到第二端V形槽部分。
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公开(公告)号：US20090175578A1
公开(公告)日：2009-07-09
申请号：US11969822
申请日：2008-01-04
IPC分类号： G02B6/42
CPC分类号： G01C19/727 , G02B6/264 , G02B6/3636 , G02B6/3652 , G02B6/3692 , G02B6/4204 , G02B6/4214 , G02B6/423
摘要： A fiber optic alignment device on a crystalline substrate support is disclosed. An exemplary embodiment embodied in a resonator fiber optic gyro is fabricated by a process of forming a crystalline substrate support structure operable to support the first end portion of the optical fiber and the second end portion of the optical fiber; forming a first end V-groove portion and a second end V-groove portion in the support structure; physically coupling the first end portion of the optical fiber to the first end V-groove portion; and physically coupling the second end portion of the optical fiber to the second end V-groove portion.
摘要翻译： 公开了一种在晶体衬底支架上的光纤对准装置。 通过形成可操作以支撑光纤的第一端部分和光纤的第二端部的结晶衬底支撑结构的工艺来制造体现在谐振器光纤陀螺仪中的示例性实施例; 在支撑结构中形成第一端V形槽部分和第二端V形槽部分; 将光纤的第一端部物理耦合到第一端V形槽部分; 并将光纤的第二端部物理耦合到第二端V形槽部分。
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5.发明授权Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes 有权用于微机电系统（MEMS）器件制造工艺的气凝胶制成的牺牲层公开(公告)号：US08293657B2
公开(公告)日：2012-10-23
申请号：US12940348
申请日：2010-11-05
申请人： James F. Detry
发明人： James F. Detry
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： B81C1/00047 , B81B2203/0118 , B81B2203/0315 , B81C2201/0109
摘要： Systems and methods for processing sacrificial layers in MEMS device fabrication are provided. In one embodiment, a method comprises: applying a patterned layer of Aerogel material onto a substrate to form an Aerogel sacrificial layer; applying at least one non-sacrificial silicon layer over the Aerogel sacrificial layer, wherein the non-sacrificial silicon layer is coupled to the substrate through one or more gaps provided in the patterned layer of Aerogel material; and removing the Aerogel sacrificial layer by exposing the Aerogel sacrificial layer to a removal liquid.
摘要翻译： 提供了用于在MEMS器件制造中处理牺牲层的系统和方法。 在一个实施例中，一种方法包括：将图案化的气凝胶材料层施加到基底上以形成气凝胶牺牲层; 在所述气凝胶牺牲层上施加至少一个非牺牲硅层，其中所述非牺牲硅层通过设置在所述图案化的气凝胶材料层中的一个或多个间隙而耦合到所述衬底; 并通过将气凝胶牺牲层暴露于去除液体来除去气凝胶牺牲层。
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6.发明申请APPARATUS AND METHOD FOR PROVIDING ISOLATION BETWEEN COMPONENTS IN MICROFABRICATED DEVICES 审中-公开用于在微型化装置中提供组分之间的分离的装置和方法公开(公告)号：US20120219760A1
公开(公告)日：2012-08-30
申请号：US13036922
申请日：2011-02-28
申请人： James F. Detry , Robert J. Carlson , Pamela Marie Norris , Arthur Weston Lichtenberger , Roy Matthews , Casey Marie Nabors Bauer , Matthew Linton Bauer
发明人： James F. Detry , Robert J. Carlson , Pamela Marie Norris , Arthur Weston Lichtenberger , Roy Matthews , Casey Marie Nabors Bauer , Matthew Linton Bauer
CPC分类号： B81B3/0081 , B81B3/0086 , B81B7/0012 , Y10T428/24496 , Y10T428/249953 , Y10T428/249981 , Y10T428/24999
摘要： An apparatus and method for providing isolation between components in microfabricated devices is provided. In one embodiment, a microfabricated device comprises: a base layer; a microfabricated component; and a non-sacrificial aerogel layer in contact with the microfabricated component and supporting the microfabricated thermal component on the base layer. The non-sacrificial aerogel layer is positioned to provide at least one of thermal, electrical or acoustic isolation between the microfabricated thermal component and the base layer.
摘要翻译： 提供了一种用于提供微加工装置中的部件之间的隔离的装置和方法。 在一个实施例中，微加工装置包括：基层; 微加成分; 以及与所述微细成分接触并且在所述基底层上支撑所述微细加热的热成分的非牺牲气凝胶层。 非牺牲气凝胶层被定位成提供微加工热组分和基层之间的热，电或声隔离中的至少一种。
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公开(公告)号：US20090212386A1
公开(公告)日：2009-08-27
申请号：US12034905
申请日：2008-02-21
申请人： Jeff A. Ridley , Robert Higashi , James F. Detry
发明人： Jeff A. Ridley , Robert Higashi , James F. Detry
IPC分类号： H01L31/058 , H01L21/00
CPC分类号： B81B7/0087 , B81B2201/0242 , B81B2201/0278
摘要： A MEMS device includes a P-N device formed on a silicon pin, which is connected to a silicon sub-assembly, and where the P-N device is formed on a silicon substrate that is used to make the silicon pin before it is embedded into a first glass wafer. In one embodiment, forming the P-N device includes selectively diffusing an impurity into the silicon pin and configuring the P-N device to operate as a temperature sensor.
摘要翻译： MEMS器件包括形成在硅引脚上的PN器件，其连接到硅子组件，并且其中PN器件形成在硅衬底上，硅衬底在其被嵌入第一玻璃中之前用于制造硅销 晶圆。 在一个实施例中，形成P-N器件包括选择性地将杂质扩散到硅引脚中并且将P-N器件配置为用作温度传感器。
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公开(公告)号：US20090196623A1
公开(公告)日：2009-08-06
申请号：US12026458
申请日：2008-02-05
申请人： James F. Detry
发明人： James F. Detry
IPC分类号： H04B10/04
CPC分类号： G02B6/136 , G02B6/12002 , G02B6/4214
摘要： An Optical bench communicates light through free space in a plurality of trenches formed in the bench, each of the trenches formed by deep ion reactive etching and defined by two opposing side walls, such that the free space is between the opposing side walls. An exemplary embodiment has a first trench operable to receive the beam of light and operable to communicate the beam of light through the free space in the first trench; an angled reflection side wall operable to receive the beam of light routed through the first trench and operable to reflect at least a portion of the beam of light; and a second trench operable to receive the portion of the beam of light reflected from the angled reflection side wall and operable to route the portion of the beam of light through the free space in the second trench.
摘要翻译： 光学工作台通过在台座上形成的多个沟槽中的自由空间进行光通过，每个沟槽由深离子反应蚀刻形成并由两个相对的侧壁限定，使得自由空间位于相对的侧壁之间。 示例性实施例具有可操作以接收光束并可操作以将光束通过第一沟槽中的自由空间的第一沟槽; 角度反射侧壁，其可操作以接收通过第一沟槽布线的光束，并可操作以反射光束的至少一部分; 以及第二沟槽，其可操作以接收从所述成角度的反射侧壁反射的所述光束的所述部分，并且可操作以将所述光束的所述部分穿过所述第二沟槽中的自由空间。
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公开(公告)号：US20100027022A1
公开(公告)日：2010-02-04
申请号：US12182027
申请日：2008-07-29
CPC分类号： G01C19/721
摘要： An improved resonator fiber-optic gyro (RFOG). An example RFOG includes a closed-coil resonator where counter-propagating laser beams are done by fiber couplers. Signals are extracted from the ring resonator using other fiber couplers. The fiber couplers may be fiber spliced couplers, free-space fiber-to-fiber coupling elements or comparable coupling devices. A silicon structure may be used to align components of the gyro or just the coupling elements. The resonator includes a hollow-core fiber.
摘要翻译： 改进的谐振器光纤陀螺（RFOG）。 RFOG的示例包括闭环线圈谐振器，其中反向传播的激光束由光纤耦合器完成。 使用其他光纤耦合器从环形谐振器中提取信号。 光纤耦合器可以是光纤耦合器，自由空间光纤到光纤耦合元件或类似的耦合器件。 可以使用硅结构来对准陀螺仪的组件或仅耦合元件。 谐振器包括中空芯纤维。
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公开(公告)号：US06175515B1
公开(公告)日：2001-01-16
申请号：US09224368
申请日：1998-12-31
IPC分类号： G11C1502
CPC分类号： G11C11/18
摘要： A vertically integrated magnetic memory with Hall effect sensing or reading. It has a ferromagnetic structure with a nearly enclosed magnetic path, which is a vertical structure integrated on a chip. Each memory cell has a closed magnetic field that has high strength for a strong Hall effect. The magnet is a closed loop, robust reproducible magnet. A memory array of such cells uses little power in that only few cells need to draw the read current for a short time required to read the information. A silicon or GaAs chip implementation of the memory is one embodiment, among others, wherein the field required to saturate the electrons can be achieved without excessive power.
摘要翻译： 具有霍尔效应感测或读取功能的垂直集成磁记忆体。 它具有铁磁结构，具有几乎封闭的磁路，其是集成在芯片上的垂直结构。 每个存储单元都具有一个闭合的磁场，具有很强的霍尔效应强度。 磁铁是一个闭环，坚固可重现的磁铁。 这样的单元的存储器阵列使用的功率很小，因为只有少数单元需要在读取信息所需的短时间内绘制读取电流。 存储器的硅或GaAs芯片实现方案是其中一个实施例，其中可以在没有过多功率的情况下实现饱和电子所需的场。
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