公开(公告)号：US07190441B1

公开(公告)日：2007-03-13

申请号：US11021555

申请日：2004-12-22

申请人： James T. McWhirter ,  Liang-Guo Wang ,  Hidong Kwak ,  Haixing Zou ,  Dan Georgesco ,  Bernard Lautee ,  Jennming James Chen ,  Gary R. Janik ,  Patrick M. Maxton

发明人： James T. McWhirter ,  Liang-Guo Wang ,  Hidong Kwak ,  Haixing Zou ,  Dan Georgesco ,  Bernard Lautee ,  Jennming James Chen ,  Gary R. Janik ,  Patrick M. Maxton

IPC分类号： G01N1/00

CPC分类号： G01N1/32 ,  G01N1/2813 ,  H01L21/67028

摘要： Methods and systems for preparing a sample for thin film analysis are provided. One system includes an energy beam source configured to generate an energy beam. The system also includes an energy beam delivery subsystem configured to direct the energy beam to a sample and to modify the energy beam such that the energy beam has a substantially flat-top profile on the sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample. One method includes generating an energy beam and modifying the energy beam such that the energy beam has a substantially flat-top profile. The method also includes directing the energy beam to a sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample.

摘要翻译： 提供了制备用于薄膜分析的样品的方法和系统。 一个系统包括被配置为产生能量束的能量束源。 该系统还包括能量束传送子系统，其配置成将能量束引导到样品并修改能量束，使得能量束在样品上具有基本上平顶的轮廓。 能量束去除样品上的污染物层的一部分以暴露样品上薄膜的分析区域。 一种方法包括产生能量束并修改能量束，使得能量束具有基本平坦的轮廓。 该方法还包括将能量束引导到样品。 能量束去除样品上的污染物层的一部分以暴露样品上薄膜的分析区域。

公开(公告)号：US07869040B1

公开(公告)日：2011-01-11

申请号：US12184419

申请日：2008-08-01

申请人： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

发明人： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

IPC分类号： G01J4/00

CPC分类号： G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

摘要： An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

摘要翻译： 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

公开(公告)号：US07408641B1

公开(公告)日：2008-08-05

申请号：US11058153

申请日：2005-02-14

申请人： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

发明人： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

IPC分类号： G01J4/00

CPC分类号： G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

摘要： An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

摘要翻译： 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。