-
公开(公告)号：US20120274647A1
公开(公告)日：2012-11-01
申请号：US13094687
申请日：2011-04-26
申请人： Je-Hsiung Lan , Sang-June Park , Jonghae Kim , Evgeni Gousev , Matthew Nowak , Philip J. Stephanou , Justin Black , Kurt Petersen , Srinivasan Ganapathi
发明人： Je-Hsiung Lan , Sang-June Park , Jonghae Kim , Evgeni Gousev , Matthew Nowak , Philip J. Stephanou , Justin Black , Kurt Petersen , Srinivasan Ganapathi
IPC分类号： H01L41/053 , G09G5/39 , H01L41/22 , G06T1/60
CPC分类号： H03H3/0072 , H03H9/2447 , Y10T29/42
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a sacrificial layer is deposited on an insulating substrate. A lower electrode layer is formed proximate the sacrificial layer. A piezoelectric layer is deposited on the lower electrode layer. An upper electrode layer is formed on the piezoelectric layer. At least a portion of the sacrificial layer is removed to define a cavity such that at least a portion of the lower electrode layer is spaced apart from the insulating substrate.
摘要翻译： 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 在一个方面，牺牲层沉积在绝缘衬底上。 在牺牲层附近形成下电极层。 压电层沉积在下电极层上。 在压电层上形成上电极层。 去除牺牲层的至少一部分以限定空腔，使得下电极层的至少一部分与绝缘基板间隔开。
-
公开(公告)号：US20050229380A1
公开(公告)日：2005-10-20
申请号：US11120525
申请日：2005-05-02
申请人： Keith Deconde , Srinivasan Ganapathi , Randolph Gluck , Steve Hovey , Shiva Prakash , Christian Stoessel
发明人： Keith Deconde , Srinivasan Ganapathi , Randolph Gluck , Steve Hovey , Shiva Prakash , Christian Stoessel
CPC分类号： G06K9/00053 , G06K9/0002 , H01H1/0036 , H01H67/22 , Y10T29/49004
摘要： A method of making an integrated texture sensor for sensing a texture is described. In one embodiment, the method is directed to a sensor that that is protected from external contaminating particulates and will self-equalize using air from outside the sensor. Further combinations of such protection among various membrane switches, in combination with various types of membranes, is described. In another embodiment, a method of making a skin-texture sensor for sensing a skin texture having a plurality of ridges and a plurality of valleys is described, such that when completed, applying a ridge of the texture to a membrane switch will cause flexure of the membrane resulting in a contact between the lower electrode and the upper electrode, the contact establishing an electrical communication between said one of the row lines and said one of the column lines, whereas disposing a valley of the texture over said each membrane switch will not result in the contact between the lower electrode and the upper electrode.
摘要翻译： 描述了一种用于感测纹理的综合纹理传感器的方法。 在一个实施例中，该方法涉及一种传感器，其被保护免受外部污染的微粒，并且将使用来自传感器外部的空气进行自平衡。 描述了各种膜开关之间的这种保护的进一步组合以及各种膜的组合。 在另一个实施例中，描述了制造用于感测具有多个脊和多个谷的皮肤纹理的皮肤纹理传感器的方法，使得当完成时，将纹理脊施加到膜开关将导致弯曲 所述膜导致下电极和上电极之间的接触，所述触点在所述行线和所述列线之一中建立电连通，而在所述每个薄膜开关上设置纹理谷将不会 导致下电极和上电极之间的接触。
-
公开(公告)号：US20060273417A1
公开(公告)日：2006-12-07
申请号：US11170726
申请日：2005-06-28
IPC分类号： H01L29/84
CPC分类号： G01L1/142 , G01L1/205 , G06K9/0002
摘要： A sensor for a textured surface (e.g., a fingerprint) is provided. The sensor includes a flexible substrate and a flexible membrane supported above the substrate by one or more spacers. The sensor also includes multiple pressure sensor elements responsive to a separation between parts of the membrane and corresponding parts of the substrate. The membrane is conformable to the textured surface being sensed, so the variation in separation between substrate and membrane is representative of the textured surface being sensed. Such pressure sensors can be included in fingerprint authentication subsystems including associated integrated electronic circuitry (e.g., encryption, image processing, fingerprint matching, communication and/or location determination circuitry). Such subsystems can be included in various access control systems (e.g., smart cards and mobile electronics). Unpackaged IC chips can be included on the flexible substrate or can be disposed on a separate electronics substrate attached to the sensor.
摘要翻译： 提供用于纹理表面的传感器（例如，指纹）。 传感器包括柔性基板和通过一个或多个间隔件支撑在基板上方的柔性膜。 传感器还包括多个压力传感器元件，其响应于膜的部分与基底的相应部分之间的分离。 该膜适应于被感测的纹理表面，因此基底和膜之间的间隔的变化代表被感测的纹理表面。 这样的压力传感器可以包括在指纹认证子系统中，包括相关联的集成电子电路（例如，加密，图像处理，指纹匹配，通信和/或位置确定电路）。 这样的子系统可以包括在各种访问控制系统（例如，智能卡和移动电子设备）中。 未封装的IC芯片可以包括在柔性基板上，或者可以设置在附接到传感器的单独的电子基板上。
-
4.发明申请Magnetoresistive semiconductor pressure sensors and fingerprint identification/verification sensors using same 失效磁阻半导体压力传感器和使用相同的指纹识别/验证传感器公开(公告)号：US20050199071A1
公开(公告)日：2005-09-15
申请号：US11123598
申请日：2005-05-05
申请人： Srinivasan Ganapathi
发明人： Srinivasan Ganapathi
摘要： The invention provides an apparatus for sensing pressure that comprises a substrate and a sensor formed on the substrate. The sensor is adapted to sense pressure applied thereto and includes a support structure smaller than the substrate to result in a cavity above a portion of the substrate and a magnetoresistive sensor formed over the support structure.
摘要翻译： 本发明提供了一种用于感测压力的装置，其包括基板和形成在基板上的传感器。 传感器适于感测施加到其上的压力，并且包括小于衬底的支撑结构，以在衬底的一部分上方形成空腔，并且形成在支撑结构上方的磁阻传感器。
-
公开(公告)号：US20070289392A1
公开(公告)日：2007-12-20
申请号：US11762732
申请日：2007-06-13
IPC分类号： G01R27/08
CPC分类号： G06K9/00053 , G06K9/0002 , H01H1/0036 , H01H67/22
摘要： A sheet film protective covering for different types of contour sensing devices is described. In a preferred embodiment, this covering is a Mylar sheet film that is coated with a layer of a conductive material. The bottom surface of the Mylar film is also preferably coated with a layer of an adhesive. The sheet film covering preferably is contiguous and serves the purpose, among other things, to protect the underlying surface of the pressure-sensing device from contaminants and from electrostatic discharge, as well provide force concentration during use.
摘要翻译： 描述了用于不同类型轮廓感测装置的薄膜保护罩。 在优选的实施方案中，该覆盖物是涂覆有导电材料层的聚酯薄膜片。 聚酯薄膜的底部表面还优选涂覆有一层粘合剂。 薄膜覆盖物优选是连续的，并且用于除其他之外，保护压力感测装置的下面的表面免受污染物和静电放电，并且在使用期间提供力集中。
-
公开(公告)号：US20060272429A1
公开(公告)日：2006-12-07
申请号：US11145534
申请日：2005-06-02
IPC分类号： G01D7/00
CPC分类号： G01L1/142 , G01L1/205 , G06K9/0002
摘要： A sensor for a textured surface (e.g., a fingerprint) is provided. The sensor includes a flexible substrate and a flexible membrane supported above the substrate by one or more spacers. The sensor also includes multiple pressure sensor elements responsive to a separation between parts of the membrane and corresponding parts of the substrate. The membrane is conformable to the textured surface being sensed, so the variation in separation between substrate and membrane is representative of the textured surface being sensed. A preferred sensor array arrangement has a set of parallel substrate electrodes on the substrate facing the membrane and a set of parallel membrane electrodes on the membrane facing the substrate, where the substrate and membrane electrodes are perpendicular. The sensor array is preferably an entirely passive structure including no active electrical devices, to reduce cost. Row and column addressing circuitry can be provided as separate units (e.g., ASIC chips) to be hybrid integrated with the sensor array.
摘要翻译： 提供用于纹理表面的传感器（例如，指纹）。 传感器包括柔性基板和通过一个或多个间隔件支撑在基板上方的柔性膜。 传感器还包括多个压力传感器元件，其响应于膜的部分与基底的相应部分之间的分离。 该膜适应于被感测的纹理表面，因此基底和膜之间的间隔的变化代表被感测的纹理表面。 优选的传感器阵列布置在面向膜的基板上具有一组平行的基板电极，并且在膜上面对衬底的一组平行膜电极，其中基板和膜电极垂直。 传感器阵列优选是不包括有源电气装置的完全无源结构，以降低成本。 行和列寻址电路可以作为与传感器阵列混合集成的分离单元（例如，ASIC芯片）提供。
-
公开(公告)号：US20050223818A1
公开(公告)日：2005-10-13
申请号：US11090315
申请日：2005-03-25
CPC分类号： G06K9/00053 , G06K9/0002 , H01H1/0036 , H01H67/22
摘要： A sheet film protective covering for different types of contour sensing devices is described. In a preferred embodiment, this covering is a mylar sheet film that is coated with a layer of a conductive material. The bottom surface of the mylar film is also preferably coated with a layer of an adhesive. The sheet film covering preferably is contiguous and serves the purpose, among other things, to protect the underlying surface of the pressure-sensing device from contaminants and from electrostatic discharge, as well provide force concentration during use.
摘要翻译： 描述了用于不同类型轮廓感测装置的薄膜保护罩。 在优选的实施方案中，该覆盖物是涂覆有导电材料层的聚酯薄膜片。 聚酯薄膜的底表面也优选涂覆有一层粘合剂。 薄膜覆盖物优选是连续的，并且用于除其他之外，保护压力感测装置的下面的表面免受污染物和静电放电，并且在使用期间提供力集中。
-
8.发明申请Magnetoresistive semiconductor pressure sensors and fingerprint identification / verification sensors using same 有权磁阻半导体压力传感器和使用相同的指纹识别/验证传感器公开(公告)号：US20050199072A1
公开(公告)日：2005-09-15
申请号：US11123660
申请日：2005-05-05
申请人： Srinivasan Ganapathi
发明人： Srinivasan Ganapathi
摘要： The present invention is directed to a method of sensing pressure in which applied pressure causes a change in the magnetization vector of a magnetoresistive layer within the device and a corresponding change in resistance. The method includes providing a sensing device with a sensor including plurality of layers, the plurality of layers comprising a non magnetic conducting layer disposed between a magnetoresistive layer with non-zero magnetostriction and a ferromagnetic biasing layer. Once provided, the method then includes sensing a resistance in the plurality of layers upon application of pressure to the sensing device, the applied pressure causing the magnetization vector of the magnetoresistive layer to change and thereby result in a change in resistance.
摘要翻译： 本发明涉及一种感测压力的方法，其中施加的压力导致装置内的磁阻层的磁化矢量的变化和相应的电阻变化。 该方法包括提供具有包括多个层的传感器的感测装置，所述多个层包括设置在具有非零磁致伸缩的磁阻层和铁磁偏置层之间的非导磁层。 一旦提供，该方法然后包括在对感测装置施加压力时感测多个层中的电阻，施加的压力导致磁阻层的磁化矢量改变，从而导致电阻的变化。
-
-
-
-
-
-
-
搜索结果
8 条记录 (耗时 0.035 秒)