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公开(公告)号：US06261961B1
公开(公告)日：2001-07-17
申请号：US09258917
申请日：1999-03-01
IPC分类号： H01L21311
CPC分类号： H01L21/32139
摘要： A method for forming nuclear tracks having a width on the order of 100-200 nm in nuclear trackable materials, such as polycarbonate (LEXAN) without causing delamination of the LEXAN. The method utilizes an adhesion film having a inert oxide which allows the track to be sufficiently widened to >200 nm without delamination of the nuclear trackable materials. The adhesion film may be composed of a metal such as Cr, Ni, Au, Pt, or Ti, or composed of a dielectric having a stable surface, such as silicon dioxide (SiO2), silicon nitride (SiNx), and aluminum oxide (AlO). The adhesion film can either be deposited on top of the gate metal layer, or if the properties of the adhesion film are adequate, it can be used as the gate layer. Deposition of the adhesion film is achieved by standard techniques, such as sputtering or evaporation.
摘要翻译： 在核可追溯材料如聚碳酸酯（LEXAN）中形成宽度为100-200nm的核轨道的方法，而不会引起LEXAN的分层。 该方法利用具有惰性氧化物的粘合膜，其允许轨道被充分地扩大到> 200nm，而不会使核可追踪材料分层。 粘合膜可以由诸如二氧化硅（SiO 2），氮化硅（SiN x）和氧化铝（SiO 2）等具有稳定表面的电介质组成的诸如Cr，Ni，Au，Pt或Ti的金属组成， AlO）。 粘附膜可以沉积在栅极金属层的顶部，或者如果粘附膜的性质足够，则可以将其用作栅极层。 通过标准技术如溅射或蒸发来实现粘附膜的沉积。
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2.发明授权Use of a hard mask for formation of gate and dielectric via nanofilament field emission devices 失效使用硬掩模通过纳米丝场发射器件形成栅极和电介质公开(公告)号：US06193870B1
公开(公告)日：2001-02-27
申请号：US08847085
申请日：1997-05-01
IPC分类号： C25D502
CPC分类号： H01J9/025 , C25D1/04 , H01L21/0332 , H01L21/31116 , H01L21/31144
摘要： A process for fabricating a nanofilament field emission device in which a via in a dielectric layer is self-aligned to gate metal via structure located on top of the dielectric layer. By the use of a hard mask layer located on top of the gate metal layer, inert to the etch chemistry for the gate metal layer, and in which a via is formed by the pattern from etched nuclear tracks in a trackable material, a via is formed by the hard mask will eliminate any erosion of the gate metal layer during the dielectric via etch. Also, the hard mask layer will protect the gate metal layer while the gate structure is etched back from the edge of the dielectric via, if such is desired. This method provides more tolerance for the electroplating of a nanofilament in the dielectric via and sharpening of the nanofilament.
摘要翻译： 一种制造纳米丝场发射器件的方法，其中电介质层中的通孔与位于介电层顶部的栅极金属通孔结构自对准。 通过使用位于栅极金属层顶部的硬掩模层，对栅极金属层的蚀刻化学物质是惰性的，并且其中通过可追踪材料中蚀刻的核磁道的图案形成通孔，通孔是 由硬掩模形成将消除电介质通孔蚀刻期间栅极金属层的任何侵蚀。 此外，如果需要的话，硬掩模层将保护栅极金属层，同时栅极结构从电介质通孔的边缘被回蚀。 该方法提供了对纳米丝在电介质通孔中的电镀和纳米丝的锐化的更大的公差。
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公开(公告)号：US6045678A
公开(公告)日：2000-04-04
申请号：US847088
申请日：1997-05-01
CPC分类号： C25D7/12
摘要： A process for fabricating a nanofilament field emission device. The process enables the formation of high aspect ratio, electroplated nanofilament structure devices for field emission displays wherein a via is formed in a dielectric layer and is self-aligned to a via in the gate metal structure on top of the dielectric layer. The desired diameter of the via in the dielectric layer is on the order of 50-200 nm, with an aspect ratio of 5-10. In one embodiment, after forming the via in the dielectric layer, the gate metal is passivated, after which a plating enhancement layer is deposited in the bottom of the via, where necessary. The nanofilament is then electroplated in the via, followed by removal of the gate passification layer, etch back of the dielectric, and sharpening of the nanofilament. A hard mask layer may be deposited on top of the gate metal and removed following electroplating of the nanofilament.
摘要翻译： 一种制造纳米丝场发射器件的方法。 该方法能够形成高纵横比，用于场致发射显示器的电镀纳米丝结构器件，其中通孔形成在电介质层中，并且与电介质层顶部的栅极金属结构中的通孔自对准。 电介质层中通孔的理想直径约为50-200nm，纵横比为5-10。 在一个实施例中，在电介质层中形成通孔之后，栅极金属被钝化，之后必要时在通孔的底部沉积电镀增强层。 然后将纳米丝电镀在通孔中，随后除去栅极钝化层，回蚀电介质，并使纳米丝的锐化。 硬掩模层可以沉积在栅极金属的顶部上，并在纳米丝的电镀之后去除。
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公开(公告)号：US07732086B2
公开(公告)日：2010-06-08
申请号：US11153692
申请日：2005-06-14
CPC分类号： H01M8/0239 , H01M4/8605 , H01M4/921 , H01M8/0221 , H01M8/0245 , H01M8/0247 , H01M8/0256 , H01M8/0258 , H01M8/026 , H01M8/0267 , H01M8/1004 , H01M8/1009 , H01M8/1018 , H01M8/241 , H01M8/2483
摘要： Described herein are processes for fabricating microfluidic fuel cell systems with embedded components in which micron-scale features are formed by bonding layers of DuPont Kapton™ polyimide laminate. A microfluidic fuel cell system fabricated using this process is also described.
摘要翻译： 本文描述了用于制造具有嵌入式部件的微流体燃料电池系统的方法，其中通过粘合DuPont Kapton TM聚酰亚胺层压板的层形成微米级特征。 还描述了使用该方法制造的微流体燃料电池系统。
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公开(公告)号：US07534402B2
公开(公告)日：2009-05-19
申请号：US11196634
申请日：2005-08-02
申请人： Jeffrey D. Morse , Alan Jankowski
发明人： Jeffrey D. Morse , Alan Jankowski
CPC分类号： B01J19/0093 , B01J2219/00783 , B01J2219/00824 , B01J2219/00828 , B01J2219/00831 , B01J2219/00835 , B01J2219/00844 , B01J2219/00871 , B01J2219/00873
摘要： Disclosed is a chemical microreactor that provides a means to generate hydrogen fuel from liquid sources such as ammonia, methanol, and butane through steam reforming processes when mixed with an appropriate amount of water. The microreactor contains capillary microchannels with integrated resistive heaters to facilitate the occurrence of catalytic steam reforming reactions. Two distinct embodiment styles are discussed. One embodiment style employs a packed catalyst capillary microchannel and at least one porous membrane. Another embodiment style employs a porous membrane with a large surface area or a porous membrane support structure containing a plurality of porous membranes having a large surface area in the aggregate, i.e., greater than about 1 m2/cm3. Various methods to form packed catalyst capillary microchannels, porous membranes and porous membrane support structures are also disclosed.
摘要翻译： 公开了一种化学微反应器，其提供了当与适量的水混合时通过蒸汽重整过程从液体源例如氨，甲醇和丁烷产生氢燃料的手段。 微反应器包含具有集成电阻加热器的毛细管微通道，以促进催化蒸汽重整反应的发生。 讨论了两种不同的实施方式。 一种实施方案采用填充催化剂毛细管微通道和至少一种多孔膜。 另一种实施方案采用具有大表面积的多孔膜或多孔膜支撑结构，其包含多个聚集体中具有大表面积的多孔膜，即大于约1m 2 / cm 3。 还公开了形成填充催化剂毛细管微通道，多孔膜和多孔膜支撑结构的各种方法。
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公开(公告)号：US06960235B2
公开(公告)日：2005-11-01
申请号：US10007412
申请日：2001-12-05
申请人： Jeffrey D. Morse , Alan Jankowski
发明人： Jeffrey D. Morse , Alan Jankowski
CPC分类号： B01J19/0093 , B01J2219/00783 , B01J2219/00824 , B01J2219/00828 , B01J2219/00831 , B01J2219/00835 , B01J2219/00844 , B01J2219/00871 , B01J2219/00873
摘要： A chemical microreactor suitable for generation of hydrogen fuel from liquid sources such as ammonia, methanol, and butane through steam reforming processes when mixed with an appropriate amount of water contains capillary microchannels with integrated resistive heaters to facilitate the occurrence of catalytic steam reforming reactions. One such microreactor employs a packed catalyst capillary microchannel and at least one porous membrane. Another employs a porous membrane with a large surface area or a porous membrane support structure containing a plurality of porous membranes having a large surface area in the aggregate, i.e., greater than about 1 m2/cm3. The packed catalyst capillary microchannels, porous membranes and porous membrane support structures may be formed by a variety of methods.
摘要翻译： 当与适量的水混合时，适用于通过蒸汽重整过程从液体源（如氨，甲醇和丁烷）产生氢燃料的化学微反应器含有集成电阻加热器的毛细管微通道，以促进催化蒸汽重整反应的发生。 一个这样的微反应器采用填充催化剂毛细管微通道和至少一个多孔膜。 另一种采用具有大表面积的多孔膜或多孔膜支撑结构，其包含多个聚集体中具有大表面积的多孔膜，即大于约1m 2 / cm 2 > 3 。 填充的催化剂毛细管微通道，多孔膜和多孔膜支撑结构可以通过多种方法形成。
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公开(公告)号：US06821666B2
公开(公告)日：2004-11-23
申请号：US09967145
申请日：2001-09-28
IPC分类号： H01M810
CPC分类号： H01M8/247 , H01M8/04007 , H01M8/2404 , H01M8/241 , Y10T29/49108 , Y10T29/4911 , Y10T29/49112 , Y10T29/49114 , Y10T29/53135 , Y10T156/1057
摘要： A MEMS-based fuel cell package and method thereof is disclosed. The fuel cell package comprises seven layers: (1) a sub-package fuel reservoir interface layer, (2) an anode manifold support layer, (3) a fuel/anode manifold and resistive heater layer, (4) a Thick Film Microporous Flow Host Structure layer containing a fuel cell, (5) an air manifold layer, (6) a cathode manifold support structure layer, and (7) a cap. Fuel cell packages with more than one fuel cell are formed by positioning stacks of these layers in series and/or parallel. The fuel cell package materials such as a molded plastic or a ceramic green tape material can be patterned, aligned and stacked to form three dimensional microfluidic channels that provide electrical feedthroughs from various layers which are bonded together and mechanically support a MEMOS-based miniature fuel cell. The package incorporates resistive heating elements to control the temperature of the fuel cell stack. The package is fired to form a bond between the layers and one or more microporous flow host structures containing fuel cells are inserted within the Thick Film Microporous Flow Host Structure layer of the package.
摘要翻译： 公开了一种基于MEMS的燃料电池组件及其方法。 燃料电池组件包括七层：（1）一个子包装燃料储存器界面层，（2）一个阳极歧管支撑层，（3）燃料/阳极歧管和电阻加热器层，（4）厚膜微孔流 包含燃料电池的主体结构层，（5）空气歧管层，（6）阴极歧管支撑结构层，和（7）盖。 具有多于一个燃料电池的燃料电池组件通过将这些层的堆叠定位成串联和/或平行而形成。 诸如模制塑料或陶瓷生胶带材料的燃料电池封装材料可以被图案化，对准和堆叠以形成三维微流体通道，其提供来自各种层的电馈通，这些层通过粘合在一起并机械地支撑基于MEMOS的微型燃料电池 。 该封装包含电阻加热元件以控制燃料电池堆的温度。 烧结包装以形成层之间的结合，并且将一个或多个含有燃料电池的微孔流动主体结构插入到包装的厚膜微孔流动主体结构层内。
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公开(公告)号：US5051804A
公开(公告)日：1991-09-24
申请号：US444339
申请日：1989-12-01
IPC分类号： H01L31/0304 , H01L31/08 , H01L31/09
CPC分类号： H01L31/03046 , H01L31/085 , H01L31/09 , Y02E10/544
摘要： The present invention provides a photodetector having an advantageous combination of sensitivity and speed; it has a high sensitivity while retaining high speed. In a preferred embodiment, visible light is detected, but in some embodiments, x-rays can be detected, and in other embodiments infrared can be detected. The present invention comprises a photodetector having an active layer, and a recombination layer. The active layer has a surface exposed to light to be detected, and comprises a semiconductor, having a bandgap graded so that carriers formed due to interaction of the active layer with the incident radiation tend to be swept away from the exposed surface. The graded semiconductor material in the active layer preferably comprises Al.sub.1-x Ga.sub.x As. An additional sub-layer of graded In.sub.1-y Ga.sub.y As may be included between the Al.sub.1-x Ga.sub.x As layer and the recombination layer. The recombination layer comprises a semiconductor material having a short recombination time such as a defective GaAs layer grown in a low temperature process. The recombination layer is positioned adjacent to the active layer so that carriers from the active layer tend to be swept into the recombination layer. In an embodiment, the photodetector may comprise one or more additional layers stacked below the active and recombination layers. These additional layers may include another active layer and another recombination layer to absorb radiation not absorbed while passing through the first layers. A photodetector having a stacked configuration may have enhanced sensitivity and responsiveness at selected wavelengths such as infrared.
摘要翻译： 本发明提供了具有灵敏度和速度的有利组合的光电检测器; 它具有高灵敏度，同时保持高速度。 在优选实施例中，检测到可见光，但是在一些实施例中，可以检测x射线，并且在其它实施例中可以检测到红外线。 本发明包括具有活性层的光电检测器和复合层。 有源层具有暴露于待检测光的表面，并且包括半导体，具有带隙分级，使得由于活性层与入射辐射的相互作用而形成的载流子倾向于从暴露表面扫过。 活性层中的分级半导体材料优选包含Al1-xGaxA。 在Al1-xGaxAs层和复合层之间可以包括附加的分级In1-yGayAs子层。 复合层包括具有短复合时间的半导体材料，例如在低温工艺中生长的不良GaAs层。 复合层定位成与有源层相邻，使得来自有源层的载流子倾向于被扫入复合层。 在一个实施例中，光电检测器可以包括在活性和复合层之下堆叠的一个或多个附加层。 这些附加层可以包括另一个活性层和另一个复合层，以吸收在通过第一层时不被吸收的辐射。 具有堆叠配置的光电检测器可以具有增强的灵敏度和选择的波长例如红外线的响应性。
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9.发明授权MEMS-based fuel cells with integrated catalytic fuel processor and method thereof 有权具有综合催化燃料处理器的基于MEMS的燃料电池及其方法公开(公告)号：US07993785B2
公开(公告)日：2011-08-09
申请号：US10612226
申请日：2003-07-01
IPC分类号： H01M8/06
CPC分类号： H01M8/2425 , H01M8/0625 , H01M8/1231 , H01M8/1286 , H01M8/2483
摘要： Described herein is a means to incorporate catalytic materials into the fuel flow field structures of MEMS-based fuel cells, which enable catalytic reforming of a hydrocarbon based fuel, such as methane, methanol, or butane. Methods of fabrication are also disclosed.
摘要翻译： 本文描述的是将催化材料引入到基于MEMS的燃料电池的燃料流场结构中的手段，其能够使烃类燃料如甲烷，甲醇或丁烷进行催化重整。 还公开了制造方法。
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公开(公告)号：US07771887B2
公开(公告)日：2010-08-10
申请号：US12409392
申请日：2009-03-23
申请人： Jeffrey D. Morse , Alan F. Jankowski , Conrad Yu
发明人： Jeffrey D. Morse , Alan F. Jankowski , Conrad Yu
CPC分类号： H01M8/04216 , H01M8/065 , Y10T29/49108 , Y10T29/4911 , Y10T29/49115 , Y10T29/49982
摘要： An apparatus having a first substrate having (1) a cavity, (2) one or more resistive heaters, and (3) one or more coatings forming a diffusion barrier to hydrogen; a second substrate having (1) an outlet valve comprising a pressure relief structure and (2) one or more coatings forming a diffusion barrier to hydrogen, wherein said second substrate is coupled to said first substrate forming a sealed volume in said cavity; a metal hydride material contained within said cavity; and a gas distribution system formed by coupling a microfluidic interconnect to said pressure relief structure. Additional apparatuses and methods are also disclosed.
摘要翻译： 一种具有第一衬底的装置，其具有（1）空腔，（2）一个或多个电阻加热器，以及（3）形成对氢的扩散阻挡层的一个或多个涂层; 第二衬底，具有（1）包括压力释放结构的出口阀和（2）形成对氢的扩散阻挡层的一个或多个涂层，其中所述第二衬底耦合到所述第一衬底，在所述空腔中形成密封体积; 包含在所述空腔内的金属氢化物材料; 以及通过将微流体互连件耦合到所述压力释放结构而形成的气体分配系统。 还公开了附加的装置和方法。
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