Structured abrasive article, method of making the same, and use in wafer planarization
    3.
    发明授权
    Structured abrasive article, method of making the same, and use in wafer planarization 有权
    结构化磨料制品,其制造方法,并用于晶片平面化

    公开(公告)号:US08251774B2

    公开(公告)日:2012-08-28

    申请号:US12539798

    申请日:2009-08-12

    IPC分类号: B24B49/00

    摘要: A structured abrasive article comprises an at least translucent film backing and an abrasive layer disposed on the backing. The abrasive layer comprises a plurality of shaped abrasive composites. The shaped abrasive composites comprise abrasive particles dispersed in a binder. The abrasive particles consist essentially of ceria particles having an average primary particle size of less than 100 nanometers. The binder comprises a polyether acid and a reaction product of components comprising a carboxylic(meth)acrylate and a poly(meth)acrylate, and, based on a total weight of the abrasive layer, the abrasive particles are present in an amount of at least 70 percent by weight. Methods of making and using the structured abrasive article are also disclosed.

    摘要翻译: 结构化磨料制品包括至少半透明的膜背衬和设置在背衬上的研磨层。 研磨层包括多个成形的磨料复合材料。 成形磨料复合材料包括分散在粘合剂中的磨料颗粒。 研磨颗粒主要由平均初级粒径小于100纳米的二氧化铈颗粒组成。 粘合剂包括聚醚酸和包含羧酸(甲基)丙烯酸酯和聚(甲基)丙烯酸酯的组分的反应产物,并且基于研磨层的总重量,磨料颗粒的量至少为 70重量%。 还公开了制造和使用结构化磨料制品的方法。

    STRUCTURED ABRASIVE ARTICLE, METHOD OF MAKING THE SAME, AND USE IN WAFER PLANARIZATION
    4.
    发明申请
    STRUCTURED ABRASIVE ARTICLE, METHOD OF MAKING THE SAME, AND USE IN WAFER PLANARIZATION 有权
    结构化磨砂制品,其制造方法和在平面布置中的应用

    公开(公告)号:US20100056024A1

    公开(公告)日:2010-03-04

    申请号:US12539798

    申请日:2009-08-12

    IPC分类号: B24B49/12 C09K3/14 B24D3/04

    摘要: A structured abrasive article comprises an at least translucent film backing and an abrasive layer disposed on the backing. The abrasive layer comprises a plurality of shaped abrasive composites. The shaped abrasive composites comprise abrasive particles dispersed in a binder. The abrasive particles consist essentially of ceria particles having an average primary particle size of less than 100 nanometers. The binder comprises a polyether acid and a reaction product of components comprising a carboxylic(meth)acrylate and a poly(meth)acrylate, and, based on a total weight of the abrasive layer, the abrasive particles are present in an amount of at least 70 percent by weight. Methods of making and using the structured abrasive article are also disclosed.

    摘要翻译: 结构化磨料制品包括至少半透明的膜背衬和设置在背衬上的研磨层。 研磨层包括多个成形的磨料复合材料。 成形磨料复合材料包括分散在粘合剂中的磨料颗粒。 研磨颗粒主要由平均初级粒径小于100纳米的二氧化铈颗粒组成。 粘合剂包括聚醚酸和包含羧酸(甲基)丙烯酸酯和聚(甲基)丙烯酸酯的组分的反应产物,并且基于研磨层的总重量,磨料颗粒的量至少为 70重量%。 还公开了制造和使用结构化磨料制品的方法。

    Composite abrasive particles and method of manufacture
    5.
    发明授权
    Composite abrasive particles and method of manufacture 有权
    复合磨料颗粒及其制造方法

    公开(公告)号:US06645624B2

    公开(公告)日:2003-11-11

    申请号:US09942007

    申请日:2001-08-29

    IPC分类号: B32B516

    摘要: The present application discloses an agglomerate. The agglomerate comprises a crystalline matrix. The agglomerate may additionally comprise abrasive particles. The agglomerate has a normalized bulk density of less than about 0.38. The present application additionally discloses a method of manufacturing the agglomerate. The agglomerate is manufactured by forming a mixture comprising an abrasive particle with a sol, the sol comprising an oxide and water and introducing the mixture into a spray dryer. The mixture is then dried in the spray dryer. The mixture is then fired, for example in an oven. The resulting agglomerates comprise abrasive particles retained within a crystalline matrix of the oxide. The present invention additionally discloses methods of using the agglomerates of the resent invention.

    摘要翻译: 本申请公开了一种附聚物。 附聚物包含结晶基质。 附聚物可另外包含磨料颗粒。 附聚物的标准化堆积密度小于约0.38。本申请另外公开了一种制造附聚物的方法。 通过形成包含磨料颗粒与溶胶的混合物,所述溶胶包含氧化物和水,并将混合物引入喷雾干燥器来制造附聚物。 然后将混合物在喷雾干燥器中干燥。 然后将混合物烧制,例如在烘箱中。 所得到的附聚物包含保留在氧化物的结晶基质内的研磨颗粒。本发明另外公开了使用本发明的附聚物的方法。

    Polishing pad with porous elements and method of making and using the same
    6.
    发明授权
    Polishing pad with porous elements and method of making and using the same 有权
    具有多孔元件的抛光垫及其制造和使用方法

    公开(公告)号:US08821214B2

    公开(公告)日:2014-09-02

    申请号:US13000986

    申请日:2009-06-26

    申请人: William D. Joseph

    发明人: William D. Joseph

    IPC分类号: B24B37/26 B24B37/04

    摘要: The disclosure is directed to polishing pads with porous polishing elements, and to methods of making and using such pads in a polishing process. In one exemplary embodiment, the polishing pad includes a multiplicity of polishing elements, at least some of which are porous, each polishing element affixed to a support layer so as to restrict lateral movement of the polishing elements with respect to one or more of the other polishing elements, but remaining moveable in an axis normal to a polishing surface of the polishing elements. In certain embodiments, the polishing pad may include a guide plate positioned to arrange and optionally affix the plurality of polishing elements on the support layer, and additionally, a polishing composition distribution layer. In some embodiments, the pores are distributed throughout substantially the entire porous polishing element. In other embodiments, the pores are distributed substantially at the polishing surface of the elements.

    摘要翻译: 本发明涉及具有多孔抛光元件的抛光垫,以及在抛光过程中制造和使用这种垫的方法。 在一个示例性实施例中,抛光垫包括多个抛光元件,至少其中一些抛光元件是多孔的,每个抛光元件固定在支撑层上,以便限制抛光元件相对于其它一个或多个的横向运动 抛光元件,但是可以在垂直于抛光元件的抛光表面的轴上移动。 在某些实施例中,抛光垫可以包括定位成布置并任选地将多个抛光元件固定在支撑层上的引导板,另外还包括抛光组合物分布层。 在一些实施方案中,孔分布在基本上整个多孔抛光元件的整个部分。 在其它实施例中,孔基本上分布在元件的抛光表面上。

    POLISHING PADS INCLUDING PHASE-SEPARATED POLYMER BLEND AND METHOD OF MAKING AND USING THE SAME
    7.
    发明申请
    POLISHING PADS INCLUDING PHASE-SEPARATED POLYMER BLEND AND METHOD OF MAKING AND USING THE SAME 有权
    包括相分离聚合物混合物的抛光垫及其制备和使用方法

    公开(公告)号:US20120315830A1

    公开(公告)日:2012-12-13

    申请号:US13514741

    申请日:2010-12-28

    IPC分类号: B24D11/00 B24D18/00 B24B1/00

    CPC分类号: B24B37/22 B24B37/26

    摘要: Polishing pads containing a phase-separated polymer blend, and methods of making and using such pads in a polishing process. In one exemplary embodiment, the polishing pads include a multiplicity of polishing elements integrally formed in a sheet. In another exemplary embodiment, the polishing elements are bonded to a support layer, for example by thermal bonding. In certain embodiments, the polishing pad may additionally include a compliant layer affixed to the support layer, and optionally, a polishing composition distribution layer.

    摘要翻译: 包含相分离的聚合物共混物的抛光垫,以及在抛光过程中制造和使用这种垫的方法。 在一个示例性实施例中,抛光垫包括整体形成在片材中的多个抛光元件。 在另一个示例性实施例中,抛光元件例如通过热粘合而结合到支撑层。 在某些实施例中,抛光垫可以另外包括固定到支撑层的柔顺层,以及任选的抛光组合物分布层。

    Polishing pads including phase-separated polymer blend and method of making and using the same
    9.
    发明授权
    Polishing pads including phase-separated polymer blend and method of making and using the same 有权
    抛光垫,包括相分离的聚合物共混物及其制备和使用方法

    公开(公告)号:US09162340B2

    公开(公告)日:2015-10-20

    申请号:US13514741

    申请日:2010-12-28

    IPC分类号: B24B37/00 B24B37/22 B24B37/26

    CPC分类号: B24B37/22 B24B37/26

    摘要: Polishing pads containing a phase-separated polymer blend, and methods of making and using such pads in a polishing process. In one exemplary embodiment, the polishing pads include a multiplicity of polishing elements integrally formed in a sheet. In another exemplary embodiment, the polishing elements are bonded to a support layer, for example by thermal bonding. In certain embodiments, the polishing pad may additionally include a compliant layer affixed to the support layer, and optionally, a polishing composition distribution layer.

    摘要翻译: 包含相分离的聚合物共混物的抛光垫,以及在抛光过程中制造和使用这种垫的方法。 在一个示例性实施例中,抛光垫包括整体形成在片材中的多个抛光元件。 在另一个示例性实施例中,抛光元件例如通过热粘合而结合到支撑层。 在某些实施例中,抛光垫可以另外包括固定到支撑层的柔顺层,以及任选的抛光组合物分布层。

    ORGANIC PARTICULATE LOADED POLISHING PADS AND METHOD OF MAKING AND USING THE SAME
    10.
    发明申请
    ORGANIC PARTICULATE LOADED POLISHING PADS AND METHOD OF MAKING AND USING THE SAME 审中-公开
    有机颗粒加载抛光垫及其制造和使用方法

    公开(公告)号:US20130102231A1

    公开(公告)日:2013-04-25

    申请号:US13517367

    申请日:2010-12-28

    IPC分类号: B24D11/00 B24B37/24

    摘要: Polishing pads including organic particulates in a continuous polymer phase, and methods of making and using such pads in a polishing process. In one exemplary embodiment, the polishing pads include a multiplicity of polishing elements integrally formed in a sheet. In another exemplary embodiment, the polishing elements are bonded to a support layer, for example by thermal bonding. In certain embodiments, the polishing pad may additionally include a compliant layer affixed to the support layer, and optionally, a polishing composition distribution layer.

    摘要翻译: 抛光垫包括连续聚合物相中的有机颗粒,以及在抛光过程中制造和使用这种垫的方法。 在一个示例性实施例中,抛光垫包括整体形成在片材中的多个抛光元件。 在另一个示例性实施例中,抛光元件例如通过热粘合而结合到支撑层。 在某些实施例中,抛光垫可以另外包括固定到支撑层的柔顺层,以及任选的抛光组合物分布层。