公开(公告)号：US07258838B2

公开(公告)日：2007-08-21

申请号：US10367075

申请日：2003-02-14

申请人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

发明人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

IPC分类号： H01L29/00 ,  H01L47/00 ,  G01N15/06 ,  G01N33/00 ,  G01N33/48

CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。

公开(公告)号：US06783643B2

公开(公告)日：2004-08-31

申请号：US10186105

申请日：2002-06-27

申请人： Jene A. Golovchenko ,  Daniel Branton ,  Michael J. Aziz ,  Jiali Li ,  Derek M. Stein ,  Ciaran J. McMullan

发明人： Jene A. Golovchenko ,  Daniel Branton ,  Michael J. Aziz ,  Jiali Li ,  Derek M. Stein ,  Ciaran J. McMullan

IPC分类号： C23C1434

CPC分类号： B81C1/00626 ,  B81C2201/0143 ,  G01N33/48721 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

摘要： A solid state structure having a surface is provided and exposed to a flux, F, of incident ions under conditions that are selected based on: ∂ ∂ t ⁢ C ⁡ ( r , t ) = F ⁢   ⁢ Y 1 + D ⁢ ∇ 2 ⁢ C - C τ trap - F ⁢   ⁢ C ⁢   ⁢ σ C , where C is concentration of mobile adatoms at structure surface, r is vector surface position, t is time, T1 is number of adatoms created per incident ion, D is adatom diffusivity, &tgr;trap is average lifetime of an adatom before adatom annihilation occurs at a structure surface defect characteristic of structure material, and &sgr;C is cross-section for adatom annihilation by incident ions characteristic of selected ion exposure conditions. Ion exposure condition selection controls sputtering of the structure surface by incident ions to transport, within the structure including the structure surface, structure material to a feature location, in response to the ion flux exposure, to produce a feature substantially by locally adding structure material to the feature location.

摘要翻译： 具有表面的固体结构被提供并暴露于入射离子的通量F，条件是基于以下条件选择：其中C是结构表面处的移动吸附原子的浓度，r是向量表面位置，t是时间，T1 是每个入射离子产生的吸附原子数，D是吸附原子扩散系数，tautrap是在结构材料的结构表面缺陷特征下发生吸附原子湮灭之前的吸收原子的平均寿命，σC是被选择的入射离子特征的吸附原子湮灭的横截面 离子暴露条件。 离子曝光条件选择控制通过入射离子对结构表面的溅射，以在包括结构表面的结构内将结构材料转移到特征位置，以响应于离子通量暴露而产生基本上通过局部添加结构材料的特征 功能位置。

公开(公告)号：US06464842B1

公开(公告)日：2002-10-15

申请号：US09599137

申请日：2000-06-22

申请人： Jene A. Golovchenko ,  Daniel Branton ,  Derek M. Stein ,  Ciaran J. McMullan ,  Jiali Li

发明人： Jene A. Golovchenko ,  Daniel Branton ,  Derek M. Stein ,  Ciaran J. McMullan ,  Jiali Li

IPC分类号： C23C1434

CPC分类号： B81C99/0065 ,  G01N33/48721

摘要： There is provided controlled fabrication of a solid state structural feature on a solid state structure by exposing the structure to a fabrication process environment the conditions of which are selected to produce a prespecified feature in the structure. A physical detection species is directed toward a designated structure location during process environment exposure of the structure, and the detection species is detected in a trajectory from traversal of the designated structure location, to indicate changing physical dimensions of the prespecified feature. The fabrication process environment is then controlled in response to the physical species detection to fabricate the structural feature. Also provided is a method for controlling a physical dimension of a structural feature or to form a feature by exposing the structure to a flux of ions at a selected structure temperature, the exposure conditions being controlled to cause formation of the feature or to cause at least one physical dimension of the feature to be changed, substantially by transport of material of the structure to the structural feature in response to the ion flux exposure.

摘要翻译： 通过将结构暴露于制造工艺环境中来提供在固态结构上的固态结构特征的受控制造，其制造过程环境被选择以在结构中产生预先指定的特征。 在结构的过程环境暴露期间，物理检测物质指向指定的结构位置，并且在从指定结构位置的遍历的轨迹中检测检测物种，以指示预先指定的特征的变化的物理尺寸。 然后响应于物理物种检测来控制制造工艺环境以制造结构特征。 还提供了一种用于通过在所选择的结构温度下将结构暴露于离子通量来控制结构特征的物理尺寸或形成特征的方法，所述暴露条件被控制以引起特征的形成或至少引起 基本上通过将结构材料转移到响应于离子通量暴露的结构特征而要改变的特征的一个物理尺寸。

公开(公告)号：US07118657B2

公开(公告)日：2006-10-10

申请号：US10695381

申请日：2003-10-28

申请人： Jene A. Golovchenko ,  Derek M. Stein ,  Jiali Li

发明人： Jene A. Golovchenko ,  Derek M. Stein ,  Jiali Li

IPC分类号： C32C14/34

CPC分类号： B81C1/00626 ,  B01L3/5027 ,  B24B37/013 ,  B81C99/004 ,  B81C2201/0143 ,  G01N33/48721 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

摘要： For controlling a physical dimension of a solid state structural feature, a solid state structure is provided, having a surface and having a structural feature. The structure is exposed to a first periodic flux of ions having a first exposure duty cycle characterized by a first ion exposure duration and a first nonexposure duration for the first duty cycle, and then at a second periodic flux of ions having a second exposure duty cycle characterized by a second ion exposure duration and a second nonexposure duration that is greater than the first nonexposure duration, for the second duty cycle, to cause transport, within the structure including the structure surface, of material of the structure to the structural feature in response to the ion flux exposure to change at least one physical dimension of the feature substantially by locally adding material of the structure to the feature.

摘要翻译： 为了控制固态结构特征的物理尺寸，提供具有表面并具有结构特征的固态结构。 该结构暴露于具有第一曝光占空比的第一周期性通量的离子，其特征在于第一占空比的第一离子曝光持续时间和第一非曝光持续时间，然后在具有第二曝光占空比的第二周期通量的离子 其特征在于，对于所述第二占空比，所述第二离子曝光持续时间和第二非曝光持续时间大于所述第一非曝光持续时间，以使所述结构的材料在所述结构的结构体内包括所述结构表面在所述结构特征中的响应 到离子通量暴露基本上通过将结构的材料局部添加到特征来改变特征的至少一个物理尺寸。

公开(公告)号：US20110204219A1

公开(公告)日：2011-08-25

申请号：US13056755

申请日：2009-07-30

申请人： Derek M. Stein

发明人： Derek M. Stein

IPC分类号： H01J49/26 ,  B01J19/08

CPC分类号： B01J19/087 ,  B01D67/006 ,  B01J19/121 ,  C12Q1/6869 ,  C12Q1/6872 ,  H01J49/0409 ,  C12Q2565/631 ,  C12Q2565/627 ,  C12Q2523/303 ,  C12Q2523/307 ,  C12Q2523/319 ,  C12Q2527/109

摘要： The present invention generally relates to mass spectrometry and related techniques, and in some cases, to determining single species using mass spectrometry. In certain instances, polymers such as DNA or RNA can also be sequenced. Certain embodiments of the invention relate to passing a polymer, such as DNA, RNA, a protein, a polypeptide, a polysaccharide, etc., through a pore and cleaving the polymer in sequence. For instance, the polymer may be cleaved using a laser or an electric field. In some embodiments, a property of at least one subunit of a polymer is determined using mass spectrometry. In some embodiments, a single ion (which may be a subunit of a polymer, or an ion based on another species) can be isolated in a mass spectrometer and a signal generated from the single ion.

摘要翻译： 本发明一般涉及质谱法和相关技术，在某些情况下，使用质谱法测定单一物质。 在某些情况下，聚合物如DNA或RNA也可以测序。 本发明的某些实施方案涉及使聚合物如DNA，RNA，蛋白质，多肽，多糖等通过孔并依次切割聚合物。 例如，可以使用激光或电场来切割聚合物。 在一些实施方案中，使用质谱测定聚合物的至少一个亚基的性质。 在一些实施方案中，可以在质谱仪中分离单个离子（其可以是聚合物的亚单位或基于另一物质的离子）和从单一离子产生的信号。

公开(公告)号：US08426807B2

公开(公告)日：2013-04-23

申请号：US13056755

申请日：2009-07-30

申请人： Derek M. Stein

发明人： Derek M. Stein

IPC分类号： G01N33/559 ,  C12Q1/68

CPC分类号： B01J19/087 ,  B01D67/006 ,  B01J19/121 ,  C12Q1/6869 ,  C12Q1/6872 ,  H01J49/0409 ,  C12Q2565/631 ,  C12Q2565/627 ,  C12Q2523/303 ,  C12Q2523/307 ,  C12Q2523/319 ,  C12Q2527/109

摘要： The present invention generally relates to mass spectrometry and related techniques, and in some cases, to determining single species using mass spectrometry. In certain instances, polymers such as DNA or RNA can also be sequenced. Certain embodiments of the invention relate to passing a polymer, such as DNA, RNA, a protein, a polypeptide, a polysaccharide, etc., through a pore and cleaving the polymer in sequence. For instance, the polymer may be cleaved using a laser or an electric field. In some embodiments, a property of at least one subunit of a polymer is determined using mass spectrometry. In some embodiments, a single ion (which may be a subunit of a polymer, or an ion based on another species) can be isolated in a mass spectrometer and a signal generated from the single ion.

摘要翻译： 本发明一般涉及质谱法和相关技术，在某些情况下，使用质谱法测定单一物质。 在某些情况下，聚合物如DNA或RNA也可以测序。 本发明的某些实施方案涉及使聚合物如DNA，RNA，蛋白质，多肽，多糖等通过孔并依次切割聚合物。 例如，可以使用激光或电场来切割聚合物。 在一些实施方案中，使用质谱测定聚合物的至少一个亚基的性质。 在一些实施方案中，可以在质谱仪中分离单个离子（其可以是聚合物的亚单位或基于另一物质的离子）和从单一离子产生的信号。