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11 条记录 (耗时 0.031 秒)

    Solid state molecular probe device
    1.
    发明授权
    Solid state molecular probe device 有权
    固态分子探针装置

    公开(公告)号：US07258838B2

    公开(公告)日：2007-08-21

    申请号：US10367075

    申请日：2003-02-14

    申请人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    发明人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    IPC分类号： H01L29/00 ,  H01L47/00 ,  G01N15/06 ,  G01N33/00 ,  G01N33/48

    CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

    摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

    摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。

    Nanotube Processing Employing Solid-Condensed-Gas-Layers
    2.
    发明申请
    Nanotube Processing Employing Solid-Condensed-Gas-Layers 有权
    使用固体 - 气相层的纳米管加工

    公开(公告)号：US20090179005A1

    公开(公告)日：2009-07-16

    申请号：US12409580

    申请日：2009-03-24

    申请人： Jene A. Golovchenko ,  Gavin M. King ,  Gregor M. Schurmann ,  Daniel Branton

    发明人： Jene A. Golovchenko ,  Gavin M. King ,  Gregor M. Schurmann ,  Daniel Branton

    IPC分类号： C23F1/00

    CPC分类号： C23C14/06 ,  B82Y10/00 ,  C23C14/5873 ,  H01J37/3005 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01L21/02238 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/31662 ,  H01L21/3185 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891

    摘要： In a method for processing a nanotube, a vapor is condensed to a solid condensate layer on a surface of the nanotube and then at least one selected region of the condensate layer is locally removed by directing a beam of energy at the selected region. The nanotube can be processed with at least a portion of the solid condensate layer maintained on the nanotube surface and thereafter the solid condensate layer removed. Nanotube processing can include, e.g., depositing a material layer on an exposed nanotube surface region where the condensate layer was removed. After forming a solid condensate layer, an electron beam can be directed at a selected region along a nanotube length corresponding to a location for cutting the nanotube, to locally remove the condensate layer at the region, and an ion beam can be directed at the selected region to cut the nanotube at the selected region.

    摘要翻译： 在用于处理纳米管的方法中，蒸汽被冷凝到纳米管表面上的固体冷凝物层，然后通过在所选择的区域引导能量束来局部去除冷凝物层的至少一个选定区域。 纳米管可以用保持在纳米管表面上的固体冷凝物层的至少一部分进行处理，然后除去固体冷凝物层。 纳米管加工可以包括例如在去除冷凝物层的暴露的纳米管表面区域上沉积材料层。 在形成固体冷凝物层之后，电子束可以沿着与用于切割纳米管的位置相对应的纳米管长度的选定区域被引导，以在该区域局部移除冷凝物层，并且离子束可以被引导到所选择的 区域以在所选区域切割纳米管。

    Controlled fabrication of gaps in electrically conducting structures
    6.
    发明授权
    Controlled fabrication of gaps in electrically conducting structures 有权
    控制导电结构间隙的制造

    公开(公告)号：US07582490B2

    公开(公告)日：2009-09-01

    申请号：US10767102

    申请日：2004-01-29

    申请人： Jene A. Golovchenko ,  Gregor M. Schürmann ,  Gavin M. King ,  Daniel Branton

    发明人： Jene A. Golovchenko ,  Gregor M. Schürmann ,  Gavin M. King ,  Daniel Branton

    IPC分类号： H01L21/00 ,  C23C14/00 ,  G01N35/08 ,  G01N35/00 ,  H01L29/78

    CPC分类号： G01N33/48721 ,  Y10T436/11 ,  Y10T436/12

    摘要： A method for controlling a gap in an electrically conducting solid state structure provided with a gap. The structure is exposed to a fabrication process environment conditions of which are selected to alter an extent of the gap. During exposure of the structure to the process environment, a voltage bias is applied across the gap. Electron tunneling current across the gap is measured during the process environment exposure and the process environment is controlled during process environment exposure based on tunneling current measurement. A method for controlling the gap between electrically conducting electrodes provided on a support structure. Each electrode has an electrode tip separated from other electrode tips by a gap. The electrodes are exposed to a flux of ions causing transport of material of the electrodes to corresponding electrode tips, locally adding material of the electrodes to electrode tips in the gap.

    摘要翻译： 一种用于控制具有间隙的导电固态结构中的间隙的方法。 该结构暴露于制造工艺环境条件，其条件被选择以改变间隙的程度。 在将结构暴露于工艺环境中时，跨越间隙施加电压偏置。 在工艺环境暴露期间测量跨越间隙的电子隧道电流，并且基于隧道电流测量在工艺环境暴露期间控制工艺环境。 一种用于控制设置在支撑结构上的导电电极之间的间隙的方法。 每个电极具有通过间隙与其它电极尖端分离的电极头。 电极暴露于离子通量，导致电极的材料传输到相应的电极尖端，将电极的材料局部地添加到间隙中的电极尖端。

    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions
    9.
    发明授权
    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions 有权
    在一个或多个维度上实时，活跃的波段尺度对齐，稳定和注册

    公开(公告)号：US07928409B2

    公开(公告)日：2011-04-19

    申请号：US11545498

    申请日：2006-10-11

    申请人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    发明人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    IPC分类号： G03F9/00

    CPC分类号： G01Q40/02 ,  G01Q10/065

    摘要： A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.

    摘要翻译： 一种用于在一个或多个维度空间中对准，稳定和对准两个或多个结构的方法和装置，其尺寸精度为皮秒。 低噪声激光被至少一个或多个结构或基准标记分散。 一个标记可以联接到要定位的每个结构。 已经从基准标记分散的光被收集在能够实现每个结构的实时高带宽位置感测的光敏装置中。 一个或多个结构应安装在舞台上，舞台可以在一个或多个维度上移动。 光敏装置响应于所接收的散射光产生信号，并且该信号用于在反馈回路中调制载物台的位置。

    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions
    10.
    发明申请
    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions 有权
    在一个或多个维度上实时，活跃的波段尺度对齐，稳定和注册

    公开(公告)号：US20100257641A1

    公开(公告)日：2010-10-07

    申请号：US11545498

    申请日：2006-10-11

    申请人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    发明人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    IPC分类号： G01Q10/00 ,  G12B13/00

    CPC分类号： G01Q40/02 ,  G01Q10/065

    摘要： A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.

    摘要翻译： 一种用于在一个或多个维度空间中对准，稳定和对准两个或多个结构的方法和装置，其尺寸精度为皮秒。 低噪声激光被至少一个或多个结构或基准标记分散。 一个标记可以联接到要定位的每个结构。 已经从基准标记分散的光被收集在能够实现每个结构的实时高带宽位置感测的光敏装置中。 一个或多个结构应安装在舞台上，舞台可以在一个或多个维度上移动。 光敏装置响应于所接收的散射光产生信号，并且该信号用于在反馈回路中调制载物台的位置。