摘要:
An overlay mark for checking alignment accuracy between a former layer and a later layer on a wafer is described, including a former pattern as a part of the former layer, and a later pattern as a part of a patterned photoresist layer defining the later layer. The former pattern has two parallel opposite edges each forming a sharp angle α with the x-axis of the wafer. The later pattern also has two parallel opposite edges each forming the sharp angle α with the x-axis of the wafer.
摘要:
An overlay mark for checking alignment accuracy between a former layer and a later layer on a wafer is described, including a former pattern as a part of the former layer, and a later pattern as a part of a patterned photoresist layer defining the later layer. The former pattern has two parallel opposite edges each forming a sharp angle α with the x-axis of the wafer. The later pattern also has two parallel opposite edges each forming the sharp angle α with the x-axis of the wafer.
摘要:
Methods of lithography, methods for forming patterning tools, and patterning tools are described. One such patterning tool include an active region that forms a first diffraction image on a lens when in use, and an inactive region that forms a second diffraction image on a lens when in use. The inactive region includes a pattern of phase shifting features formed in a substantially transparent material of the patterning tool. Patterning tools and methods, as described, can be used to compensate for lens distortion from effects such as localized heating.
摘要:
Some embodiments include methods of forming patterns. A semiconductor substrate is formed to comprise an electrically insulative material over a set of electrically conductive structures. An interconnect region is defined across the electrically conductive structures, and regions on opposing sides of the interconnect region are defined as secondary regions. A two-dimensional array of features is formed over the electrically insulative material. The two-dimensional array extends across the interconnect region and across the secondary regions. A pattern of the two-dimensional array is transferred through the electrically insulative material of the interconnect region to form contact openings that extend through the electrically insulative material and to the electrically conductive structures, and no portions of the two-dimensional array of the secondary regions is transferred into the electrically insulative material.
摘要:
Photolithographic apparatus and methods are disclosed. One such apparatus includes an optical path configured to provide a first diffraction pattern in a portion of an optical system and to provide a second diffraction pattern to the portion of the optical system after providing the first diffraction pattern. Meanwhile, one such method includes providing a first diffraction pattern onto a portion of an optical system, wherein a semiconductor article is imaged using the first diffraction pattern. A second diffraction pattern is also provided onto the portion of the optical system, but the second diffraction pattern is not used to image the semiconductor article.
摘要:
Attribute aggregation for a standard product unit (SPU) includes: receiving an attribute and a corresponding attribute value for a product; storing the attribute and the corresponding attribute value for the product; determining a frequency of the attribute and a frequency of the corresponding attribute value; aggregating the attribute and the corresponding attribute value based at least in part on the frequency of the attribute and the frequency of the corresponding attribute value according to a predetermined attribute aggregation rule; and generating a standard product unit of attribute information for the product.
摘要:
The present invention relates to a message-based notifying method for notifying a waiting queue and an application server, wherein the method includes: sending, by a calling terminal, a call request to a called terminal; forwarding, by an application server, to the called terminal the call request sent from the calling terminal, and determining from a response message returned from the called terminal whether the called terminal is in an idle status; and if the called terminal is in a busy status, then adding by the application server the calling terminal into a waiting enqueuing queue of the called terminal, and sending to the calling terminal a waiting notification message containing a waiting queue value corresponding to the calling terminal; or if the called terminal is in an idle status, then establishing directly a communication connection between the calling terminal and the called terminal.
摘要:
The present invention relates to a message-based notifying method for notifying a waiting queue and an application server, wherein the method includes: sending, by a calling terminal, a call request to a called terminal; forwarding, by an application server, to the called terminal the call request sent from the calling terminal, and determining from a response message returned from the called terminal whether the called terminal is in an idle status; and if the called terminal is in a busy status, then adding by the application server the calling terminal into a waiting enqueuing queue of the called terminal, and sending to the calling terminal a waiting notification message containing a waiting queue value corresponding to the calling terminal; or if the called terminal is in an idle status, then establishing directly a communication connection between the calling terminal and the called terminal.
摘要:
The present invention disclosed an all-digital speaker system device based on multi-bit Σ-Δ Modulation, comprising an A/D converter, an interpolation filter, a Σ-Δ modulator, a dynamic mismatch regulator, a differential buffer and a speaker array. The present invention takes advantage of the Σ-Δ modulation technique to effectively reduce the cost and complexity of the hardware realization of the speaker system device, thus realizing the full digitalization of the whole sound transmission link and the integration of the system device with low power dissipation and volume. Furthermore, the system device according to the present invention is provided with a better control ability on the local sound field, thus providing a better practicable method for the voice secret transmission.
摘要:
A reticle for lens heating mitigation includes a substrate, a target pattern and a redistributive pattern. The substrate includes a live pattern region and the target pattern is disposed within the live pattern region for constructing the target pattern onto a wafer. The redistributive pattern is also disposed within the live pattern region for redistributing energy onto a lens without being printed onto the wafer and without correcting said target pattern to be printed onto the wafer.