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1.
公开(公告)号:US08138079B2
公开(公告)日:2012-03-20
申请号:US11926154
申请日:2007-10-29
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L21/28 , H01L21/60 , H01L21/768
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
摘要翻译: 提供了一种方法和结构,以在集成电路管芯上形成的有源和/或无源器件和/或低k电介质上实现引线接合连接。 提供了具有有源和/或无源器件的半导体衬底,其中在有源和/或无源器件上形成互连金属化。 提供了形成在互连金属化之上的钝化层,其中在钝化层中形成开口以形成互连金属化的上金属层。 柔性金属焊盘形成在钝化层上方,其中柔性金属接合焊盘通过开口连接到上金属层,并且其中柔性金属接合焊盘基本上形成在有源和/或无源器件的上方。 顺应性金属接合焊盘可以由复合金属结构形成。
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公开(公告)号:US09142527B2
公开(公告)日:2015-09-22
申请号:US11926156
申请日:2007-10-29
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L21/4763 , H01L23/00
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
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3.
公开(公告)号:US07521812B2
公开(公告)日:2009-04-21
申请号:US11678598
申请日:2007-02-25
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L23/485 , H01L23/49
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
摘要翻译: 提供了一种方法和结构,以在集成电路管芯上形成的有源和/或无源器件和/或低k电介质上实现引线接合连接。 提供了具有有源和/或无源器件的半导体衬底,其中在有源和/或无源器件上形成互连金属化。 提供了形成在互连金属化之上的钝化层,其中在钝化层中形成开口以形成互连金属化的上金属层。 柔性金属焊盘形成在钝化层上方,其中柔性金属接合焊盘通过开口连接到上金属层,并且其中柔性金属接合焊盘基本上形成在有源和/或无源器件的上方。 顺应性金属接合焊盘可以由复合金属结构形成。
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公开(公告)号:US20070164453A1
公开(公告)日:2007-07-19
申请号:US11678599
申请日:2007-02-25
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L23/48
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
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5.
公开(公告)号:US20070164452A1
公开(公告)日:2007-07-19
申请号:US11678598
申请日:2007-02-25
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L23/48
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
摘要翻译: 提供了一种方法和结构,以在集成电路管芯上形成的有源和/或无源器件和/或低k电介质上实现引线接合连接。 提供了具有有源和/或无源器件的半导体衬底,其中在有源和/或无源器件上形成互连金属化。 提供了形成在互连金属化之上的钝化层,其中在钝化层中形成开口以形成互连金属化的上金属层。 柔性金属焊盘形成在钝化层上方,其中柔性金属接合焊盘通过开口连接到上金属层,并且其中柔性金属接合焊盘基本上形成在有源和/或无源器件的上方。 顺应性金属接合焊盘可以由复合金属结构形成。
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公开(公告)号:US20070164441A1
公开(公告)日:2007-07-19
申请号:US11678600
申请日:2007-02-25
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L23/48
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
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7.
公开(公告)号:US08742580B2
公开(公告)日:2014-06-03
申请号:US11678600
申请日:2007-02-25
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L23/48
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
摘要翻译: 提供了一种方法和结构,以在集成电路管芯上形成的有源和/或无源器件和/或低k电介质上实现引线接合连接。 提供了具有有源和/或无源器件的半导体衬底,其中在有源和/或无源器件上形成互连金属化。 提供了形成在互连金属化之上的钝化层,其中在钝化层中形成开口以形成互连金属化的上金属层。 柔性金属焊盘形成在钝化层上方,其中柔性金属接合焊盘通过开口连接到上金属层,并且其中柔性金属接合焊盘基本上形成在有源和/或无源器件的上方。 顺应性金属接合焊盘可以由复合金属结构形成。
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公开(公告)号:US09153555B2
公开(公告)日:2015-10-06
申请号:US11678599
申请日:2007-02-25
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L23/528 , H01L23/532 , H01L23/00
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
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9.
公开(公告)号:US08026588B2
公开(公告)日:2011-09-27
申请号:US11707827
申请日:2007-02-16
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L21/60
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
摘要翻译: 提供了一种方法和结构,以在集成电路管芯上形成的有源和/或无源器件和/或低k电介质上实现引线接合连接。 提供了具有有源和/或无源器件的半导体衬底,其中在有源和/或无源器件上形成互连金属化。 提供了形成在互连金属化之上的钝化层,其中在钝化层中形成开口以形成互连金属化的上金属层。 柔性金属焊盘形成在钝化层上方,其中柔性金属接合焊盘通过开口连接到上金属层,并且其中柔性金属接合焊盘基本上形成在有源和/或无源器件的上方。 顺应性金属接合焊盘可以由复合金属结构形成。
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公开(公告)号:US20080045003A1
公开(公告)日:2008-02-21
申请号:US11926156
申请日:2007-10-29
申请人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
发明人: Jin-Yuan Lee , Ying-Chih Chen , Mou-Shiung Lin
IPC分类号: H01L21/4763
CPC分类号: H01L24/48 , H01L24/03 , H01L24/05 , H01L2224/02166 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05187 , H01L2224/05548 , H01L2224/05556 , H01L2224/05558 , H01L2224/05624 , H01L2224/05644 , H01L2224/45144 , H01L2224/4807 , H01L2224/48453 , H01L2224/48463 , H01L2224/48599 , H01L2224/48624 , H01L2224/48644 , H01L2224/48647 , H01L2224/854 , H01L2224/85424 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01024 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/05042 , H01L2924/14 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/04953 , H01L2224/45099 , H01L2924/00 , H01L2924/00012
摘要: A method and structure are provided to enable wire bond connections over active and/or passive devices and/or low-k dielectrics, formed on an Integrated Circuit die. A semiconductor substrate having active and/or passive devices is provided, with interconnect metallization formed over the active and/or passive devices. A passivation layer formed over the interconnect metallization is provided, wherein openings are formed in the passivation layer to an upper metal layer of the interconnect metallization. Compliant metal bond pads are formed over the passivation layer, wherein the compliant metal bond pads are connected through the openings to the upper metal layer, and wherein the compliant metal bond pads are formed substantially over the active and/or passive devices. The compliant metal bond pads may be formed of a composite metal structure.
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