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    Calibration device and laser scanning microscope with such a calibration device
    1.
    发明授权
    Calibration device and laser scanning microscope with such a calibration device 有权
    校准装置和激光扫描显微镜用这种校准装置

    公开(公告)号：US08115164B2

    公开(公告)日：2012-02-14

    申请号：US12320599

    申请日：2009-01-29

    Applicant: Ralf Netz ,  Wolfgang Bathe ,  Joerg Steinert ,  Werner Kleinschmidt ,  Ingo Fahlbusch ,  Michael Brehm

    Inventor： Ralf Netz ,  Wolfgang Bathe ,  Joerg Steinert ,  Werner Kleinschmidt ,  Ingo Fahlbusch ,  Michael Brehm

    IPC: G01D18/00

    CPC classification number: G02B21/34 ,  G01M11/0264 ,  G02B21/002 ,  G02B27/32

    Abstract: A calibration device for managing a variety of performance tests and/or calibration tasks in a laser scanning microscope. The calibration device, which has focusing optics and a test structure arranged in the focal plane of the focusing optics, with structural elements detectable in reflected and/or transmitted light aligned to each other in a common mounting, can be switched into the microscope beam path in a laser scanning microscope, so that the pupil of the focusing optics coincides with the objective pupil of the laser scanning microscope or lies in a plane conjugated to it.

    Abstract translation: 用于在激光扫描显微镜中管理各种性能测试和/或校准任务的校准装置。 具有聚焦光学元件和布置在聚焦光学器件的焦平面中的测试结构的校准装置可以被转换成显微镜光束路径，该结构元件可在反射和/或透射的光中可检测到，在共同安装中彼此对准 在激光扫描显微镜中，使得聚焦光学元件的瞳孔与激光扫描显微镜的客观瞳孔重合或位于与其共轭的平面中。

    LASER SCANNING MICROSCOPE
    3.
    发明申请
    LASER SCANNING MICROSCOPE 有权
    激光扫描显微镜

    公开(公告)号：US20100188741A1

    公开(公告)日：2010-07-29

    申请号：US12691185

    申请日：2010-01-21

    Applicant: Matthias Danckwerts ,  Ralf Wolleschensky ,  Joerg Steinert ,  Robert Hauschild ,  Stefan Wilhelm

    Inventor： Matthias Danckwerts ,  Ralf Wolleschensky ,  Joerg Steinert ,  Robert Hauschild ,  Stefan Wilhelm

    IPC: G02B21/06

    CPC classification number: G02B21/0032 ,  G02B21/0048 ,  G02B21/0076

    Abstract: A laser scanning microscope has an illumination beam path and a detection beam path. A beamsplitter is provided which reflects the illumination light in direction of the sample and transmits the detection light in direction of the detection arrangement. An additional beamsplitter is provided for reflecting the illumination light and for transmitting the detection light, this additional beamsplitter being arranged in the illumination beam path downstream of the first beamsplitter in the illumination direction, and this additional beamsplitter substantially transmits the illumination light reflected at the first beamsplitter and the detection light, but acquires a wavelength range substantially different from the first beamsplitter with respect to its reflectivity.

    Abstract translation: 激光扫描显微镜具有照明光束路径和检测光束路径。 提供了一种分束器，其在样品的方向上反射照明光并沿检测装置的方向透过检测光。 提供了附加的分光器，用于反射照明光并传输检测光，该附加分光器被布置在照明光束路径中的第一分束器在照明方向下游，并且该附加分束器基本上透射在第一 分束器和检测光，但是相对于其反射率获取与第一分束器基本不同的波长范围。

    Optical zoom system for a light scanning electron microscope
    4.
    发明授权
    Optical zoom system for a light scanning electron microscope 有权
    光学扫描显微镜的光学变焦系统

    公开(公告)号：US07369305B2

    公开(公告)日：2008-05-06

    申请号：US10967335

    申请日：2004-10-19

    Applicant: Ralf Wolleschensky ,  Joerg Steinert ,  Michael Goelles ,  Kristina Uhlendorf

    Inventor： Ralf Wolleschensky ,  Joerg Steinert ,  Michael Goelles ,  Kristina Uhlendorf

    IPC: G02B21/00

    CPC classification number: G02B21/0032 ,  G02B15/173 ,  G02B21/0052

    Abstract: For a confocal scanning electron microscope (1) an optical zoom system (41) is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

    Abstract translation: 对于共焦扫描显微镜（1），提供了一种光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大率是可能的，而是另外在照射光束中产生光瞳图像 路径（IB）[BS]，从而使可变成像长度成为可能（原始瞳孔（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离）），使得轴向变化的目标瞳孔 因此可以补偿位置。

    Light scanning electron microscope and use
    5.
    发明申请
    Light scanning electron microscope and use 有权
    光扫描电子显微镜和使用

    公开(公告)号：US20060012871A1

    公开(公告)日：2006-01-19

    申请号：US10967638

    申请日：2004-10-19

    Applicant: Joerg-Michael Funk ,  Ralf Wolleschensky ,  Joerg Steinert

    Inventor： Joerg-Michael Funk ,  Ralf Wolleschensky ,  Joerg Steinert

    IPC: G02B21/06

    CPC classification number: G02B21/0044 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0227 ,  G01J3/0237 ,  G01J3/06 ,  G01J3/10 ,  G01J3/44 ,  G01J2003/1217 ,  G02B21/0064 ,  G02B21/008

    Abstract: In a confocal laser scanning microscope with an illuminating configuration (2), which provides an illuminating beam for illuminating a probe region (23), with a scanning configuration (3, 4), which guides the illuminating beam over the probe while scanning, and with a detector configuration (5), which via the scanning configuration (3, 4) images the illuminated probe region (23) by means of a confocal aperture (26) on to at least one detector unit (28), it is provided that the illuminating configuration (2) of the scanning configuration (3, 4) provides a line-shaped illuminating beam, that the scanning configuration (3, 4) guides the line-shaped illuminating beam over the probe f while scanning and that the confocal aperture is designed as a slotted aperture (26) or as a slot-shaped region (28, 48) of the detector unit (28) acting as a confocal aperture.

    Abstract translation: 在具有照射配置（2）的共聚焦激光扫描显微镜中，其提供用于照射探针区域（23）的照明光束，所述照射光束具有扫描配置（3,4），其在扫描时将照射光束引导到探测器上;以及 具有检测器配置（5），其通过扫描配置（3,4）通过共焦孔（26）将照射的探测区域（23）映射到至少一个检测器单元（28）上， 扫描配置（3,4）的照明配置（2）提供线形照明光束，扫描配置（3,4）在扫描时将线形照明光束引导到探头f上，并且共焦孔 被设计为作为共焦孔的检测器单元（28）的开槽孔（26）或槽形区域（28,48）。

    Optical zoom system for a light scanning microscope
    6.
    发明授权
    Optical zoom system for a light scanning microscope 有权
    光学扫描显微镜的光学变焦系统

    公开(公告)号：US07888628B2

    公开(公告)日：2011-02-15

    申请号：US12320293

    申请日：2009-01-22

    Applicant: Ralf Wolleschensky ,  Joerg Steinert ,  Michael Goelles ,  Kristina Uhlendorf

    Inventor： Ralf Wolleschensky ,  Joerg Steinert ,  Michael Goelles ,  Kristina Uhlendorf

    IPC: H01J3/14 ,  G02B21/06

    CPC classification number: G02B21/0072 ,  G02B15/173

    Abstract: For a confocal scanning microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable image length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

    Abstract translation: 对于共焦扫描显微镜（1），提供了具有线性扫描的光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大倍率是可能的，而是另外产生瞳孔图像 照明光束路径（IB）[BS]，从而使可变图像长度成为可能（原始瞳孔（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离） 可以补偿变化的物镜光瞳位置。

    Optical zoom system for a light scanning electron microscope
    7.
    发明申请
    Optical zoom system for a light scanning electron microscope 有权
    用于光扫描电子显微镜的光学变焦系统

    公开(公告)号：US20090236522A1

    公开(公告)日：2009-09-24

    申请号：US12320293

    申请日：2009-01-22

    Applicant: Ralf Wolleschensky ,  Joerg Steinert ,  Michael Goelles ,  Kristina Uhlendorf

    Inventor： Ralf Wolleschensky ,  Joerg Steinert ,  Michael Goelles ,  Kristina Uhlendorf

    IPC: G01N23/04 ,  G02B21/00 ,  H01J3/14

    CPC classification number: G02B21/0072 ,  G02B15/173

    Abstract: For a confocal scanning electron microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.

    Abstract translation: 对于共焦扫描电子显微镜（1），提供了具有线性扫描的光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大倍率是可能的，而是另外产生瞳孔图像 在照明光束路径（IB）[BS]中，从而使可变成像长度成为可能（原始瞳孔（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离）），使得 从而可以补偿轴向变化的物镜光瞳位置。

    Calibration device and laser scanning microscope with such a calibration device
    8.
    发明申请
    Calibration device and laser scanning microscope with such a calibration device 有权
    校准装置和激光扫描显微镜用这种校准装置

    公开(公告)号：US20090224174A1

    公开(公告)日：2009-09-10

    申请号：US12320599

    申请日：2009-01-29

    Applicant: Ralf Netz ,  Wolfgang Bathe ,  Joerg Steinert ,  Werner Kleinschmidt ,  Ingo Fahlbusch ,  Michael Brehm

    Inventor： Ralf Netz ,  Wolfgang Bathe ,  Joerg Steinert ,  Werner Kleinschmidt ,  Ingo Fahlbusch ,  Michael Brehm

    IPC: G01N21/64 ,  G02B21/06

    CPC classification number: G02B21/34 ,  G01M11/0264 ,  G02B21/002 ,  G02B27/32

    Abstract: A calibration device for managing a variety of performance tests and/or calibration tasks in a laser scanning microscope. The calibration device, which has focusing optics and a test structure arranged in the focal plane of the focusing optics, with structural elements detectable in reflected and/or transmitted light aligned to each other in a common mounting, can be switched into the microscope beam path in a laser scanning microscope, so that the pupil of the focusing optics coincides with the objective pupil of the laser scanning microscope or lies in a plane conjugated to it.

    Abstract translation: 用于在激光扫描显微镜中管理各种性能测试和/或校准任务的校准装置。 具有聚焦光学元件和布置在聚焦光学器件的焦平面中的测试结构的校准装置可以被转换成显微镜光束路径，该结构元件可在反射和/或透射的光中可检测到，在共同安装中彼此对准 在激光扫描显微镜中，使得聚焦光学元件的瞳孔与激光扫描显微镜的客观瞳孔重合或位于与其共轭的平面中。

    Method for correcting a control of an optical scanner in a device for mapping a sample by scanning and the device for performing the method
    9.
    发明申请
    Method for correcting a control of an optical scanner in a device for mapping a sample by scanning and the device for performing the method 有权
    用于校正用于通过扫描映射样本的装置中的光学扫描器的控制的方法和用于执行该方法的装置

    公开(公告)号：US20090008539A1

    公开(公告)日：2009-01-08

    申请号：US11525210

    申请日：2006-09-22

    Applicant: Joerg Steinert

    Inventor： Joerg Steinert

    IPC: H01J3/14 ,  G02B26/10

    CPC classification number: G02B27/0031

    Abstract: Method for correcting a control of an optical scanner (14) in a device for mapping of a sample (2; 2′) by scanning, said device guiding at least one beam path section (4′, 18′) of an illumination beam path of the device over the sample (2; 2′) from an illumination device (10) to the sample (2; 2′) and/or a mapping beam path of the device from the sample (2; 2′) to a determination device (10) of the device in order to obtain an image of the sample (2; 2′), generating control signals corresponding to a predetermined setpoint movement using parameters and/or a transfer function of the scanner (14) that are used for control and/or regulation and moving the at least one beam path section (4′, 18′) in response to the control signals, whereby in the method an image of a reference sample (2; 2′) having predetermined structures (36) mappable by the device is obtained by generating control signals corresponding to a predetermined setpoint test movement and moving the at least one beam path section (4′, 18′) in response to the control signals, thereby obtaining the image. From the image thereby obtained, a deviation in the actual positions of the predetermined structures (36) of the reference sample (2; 2′) from the predetermined setpoint positions is determined and transfer function or parameters are corrected as a function of the deviations at least one of the parameters used for control and/or regulation, so that when using the corrected parameter for control or regulation and/or when using the corrected transfer function, the deviation in the actual position of at least one of the structures (36) from the setpoint position of the structure is reduced.

    Abstract translation: 用于校正用于通过扫描映射样品（2; 2'）的装置中的光学扫描器（14）的控制的方法，所述装置引导照明光束路径的至少一个光束路径部分（4'，18'） 从所述样品（2; 2'）从所述样品（2; 2'）从所述样品（2; 2'）到所述样品（2; 2'）的样品（2; 2'）和/或所述装置的从所述样品 设备（10），以获得样本（2; 2'）的图像，使用用于扫描器（14）的参数和/或传递函数产生对应于预定设定点移动的控制信号 控制和/或调节并且响应于控制信号移动至少一个光束路径部分（4'，18'），由此在该方法中具有预定结构（36）的参考样品（2; 2'）的图像 通过产生对应于预定的设定点测试移动的控制信号，并且移动至少一个光束路径段 响应于控制信号，打开（4'，18'），从而获得图像。 根据这样获得的图像，确定参考样本（2; 2'）的预定结构（36）与预定设定点位置的实际位置的偏差，并且将传递函数或参数作为 用于控制和/或调节的参数中的至少一个，使得当使用校正参数进行控制或调节和/或当使用校正的传递函数时，至少一个结构（36）的实际位置的偏差 从结构的设定点位置减少。

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