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公开(公告)号：US06676365B2
公开(公告)日：2004-01-13
申请号：US09810834
申请日：2001-03-16
申请人： Johann F. Adam , Evan F. Cromwell , Eric D. Moen
发明人： Johann F. Adam , Evan F. Cromwell , Eric D. Moen
IPC分类号： B65G4907
CPC分类号： H01L21/67784 , B65G51/03 , B65G2203/044 , Y10S414/135
摘要： An air track includes a concave top surface with a plurality of air outlets or a flat surface with a notch and a plurality of air outlets. The body of the air track includes at least one air filter that runs along the length of at least a portion of the body. The air filter divides the body into a first plenum and a second plenum. The air track also includes a hood covering at least a portion of the top surface. The air track further includes a stopper assembly that arrests the motion of a disk. The stopper assembly includes a disk detector that senses the presence of the disk on the air track.
摘要翻译： 空气轨道包括具有多个空气出口的凹形顶表面或具有凹口的平坦表面和多个空气出口。 空气轨道的主体包括沿主体的至少一部分的长度延伸的至少一个空气过滤器。 空气过滤器将主体分为第一增压室和第二增压室。 空气轨道还包括覆盖顶表面的至少一部分的罩。 空气轨道还包括阻止盘的运动的止动器组件。 止动器组件包括盘检测器，该盘检测器感测在空中轨道上盘的存在。
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公开(公告)号：US06596083B2
公开(公告)日：2003-07-22
申请号：US09810835
申请日：2001-03-16
申请人： Evan F. Cromwell , Johann F. Adam , Eric D. Moen
发明人： Evan F. Cromwell , Johann F. Adam , Eric D. Moen
IPC分类号： B05C1902
CPC分类号： B05C3/09 , B05C13/025 , B05D1/18 , G11B7/24 , G11B7/268 , G11B23/00 , G11B33/148
摘要： A system for processing a disk includes an end-effector having a plurality of fingers. The end-effector is mounted to a rotary actuator. The rotary actuator is mounted to a linear stage. The linear stage is positioned adjacent to an air track and a tank. The rotary actuator and the linear stage place the fingers into the inner diameter of a disk on the air track. The fingers grip the inner diameter of the disk. The rotary actuator and the liner stage then place the fingers holding the disk into the tank. The tank is filled with a processing liquid such as a lubrication solution to lubricate the disk.
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公开(公告)号：US20080174842A1
公开(公告)日：2008-07-24
申请号：US12072047
申请日：2008-02-22
IPC分类号： G02B26/08
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. The apparatus has a light source, one or more illumination optical elements, a scanner, one or more collection optical elements, and a device forming an aperture that limits detection of light from the sample. The illumination optical elements direct a light beam from the light source onto the sample. The scanner scans the light beam across the sample. The collection optical elements collect light from the sample and transmit the collected light to a detector. None of the collection optical elements are included among the illumination optical elements. The device forming an aperture limits detection of light from the sample to light associated with a limited vertical depth within the sample, and is one of the collection optical elements.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 该装置具有光源，一个或多个照明光学元件，扫描器，一个或多个收集光学元件，以及形成限制来自样品的光的检测的孔径的装置。 照明光学元件将来自光源的光束引导到样品上。 扫描仪扫描样品上的光束。 收集光学元件收集来自样品的光并将收集的光传输到检测器。 在照明光学元件中不包括收集光学元件。 形成孔径的装置将从样品的光的检测限制到与样品内的有限垂直深度相关联的光，并且是收集光学元件之一。
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公开(公告)号：US06544343B2
公开(公告)日：2003-04-08
申请号：US10173382
申请日：2002-06-14
IPC分类号： B08B700
CPC分类号： H01L21/67046 , B08B1/04 , G11B23/505 , Y10S134/902
摘要： A washer includes driving and scrubbing rollers that press against the opposing surfaces of a substrate, which may be, e.g., a small form factor disk. The driving rollers and scrubbing rollers are approximately aligned along two different radii of the substrate that are separated by 180 degrees. The driving rollers rotate in opposite directions as do the scrubbing rollers. During the scrub cycle, the driving rollers cause the substrate to rotate, while the scrubbing rollers scrub the opposing surfaces of the substrate. Outside diameter rollers that are orthogonally positioned relative to the driving rollers and the scrubbing rollers, and which may be free spinning, contact the outside diameter of the substrate and hold the substrate in position during the scrub cycle. The substrate is loaded into the washer by lifting the substrate, via a lifting arm, to the driving and scrubbing rollers. The rotation of the driving and scrubbing rollers pulls the substrate into position with the outside diameter of the substrate in contact with the outside diameter rollers. The substrate may be unloaded by reversing the direction of rotation of the driving and scrubbing rollers and lowering the substrate away from the rollers or by separating the outside diameter rollers, which forces the substrate out from between the driving and scrubbing rollers.
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公开(公告)号：US07576862B2
公开(公告)日：2009-08-18
申请号：US10928484
申请日：2004-08-26
IPC分类号： G01N21/55
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. A light beam of a first frequency is scanned onto a sample surface using one or more illumination optical elements. Light of a second frequency is collected from a scan line on the sample surface using one or more collection optical elements. None of the one or more collection optical elements are included among the one or more illumination optical elements. The collected light is transmitted to a detector.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 使用一个或多个照明光学元件将第一频率的光束扫描到样品表面上。 使用一个或多个收集光学元件从样品表面上的扫描线收集第二频率的光。 在一个或多个照明光学元件中不包括一个或多个收集光学元件。 所收集的光被传送到检测器。
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公开(公告)号：US06682270B2
公开(公告)日：2004-01-27
申请号：US10200714
申请日：2002-07-22
申请人： Johann F. Adam , Evan F. Cromwell
发明人： Johann F. Adam , Evan F. Cromwell
IPC分类号： B65G5300
CPC分类号： G11B23/00 , C23C14/56 , G11B17/08 , G11B17/226 , Y10S414/135 , Y10S414/137
摘要： A sputter pallet loading and unloading device includes in one embodiment a spindle that rotates the pallet while an arm is engaged with the spring in the pallet to open and close the spring. In another embodiment, the spindle is located adjacent an air track that moves the disk substrate over a cushion of air to the loading area of the pallet. The air pressure under the disk substrate is increased to raise the disk substrate into the loading area. Once raised into the loading area, the spring is closed, e.g., by rotating the pallet in the opposite direction. The pallet and air-track are at a small angle to allow the substrate to slide into the correct position. The simplicity of operation leads to a reduced cost and a higher throughput for this device compared to a robotic loader.
摘要翻译： 溅射托盘装载和卸载装置在一个实施例中包括在托臂与托盘中的弹簧接合以打开和关闭弹簧的同时旋转托盘的主轴。 在另一个实施例中，主轴位于空气轨道附近，该空气轨道将盘基板移动到空气垫上至托盘的装载区域。 磁盘基板下方的空气压力升高，将盘基板升高到装载区域。 一旦升起到装载区域中，例如通过沿相反方向旋转托盘来关闭弹簧。 托盘和空气轨道处于小角度，以使基板滑入正确的位置。 与机器人装载机相比，操作的简单性导致该装置的成本降低和更高的吞吐量。
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公开(公告)号：US06438781B1
公开(公告)日：2002-08-27
申请号：US09556813
申请日：2000-04-21
IPC分类号： A47L1500
CPC分类号： H01L21/67046 , B08B1/04 , G11B23/505 , Y10S134/902
摘要： A washer includes driving and scrubbing rollers that press against the opposing surfaces of a substrate, which may be, e.g., a small form factor disk. The driving rollers and scrubbing rollers are approximately aligned along two different radii of the substrate that are separated by 180 degrees. The driving rollers rotate in opposite directions as do the scrubbing rollers. During the scrub cycle, the driving rollers cause the substrate to rotate, while the scrubbing rollers scrub the opposing surfaces of the substrate. Outside diameter rollers that are orthogonally positioned relative to the driving rollers and the scrubbing rollers, and which may be free spinning, contact the outside diameter of the substrate and hold the substrate in position during the scrub cycle. The substrate is loaded into the washer by lifting the substrate, via a lifting arm, to the driving and scrubbing rollers. The rotation of the driving and scrubbing rollers pulls the substrate into position with the outside diameter of the substrate in contact with the outside diameter rollers. The substrate may be unloaded by reversing the direction of rotation of the driving and scrubbing rollers and lowering the substrate away from the rollers or by separating the outside diameter rollers, which forces the substrate out from between the driving and scrubbing rollers.
摘要翻译： 洗衣机包括驱动和擦洗辊，该辊压靠在衬底的相对表面上，衬底可以是例如小尺寸盘。 驱动辊和擦洗辊大致对准沿着分开180度的衬底的两个不同的半径。 驱动辊旋转方向与洗涤辊相反。 在擦洗循环期间，驱动辊使基板旋转，同时擦洗辊擦洗基板的相对表面。 相对于驱动辊和擦洗辊正交定位并且可以是自由纺丝的外径辊接触衬底的外径并且在擦洗循环期间将衬底保持在适当的位置。 通过将基板通过提升臂提升到驱动和擦洗辊将衬底装载到垫圈中。 驱动和洗涤辊的旋转将基材拉到适当的位置，其中基材的外径与外径辊接触。 可以通过反转驱动和洗涤辊的旋转方向并使基板远离辊子或通过分离外部辊而将基板卸载，从而迫使基板从驱动辊和擦洗辊之间移出。
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公开(公告)号：US07812956B2
公开(公告)日：2010-10-12
申请号：US12072047
申请日：2008-02-22
IPC分类号： G01N21/55 , G01N21/25 , G01N21/00 , G01N21/64 , G01J3/30 , G01J1/58 , G01J1/10 , F21V9/16 , G21H3/02 , H01J65/06 , H01J65/08
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. The apparatus has a light source, one or more illumination optical elements, a scanner, one or more collection optical elements, and a device forming an aperture that limits detection of light from the sample. The illumination optical elements direct a light beam from the light source onto the sample. The scanner scans the light beam across the sample. The collection optical elements collect light from the sample and transmit the collected light to a detector. None of the collection optical elements are included among the illumination optical elements. The device forming an aperture limits detection of light from the sample to light associated with a limited vertical depth within the sample, and is one of the collection optical elements.
摘要翻译： 方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。 该装置具有光源，一个或多个照明光学元件，扫描器，一个或多个收集光学元件，以及形成限制来自样品的光的检测的孔径的装置。 照明光学元件将来自光源的光束引导到样品上。 扫描仪扫描样品上的光束。 收集光学元件收集来自样品的光并将收集的光传输到检测器。 在照明光学元件中不包括收集光学元件。 形成孔径的装置将从样品的光的检测限制到与样品内的有限垂直深度相关联的光，并且是收集光学元件之一。
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公开(公告)号：US06461085B1
公开(公告)日：2002-10-08
申请号：US09810854
申请日：2001-03-16
申请人： Johann F. Adam , Evan F. Cromwell
发明人： Johann F. Adam , Evan F. Cromwell
IPC分类号： B65G5308
CPC分类号： G11B23/00 , C23C14/56 , G11B17/08 , G11B17/226 , Y10S414/135 , Y10S414/137
摘要： A sputter pallet loading and unloading device includes in one embodiment a spindle that rotates the pallet while an arm is engaged with the spring in the pallet to open and close the spring. In another embodiment, the spindle is located adjacent an air track that moves the disk substrate over a cushion of air to the loading area of the pallet. The air pressure under the disk substrate is increased to raise the disk substrate into the loading area. Once raised into the loading area, the spring is closed, e.g., by rotating the pallet in the opposite direction. The pallet and air-track are at a small angle to allow the substrate to slide into the correct position. The simplicity of operation leads to a reduced cost and a higher throughput for this device compared to a robotic loader.
摘要翻译： 溅射托盘装载和卸载装置在一个实施例中包括在托臂与托盘中的弹簧接合以打开和关闭弹簧的同时旋转托盘的主轴。 在另一个实施例中，主轴位于空气轨道附近，该空气轨道将盘基板移动到空气垫上至托盘的装载区域。 磁盘基板下方的空气压力升高，将盘基板升高到装载区域。 一旦升起到装载区域中，例如通过沿相反方向旋转托盘来关闭弹簧。 托盘和空气轨道处于小角度，以使基板滑入正确的位置。 与机器人装载机相比，操作的简单性导致该装置的成本降低和更高的吞吐量。
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公开(公告)号：US06342707B1
公开(公告)日：2002-01-29
申请号：US09597850
申请日：2000-06-20
申请人： Evan F. Cromwell , Johann F. Adam
发明人： Evan F. Cromwell , Johann F. Adam
IPC分类号： G01N2188
CPC分类号： G01N21/474
摘要： A laser scatterometer used, e.g., to detect defects on memory media, includes a beam block that can be finely adjusted so as to block specular light while maximizing the small angle scattered light that is received by the light detector. The beam block may be adjusted independently of the light detector or may be a masked beam block that is adjusted with the entire light detector. The light source produces a light beam that is focused so as to maximize the spot size on the object being tested while minimizing the spot size at the beam block, which advantageously maximizes the small angle scattered light while decreasing testing time. The large spot size at the object being tested permits detection of large defects. Thus, disks may be quickly tested, e.g., during the burnishing process, to determine if there are any large defects.
摘要翻译： 例如，用于检测存储介质上的缺陷的激光散射仪包括可以精细调节的光束块，以便在最大化由光检测器接收的小角度散射光的同时阻挡镜面光。 可以独立于光检测器来调节光束块，或者可以是用整个光检测器调节的掩蔽的光束块。 光源产生被聚焦的光束，以便使被测物体上的光斑尺寸最大化，同时最小化光束块处的光点尺寸，这有利地使小角度散射光最大化，同时减少测试时间。 被测物体的大斑点尺寸允许检测到大的缺陷。 因此，可以例如在抛光过程中快速测试盘，以确定是否存在任何大的缺陷。
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